3/16/2011	12:00:05 AM	H2 valve closed
3/16/2011	12:00:05 AM	BCl3 valve closed
3/16/2011	12:00:05 AM	PH3 valve closed
3/16/2011	12:00:05 AM	SiCl4 pre valve closed
3/16/2011	12:00:05 AM	SiCl4 post valve closed
3/16/2011	12:00:05 AM	Bubbler valve closed
3/16/2011	12:00:05 AM	Helium valve opened
3/16/2011	12:00:05 AM	Main Vac valve opened
3/16/2011	12:00:05 AM	Bypass valve opened
3/16/2011	12:00:05 AM	Helium MFC set to  100.000000
3/16/2011	12:00:05 AM	H2 MFC set to  0.000000
3/16/2011	12:00:05 AM	BCl3 MFC set to  0.000000
3/16/2011	12:00:05 AM	PHl3 MFC set to  0.000000
3/16/2011	12:00:05 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:00:05 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:00:05 AM	Tube furnace set to 0
3/16/2011	12:01:05 AM	Helium valve closed
3/16/2011	12:01:05 AM	H2 valve closed
3/16/2011	12:01:05 AM	BCl3 valve closed
3/16/2011	12:01:05 AM	PH3 valve closed
3/16/2011	12:01:05 AM	SiCl4 pre valve closed
3/16/2011	12:01:05 AM	SiCl4 post valve closed
3/16/2011	12:01:05 AM	Bubbler valve closed
3/16/2011	12:01:05 AM	Main Vac valve opened
3/16/2011	12:01:05 AM	Bypass valve opened
3/16/2011	12:01:05 AM	Helium MFC set to  0.000000
3/16/2011	12:01:05 AM	H2 MFC set to  0.000000
3/16/2011	12:01:05 AM	BCl3 MFC set to  0.000000
3/16/2011	12:01:05 AM	PHl3 MFC set to  0.000000
3/16/2011	12:01:05 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:01:05 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:01:05 AM	Tube furnace set to 0
3/16/2011	12:02:05 AM	H2 valve closed
3/16/2011	12:02:05 AM	BCl3 valve closed
3/16/2011	12:02:05 AM	PH3 valve closed
3/16/2011	12:02:05 AM	SiCl4 pre valve closed
3/16/2011	12:02:05 AM	SiCl4 post valve closed
3/16/2011	12:02:05 AM	Bubbler valve closed
3/16/2011	12:02:05 AM	Helium valve opened
3/16/2011	12:02:05 AM	Main Vac valve opened
3/16/2011	12:02:05 AM	Bypass valve opened
3/16/2011	12:02:05 AM	Helium MFC set to  100.000000
3/16/2011	12:02:05 AM	H2 MFC set to  0.000000
3/16/2011	12:02:05 AM	BCl3 MFC set to  0.000000
3/16/2011	12:02:05 AM	PHl3 MFC set to  0.000000
3/16/2011	12:02:05 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:02:05 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:02:05 AM	Tube furnace set to 0
3/16/2011	12:03:05 AM	Helium valve closed
3/16/2011	12:03:05 AM	H2 valve closed
3/16/2011	12:03:05 AM	BCl3 valve closed
3/16/2011	12:03:05 AM	PH3 valve closed
3/16/2011	12:03:05 AM	SiCl4 pre valve closed
3/16/2011	12:03:05 AM	SiCl4 post valve closed
3/16/2011	12:03:05 AM	Bubbler valve closed
3/16/2011	12:03:05 AM	Main Vac valve opened
3/16/2011	12:03:05 AM	Bypass valve opened
3/16/2011	12:03:05 AM	Helium MFC set to  0.000000
3/16/2011	12:03:05 AM	H2 MFC set to  0.000000
3/16/2011	12:03:05 AM	BCl3 MFC set to  0.000000
3/16/2011	12:03:05 AM	PHl3 MFC set to  0.000000
3/16/2011	12:03:05 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:03:05 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:03:06 AM	Tube furnace set to 0
3/16/2011	12:04:06 AM	H2 valve closed
3/16/2011	12:04:06 AM	BCl3 valve closed
3/16/2011	12:04:06 AM	PH3 valve closed
3/16/2011	12:04:06 AM	SiCl4 pre valve closed
3/16/2011	12:04:06 AM	SiCl4 post valve closed
3/16/2011	12:04:06 AM	Bubbler valve closed
3/16/2011	12:04:06 AM	Helium valve opened
3/16/2011	12:04:06 AM	Main Vac valve opened
3/16/2011	12:04:06 AM	Bypass valve opened
3/16/2011	12:04:06 AM	Helium MFC set to  100.000000
3/16/2011	12:04:06 AM	H2 MFC set to  0.000000
3/16/2011	12:04:06 AM	BCl3 MFC set to  0.000000
3/16/2011	12:04:06 AM	PHl3 MFC set to  0.000000
3/16/2011	12:04:06 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:04:06 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:04:06 AM	Tube furnace set to 0
3/16/2011	12:05:06 AM	Helium valve closed
3/16/2011	12:05:06 AM	H2 valve closed
3/16/2011	12:05:06 AM	BCl3 valve closed
3/16/2011	12:05:06 AM	PH3 valve closed
3/16/2011	12:05:06 AM	SiCl4 pre valve closed
3/16/2011	12:05:06 AM	SiCl4 post valve closed
3/16/2011	12:05:06 AM	Bubbler valve closed
3/16/2011	12:05:06 AM	Main Vac valve opened
3/16/2011	12:05:06 AM	Bypass valve opened
3/16/2011	12:05:06 AM	Helium MFC set to  0.000000
3/16/2011	12:05:06 AM	H2 MFC set to  0.000000
3/16/2011	12:05:06 AM	BCl3 MFC set to  0.000000
3/16/2011	12:05:06 AM	PHl3 MFC set to  0.000000
3/16/2011	12:05:06 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:05:06 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:05:06 AM	Tube furnace set to 0
3/16/2011	12:06:06 AM	H2 valve closed
3/16/2011	12:06:06 AM	BCl3 valve closed
3/16/2011	12:06:06 AM	PH3 valve closed
3/16/2011	12:06:06 AM	SiCl4 pre valve closed
3/16/2011	12:06:06 AM	SiCl4 post valve closed
3/16/2011	12:06:06 AM	Bubbler valve closed
3/16/2011	12:06:06 AM	Helium valve opened
3/16/2011	12:06:06 AM	Main Vac valve opened
3/16/2011	12:06:06 AM	Bypass valve opened
3/16/2011	12:06:06 AM	Helium MFC set to  100.000000
3/16/2011	12:06:06 AM	H2 MFC set to  0.000000
3/16/2011	12:06:06 AM	BCl3 MFC set to  0.000000
3/16/2011	12:06:06 AM	PHl3 MFC set to  0.000000
3/16/2011	12:06:06 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:06:06 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:06:06 AM	Tube furnace set to 0
3/16/2011	12:07:06 AM	Helium valve closed
3/16/2011	12:07:06 AM	H2 valve closed
3/16/2011	12:07:06 AM	BCl3 valve closed
3/16/2011	12:07:06 AM	PH3 valve closed
3/16/2011	12:07:06 AM	SiCl4 pre valve closed
3/16/2011	12:07:06 AM	SiCl4 post valve closed
3/16/2011	12:07:06 AM	Bubbler valve closed
3/16/2011	12:07:06 AM	Main Vac valve opened
3/16/2011	12:07:06 AM	Bypass valve opened
3/16/2011	12:07:06 AM	Helium MFC set to  0.000000
3/16/2011	12:07:06 AM	H2 MFC set to  0.000000
3/16/2011	12:07:06 AM	BCl3 MFC set to  0.000000
3/16/2011	12:07:06 AM	PHl3 MFC set to  0.000000
3/16/2011	12:07:06 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:07:06 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:07:06 AM	Tube furnace set to 0
3/16/2011	12:08:06 AM	H2 valve closed
3/16/2011	12:08:06 AM	BCl3 valve closed
3/16/2011	12:08:06 AM	PH3 valve closed
3/16/2011	12:08:06 AM	SiCl4 pre valve closed
3/16/2011	12:08:06 AM	SiCl4 post valve closed
3/16/2011	12:08:06 AM	Bubbler valve closed
3/16/2011	12:08:06 AM	Helium valve opened
3/16/2011	12:08:06 AM	Main Vac valve opened
3/16/2011	12:08:06 AM	Bypass valve opened
3/16/2011	12:08:06 AM	Helium MFC set to  100.000000
3/16/2011	12:08:06 AM	H2 MFC set to  0.000000
3/16/2011	12:08:06 AM	BCl3 MFC set to  0.000000
3/16/2011	12:08:06 AM	PHl3 MFC set to  0.000000
3/16/2011	12:08:06 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:08:06 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:08:06 AM	Tube furnace set to 0
3/16/2011	12:09:07 AM	Helium valve closed
3/16/2011	12:09:07 AM	H2 valve closed
3/16/2011	12:09:07 AM	BCl3 valve closed
3/16/2011	12:09:07 AM	PH3 valve closed
3/16/2011	12:09:07 AM	SiCl4 pre valve closed
3/16/2011	12:09:07 AM	SiCl4 post valve closed
3/16/2011	12:09:07 AM	Bubbler valve closed
3/16/2011	12:09:07 AM	Main Vac valve opened
3/16/2011	12:09:07 AM	Bypass valve opened
3/16/2011	12:09:07 AM	Helium MFC set to  0.000000
3/16/2011	12:09:07 AM	H2 MFC set to  0.000000
3/16/2011	12:09:07 AM	BCl3 MFC set to  0.000000
3/16/2011	12:09:07 AM	PHl3 MFC set to  0.000000
3/16/2011	12:09:07 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:09:07 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:09:07 AM	Tube furnace set to 0
3/16/2011	12:10:07 AM	H2 valve closed
3/16/2011	12:10:07 AM	BCl3 valve closed
3/16/2011	12:10:07 AM	PH3 valve closed
3/16/2011	12:10:07 AM	SiCl4 pre valve closed
3/16/2011	12:10:07 AM	SiCl4 post valve closed
3/16/2011	12:10:07 AM	Bubbler valve closed
3/16/2011	12:10:07 AM	Helium valve opened
3/16/2011	12:10:07 AM	Main Vac valve opened
3/16/2011	12:10:07 AM	Bypass valve opened
3/16/2011	12:10:07 AM	Helium MFC set to  100.000000
3/16/2011	12:10:07 AM	H2 MFC set to  0.000000
3/16/2011	12:10:07 AM	BCl3 MFC set to  0.000000
3/16/2011	12:10:07 AM	PHl3 MFC set to  0.000000
3/16/2011	12:10:07 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:10:07 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:10:07 AM	Tube furnace set to 0
3/16/2011	12:11:07 AM	Helium valve closed
3/16/2011	12:11:07 AM	H2 valve closed
3/16/2011	12:11:07 AM	BCl3 valve closed
3/16/2011	12:11:07 AM	PH3 valve closed
3/16/2011	12:11:07 AM	SiCl4 pre valve closed
3/16/2011	12:11:07 AM	SiCl4 post valve closed
3/16/2011	12:11:07 AM	Bubbler valve closed
3/16/2011	12:11:07 AM	Main Vac valve opened
3/16/2011	12:11:07 AM	Bypass valve opened
3/16/2011	12:11:07 AM	Helium MFC set to  0.000000
3/16/2011	12:11:07 AM	H2 MFC set to  0.000000
3/16/2011	12:11:07 AM	BCl3 MFC set to  0.000000
3/16/2011	12:11:07 AM	PHl3 MFC set to  0.000000
3/16/2011	12:11:07 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:11:07 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:11:07 AM	Tube furnace set to 0
3/16/2011	12:12:07 AM	H2 valve closed
3/16/2011	12:12:07 AM	BCl3 valve closed
3/16/2011	12:12:07 AM	PH3 valve closed
3/16/2011	12:12:07 AM	SiCl4 pre valve closed
3/16/2011	12:12:07 AM	SiCl4 post valve closed
3/16/2011	12:12:07 AM	Bubbler valve closed
3/16/2011	12:12:07 AM	Helium valve opened
3/16/2011	12:12:07 AM	Main Vac valve opened
3/16/2011	12:12:07 AM	Bypass valve opened
3/16/2011	12:12:07 AM	Helium MFC set to  100.000000
3/16/2011	12:12:07 AM	H2 MFC set to  0.000000
3/16/2011	12:12:07 AM	BCl3 MFC set to  0.000000
3/16/2011	12:12:07 AM	PHl3 MFC set to  0.000000
3/16/2011	12:12:07 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:12:07 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:12:07 AM	Tube furnace set to 0
3/16/2011	12:13:07 AM	Helium valve closed
3/16/2011	12:13:07 AM	H2 valve closed
3/16/2011	12:13:07 AM	BCl3 valve closed
3/16/2011	12:13:07 AM	PH3 valve closed
3/16/2011	12:13:07 AM	SiCl4 pre valve closed
3/16/2011	12:13:07 AM	SiCl4 post valve closed
3/16/2011	12:13:07 AM	Bubbler valve closed
3/16/2011	12:13:07 AM	Main Vac valve opened
3/16/2011	12:13:07 AM	Bypass valve opened
3/16/2011	12:13:07 AM	Helium MFC set to  0.000000
3/16/2011	12:13:07 AM	H2 MFC set to  0.000000
3/16/2011	12:13:07 AM	BCl3 MFC set to  0.000000
3/16/2011	12:13:07 AM	PHl3 MFC set to  0.000000
3/16/2011	12:13:07 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:13:07 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:13:07 AM	Tube furnace set to 0
3/16/2011	12:14:07 AM	H2 valve closed
3/16/2011	12:14:08 AM	BCl3 valve closed
3/16/2011	12:14:08 AM	PH3 valve closed
3/16/2011	12:14:08 AM	SiCl4 pre valve closed
3/16/2011	12:14:08 AM	SiCl4 post valve closed
3/16/2011	12:14:08 AM	Bubbler valve closed
3/16/2011	12:14:08 AM	Helium valve opened
3/16/2011	12:14:08 AM	Main Vac valve opened
3/16/2011	12:14:08 AM	Bypass valve opened
3/16/2011	12:14:08 AM	Helium MFC set to  100.000000
3/16/2011	12:14:08 AM	H2 MFC set to  0.000000
3/16/2011	12:14:08 AM	BCl3 MFC set to  0.000000
3/16/2011	12:14:08 AM	PHl3 MFC set to  0.000000
3/16/2011	12:14:08 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:14:08 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:14:08 AM	Tube furnace set to 0
3/16/2011	12:15:08 AM	Helium valve closed
3/16/2011	12:15:08 AM	H2 valve closed
3/16/2011	12:15:08 AM	BCl3 valve closed
3/16/2011	12:15:08 AM	PH3 valve closed
3/16/2011	12:15:08 AM	SiCl4 pre valve closed
3/16/2011	12:15:08 AM	SiCl4 post valve closed
3/16/2011	12:15:08 AM	Bubbler valve closed
3/16/2011	12:15:08 AM	Main Vac valve opened
3/16/2011	12:15:08 AM	Bypass valve opened
3/16/2011	12:15:08 AM	Helium MFC set to  0.000000
3/16/2011	12:15:08 AM	H2 MFC set to  0.000000
3/16/2011	12:15:08 AM	BCl3 MFC set to  0.000000
3/16/2011	12:15:08 AM	PHl3 MFC set to  0.000000
3/16/2011	12:15:08 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:15:08 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:15:08 AM	Tube furnace set to 0
3/16/2011	12:16:03 AM	Run aborted at 12:16 AM
3/16/2011	12:16:03 AM	Helium valve closed
3/16/2011	12:16:03 AM	H2 valve closed
3/16/2011	12:16:03 AM	BCl3 valve closed
3/16/2011	12:16:03 AM	PH3 valve closed
3/16/2011	12:16:03 AM	SiCl4 pre valve closed
3/16/2011	12:16:03 AM	SiCl4 post valve closed
3/16/2011	12:16:03 AM	Bypass valve closed
3/16/2011	12:16:03 AM	Main Vac valve closed
3/16/2011	12:16:03 AM	Bubbler valve closed
3/16/2011	12:16:03 AM	Helium MFC set to  0.000000
3/16/2011	12:16:03 AM	H2 MFC set to  0.000000
3/16/2011	12:16:03 AM	BCl3 MFC set to  0.000000
3/16/2011	12:16:03 AM	PHl3 MFC set to  0.000000
3/16/2011	12:16:03 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:16:03 AM	Tube furnace set to 0
3/16/2011	12:16:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/16/2011	12:16:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/16/2011	12:16:20 AM	Recipe started at 12:16 AM
3/16/2011	12:16:20 AM	Helium valve closed
3/16/2011	12:16:20 AM	H2 valve closed
3/16/2011	12:16:20 AM	BCl3 valve closed
3/16/2011	12:16:20 AM	PH3 valve closed
3/16/2011	12:16:20 AM	SiCl4 pre valve closed
3/16/2011	12:16:20 AM	SiCl4 post valve closed
3/16/2011	12:16:20 AM	Main Vac valve closed
3/16/2011	12:16:20 AM	Bubbler valve closed
3/16/2011	12:16:20 AM	Bypass valve opened
3/16/2011	12:16:20 AM	Helium MFC set to  0.000000
3/16/2011	12:16:20 AM	H2 MFC set to  0.000000
3/16/2011	12:16:20 AM	BCl3 MFC set to  0.000000
3/16/2011	12:16:20 AM	PHl3 MFC set to  0.000000
3/16/2011	12:16:20 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:16:20 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:16:20 AM	Tube furnace set to 0
3/16/2011	12:16:20 AM	Helium valve closed
3/16/2011	12:16:20 AM	H2 valve closed
3/16/2011	12:16:20 AM	BCl3 valve closed
3/16/2011	12:16:20 AM	PH3 valve closed
3/16/2011	12:16:20 AM	SiCl4 pre valve closed
3/16/2011	12:16:20 AM	SiCl4 post valve closed
3/16/2011	12:16:20 AM	Bubbler valve closed
3/16/2011	12:16:20 AM	Main Vac valve opened
3/16/2011	12:16:20 AM	Bypass valve opened
3/16/2011	12:16:20 AM	Helium MFC set to  0.000000
3/16/2011	12:16:20 AM	H2 MFC set to  0.000000
3/16/2011	12:16:20 AM	BCl3 MFC set to  0.000000
3/16/2011	12:16:20 AM	PHl3 MFC set to  0.000000
3/16/2011	12:16:20 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:16:20 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:16:20 AM	Tube furnace set to 0
3/16/2011	12:17:20 AM	H2 valve closed
3/16/2011	12:17:20 AM	BCl3 valve closed
3/16/2011	12:17:20 AM	PH3 valve closed
3/16/2011	12:17:20 AM	SiCl4 pre valve closed
3/16/2011	12:17:20 AM	SiCl4 post valve closed
3/16/2011	12:17:20 AM	Bubbler valve closed
3/16/2011	12:17:20 AM	Helium valve opened
3/16/2011	12:17:20 AM	Main Vac valve opened
3/16/2011	12:17:20 AM	Bypass valve opened
3/16/2011	12:17:21 AM	Helium MFC set to  100.000000
3/16/2011	12:17:21 AM	H2 MFC set to  0.000000
3/16/2011	12:17:21 AM	BCl3 MFC set to  0.000000
3/16/2011	12:17:21 AM	PHl3 MFC set to  0.000000
3/16/2011	12:17:21 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:17:21 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:17:21 AM	Tube furnace set to 0
3/16/2011	12:18:21 AM	Helium valve closed
3/16/2011	12:18:21 AM	H2 valve closed
3/16/2011	12:18:21 AM	BCl3 valve closed
3/16/2011	12:18:21 AM	PH3 valve closed
3/16/2011	12:18:21 AM	SiCl4 pre valve closed
3/16/2011	12:18:21 AM	SiCl4 post valve closed
3/16/2011	12:18:21 AM	Bubbler valve closed
3/16/2011	12:18:21 AM	Main Vac valve opened
3/16/2011	12:18:21 AM	Bypass valve opened
3/16/2011	12:18:21 AM	Helium MFC set to  0.000000
3/16/2011	12:18:21 AM	H2 MFC set to  0.000000
3/16/2011	12:18:21 AM	BCl3 MFC set to  0.000000
3/16/2011	12:18:21 AM	PHl3 MFC set to  0.000000
3/16/2011	12:18:21 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:18:21 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:18:21 AM	Tube furnace set to 0
3/16/2011	12:19:21 AM	H2 valve closed
3/16/2011	12:19:21 AM	BCl3 valve closed
3/16/2011	12:19:21 AM	PH3 valve closed
3/16/2011	12:19:21 AM	SiCl4 pre valve closed
3/16/2011	12:19:21 AM	SiCl4 post valve closed
3/16/2011	12:19:21 AM	Bubbler valve closed
3/16/2011	12:19:21 AM	Helium valve opened
3/16/2011	12:19:21 AM	Main Vac valve opened
3/16/2011	12:19:21 AM	Bypass valve opened
3/16/2011	12:19:21 AM	Helium MFC set to  100.000000
3/16/2011	12:19:21 AM	H2 MFC set to  0.000000
3/16/2011	12:19:21 AM	BCl3 MFC set to  0.000000
3/16/2011	12:19:21 AM	PHl3 MFC set to  0.000000
3/16/2011	12:19:21 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:19:21 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:19:21 AM	Tube furnace set to 0
3/16/2011	12:20:21 AM	Helium valve closed
3/16/2011	12:20:21 AM	H2 valve closed
3/16/2011	12:20:21 AM	BCl3 valve closed
3/16/2011	12:20:21 AM	PH3 valve closed
3/16/2011	12:20:21 AM	SiCl4 pre valve closed
3/16/2011	12:20:21 AM	SiCl4 post valve closed
3/16/2011	12:20:21 AM	Bubbler valve closed
3/16/2011	12:20:21 AM	Main Vac valve opened
3/16/2011	12:20:21 AM	Bypass valve opened
3/16/2011	12:20:21 AM	Helium MFC set to  0.000000
3/16/2011	12:20:21 AM	H2 MFC set to  0.000000
3/16/2011	12:20:21 AM	BCl3 MFC set to  0.000000
3/16/2011	12:20:21 AM	PHl3 MFC set to  0.000000
3/16/2011	12:20:21 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:20:21 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:20:21 AM	Tube furnace set to 0
3/16/2011	12:21:21 AM	H2 valve closed
3/16/2011	12:21:21 AM	BCl3 valve closed
3/16/2011	12:21:21 AM	PH3 valve closed
3/16/2011	12:21:21 AM	SiCl4 pre valve closed
3/16/2011	12:21:21 AM	SiCl4 post valve closed
3/16/2011	12:21:21 AM	Bubbler valve closed
3/16/2011	12:21:21 AM	Helium valve opened
3/16/2011	12:21:21 AM	Main Vac valve opened
3/16/2011	12:21:21 AM	Bypass valve opened
3/16/2011	12:21:21 AM	Helium MFC set to  100.000000
3/16/2011	12:21:21 AM	H2 MFC set to  0.000000
3/16/2011	12:21:21 AM	BCl3 MFC set to  0.000000
3/16/2011	12:21:21 AM	PHl3 MFC set to  0.000000
3/16/2011	12:21:21 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:21:21 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:21:21 AM	Tube furnace set to 0
3/16/2011	12:22:21 AM	Helium valve closed
3/16/2011	12:22:21 AM	H2 valve closed
3/16/2011	12:22:21 AM	BCl3 valve closed
3/16/2011	12:22:21 AM	PH3 valve closed
3/16/2011	12:22:21 AM	SiCl4 pre valve closed
3/16/2011	12:22:21 AM	SiCl4 post valve closed
3/16/2011	12:22:21 AM	Bubbler valve closed
3/16/2011	12:22:21 AM	Main Vac valve opened
3/16/2011	12:22:21 AM	Bypass valve opened
3/16/2011	12:22:22 AM	Helium MFC set to  0.000000
3/16/2011	12:22:22 AM	H2 MFC set to  0.000000
3/16/2011	12:22:22 AM	BCl3 MFC set to  0.000000
3/16/2011	12:22:22 AM	PHl3 MFC set to  0.000000
3/16/2011	12:22:22 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:22:22 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:22:22 AM	Tube furnace set to 0
3/16/2011	12:23:22 AM	H2 valve closed
3/16/2011	12:23:22 AM	BCl3 valve closed
3/16/2011	12:23:22 AM	PH3 valve closed
3/16/2011	12:23:22 AM	SiCl4 pre valve closed
3/16/2011	12:23:22 AM	SiCl4 post valve closed
3/16/2011	12:23:22 AM	Bubbler valve closed
3/16/2011	12:23:22 AM	Helium valve opened
3/16/2011	12:23:22 AM	Main Vac valve opened
3/16/2011	12:23:22 AM	Bypass valve opened
3/16/2011	12:23:22 AM	Helium MFC set to  100.000000
3/16/2011	12:23:22 AM	H2 MFC set to  0.000000
3/16/2011	12:23:22 AM	BCl3 MFC set to  0.000000
3/16/2011	12:23:22 AM	PHl3 MFC set to  0.000000
3/16/2011	12:23:22 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:23:22 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:23:22 AM	Tube furnace set to 0
3/16/2011	12:24:22 AM	Helium valve closed
3/16/2011	12:24:22 AM	H2 valve closed
3/16/2011	12:24:22 AM	BCl3 valve closed
3/16/2011	12:24:22 AM	PH3 valve closed
3/16/2011	12:24:22 AM	SiCl4 pre valve closed
3/16/2011	12:24:22 AM	SiCl4 post valve closed
3/16/2011	12:24:22 AM	Bubbler valve closed
3/16/2011	12:24:22 AM	Main Vac valve opened
3/16/2011	12:24:22 AM	Bypass valve opened
3/16/2011	12:24:22 AM	Helium MFC set to  0.000000
3/16/2011	12:24:22 AM	H2 MFC set to  0.000000
3/16/2011	12:24:22 AM	BCl3 MFC set to  0.000000
3/16/2011	12:24:22 AM	PHl3 MFC set to  0.000000
3/16/2011	12:24:22 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:24:22 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:24:22 AM	Tube furnace set to 0
3/16/2011	12:24:26 AM	Run aborted at 12:24 AM
3/16/2011	12:24:26 AM	Helium valve closed
3/16/2011	12:24:26 AM	H2 valve closed
3/16/2011	12:24:26 AM	BCl3 valve closed
3/16/2011	12:24:26 AM	PH3 valve closed
3/16/2011	12:24:26 AM	SiCl4 pre valve closed
3/16/2011	12:24:26 AM	SiCl4 post valve closed
3/16/2011	12:24:26 AM	Bypass valve closed
3/16/2011	12:24:26 AM	Main Vac valve closed
3/16/2011	12:24:26 AM	Bubbler valve closed
3/16/2011	12:24:26 AM	Helium MFC set to  0.000000
3/16/2011	12:24:26 AM	H2 MFC set to  0.000000
3/16/2011	12:24:26 AM	BCl3 MFC set to  0.000000
3/16/2011	12:24:26 AM	PHl3 MFC set to  0.000000
3/16/2011	12:24:26 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:24:26 AM	Tube furnace set to 0
3/16/2011	12:24:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/16/2011	12:24:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2011	12:24:27 AM	Recipe started at 12:24 AM
3/16/2011	12:24:27 AM	Helium valve closed
3/16/2011	12:24:27 AM	H2 valve closed
3/16/2011	12:24:27 AM	BCl3 valve closed
3/16/2011	12:24:27 AM	PH3 valve closed
3/16/2011	12:24:27 AM	SiCl4 pre valve closed
3/16/2011	12:24:27 AM	SiCl4 post valve closed
3/16/2011	12:24:27 AM	Main Vac valve closed
3/16/2011	12:24:27 AM	Bubbler valve closed
3/16/2011	12:24:27 AM	Bypass valve opened
3/16/2011	12:24:27 AM	Helium MFC set to  0.000000
3/16/2011	12:24:27 AM	H2 MFC set to  0.000000
3/16/2011	12:24:27 AM	BCl3 MFC set to  0.000000
3/16/2011	12:24:27 AM	PHl3 MFC set to  0.000000
3/16/2011	12:24:27 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:24:27 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:24:27 AM	Tube furnace set to 0
3/16/2011	12:24:27 AM	Helium valve closed
3/16/2011	12:24:27 AM	H2 valve closed
3/16/2011	12:24:27 AM	BCl3 valve closed
3/16/2011	12:24:27 AM	PH3 valve closed
3/16/2011	12:24:27 AM	SiCl4 pre valve closed
3/16/2011	12:24:27 AM	SiCl4 post valve closed
3/16/2011	12:24:27 AM	Bubbler valve closed
3/16/2011	12:24:27 AM	Main Vac valve opened
3/16/2011	12:24:27 AM	Bypass valve opened
3/16/2011	12:24:27 AM	Helium MFC set to  0.000000
3/16/2011	12:24:27 AM	H2 MFC set to  0.000000
3/16/2011	12:24:27 AM	BCl3 MFC set to  0.000000
3/16/2011	12:24:27 AM	PHl3 MFC set to  0.000000
3/16/2011	12:24:27 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:24:27 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:24:27 AM	Tube furnace set to 0
3/16/2011	12:24:28 AM	Run finished at 12:24 AM
3/16/2011	12:24:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2011	12:25:12 AM	Recipe started at 12:25 AM
3/16/2011	12:25:12 AM	Helium valve closed
3/16/2011	12:25:12 AM	BCl3 valve closed
3/16/2011	12:25:12 AM	PH3 valve closed
3/16/2011	12:25:12 AM	SiCl4 pre valve closed
3/16/2011	12:25:12 AM	SiCl4 post valve closed
3/16/2011	12:25:12 AM	Main Vac valve closed
3/16/2011	12:25:12 AM	Bypass valve closed
3/16/2011	12:25:12 AM	Bubbler valve closed
3/16/2011	12:25:12 AM	H2 valve opened
3/16/2011	12:25:12 AM	Helium MFC set to  0.000000
3/16/2011	12:25:12 AM	H2 MFC set to  500.000000
3/16/2011	12:25:12 AM	BCl3 MFC set to  0.000000
3/16/2011	12:25:12 AM	PHl3 MFC set to  0.000000
3/16/2011	12:25:12 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:25:12 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:25:12 AM	Tube furnace set to 0
3/16/2011	12:26:30 AM	Helium valve closed
3/16/2011	12:26:30 AM	BCl3 valve closed
3/16/2011	12:26:30 AM	PH3 valve closed
3/16/2011	12:26:30 AM	SiCl4 pre valve closed
3/16/2011	12:26:30 AM	SiCl4 post valve closed
3/16/2011	12:26:30 AM	Main Vac valve closed
3/16/2011	12:26:30 AM	Bypass valve closed
3/16/2011	12:26:30 AM	H2 valve opened
3/16/2011	12:26:30 AM	Bubbler valve opened
3/16/2011	12:26:30 AM	Helium MFC set to  0.000000
3/16/2011	12:26:30 AM	H2 MFC set to  500.000000
3/16/2011	12:26:30 AM	BCl3 MFC set to  0.000000
3/16/2011	12:26:30 AM	PHl3 MFC set to  0.000000
3/16/2011	12:26:30 AM	SiCl4 MFC set to  0.000000
3/16/2011	12:26:30 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:26:31 AM	Tube furnace set to 1000
3/16/2011	12:46:31 AM	Helium valve closed
3/16/2011	12:46:31 AM	PH3 valve closed
3/16/2011	12:46:31 AM	Main Vac valve closed
3/16/2011	12:46:31 AM	Bypass valve closed
3/16/2011	12:46:31 AM	H2 valve opened
3/16/2011	12:46:31 AM	BCl3 valve opened
3/16/2011	12:46:31 AM	SiCl4 pre valve opened
3/16/2011	12:46:31 AM	SiCl4 post valve opened
3/16/2011	12:46:31 AM	Bubbler valve opened
3/16/2011	12:46:31 AM	Helium MFC set to  0.000000
3/16/2011	12:46:31 AM	H2 MFC set to  500.000000
3/16/2011	12:46:31 AM	BCl3 MFC set to  3.000000
3/16/2011	12:46:31 AM	PHl3 MFC set to  0.000000
3/16/2011	12:46:31 AM	SiCl4 MFC set to  50.000000
3/16/2011	12:46:31 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:46:31 AM	Tube furnace set to 1000
3/16/2011	1:06:31 AM	H2 valve closed
3/16/2011	1:06:31 AM	BCl3 valve closed
3/16/2011	1:06:31 AM	PH3 valve closed
3/16/2011	1:06:31 AM	SiCl4 pre valve closed
3/16/2011	1:06:31 AM	SiCl4 post valve closed
3/16/2011	1:06:31 AM	Main Vac valve closed
3/16/2011	1:06:31 AM	Bypass valve closed
3/16/2011	1:06:31 AM	Helium valve opened
3/16/2011	1:06:31 AM	Bubbler valve opened
3/16/2011	1:06:31 AM	Helium MFC set to  500.000000
3/16/2011	1:06:31 AM	H2 MFC set to  0.000000
3/16/2011	1:06:31 AM	BCl3 MFC set to  0.000000
3/16/2011	1:06:31 AM	PHl3 MFC set to  0.000000
3/16/2011	1:06:31 AM	SiCl4 MFC set to  0.000000
3/16/2011	1:06:31 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	1:06:31 AM	Tube furnace set to 0
3/16/2011	1:26:31 AM	Helium valve closed
3/16/2011	1:26:31 AM	H2 valve closed
3/16/2011	1:26:31 AM	BCl3 valve closed
3/16/2011	1:26:31 AM	PH3 valve closed
3/16/2011	1:26:31 AM	SiCl4 pre valve closed
3/16/2011	1:26:31 AM	SiCl4 post valve closed
3/16/2011	1:26:31 AM	Main Vac valve closed
3/16/2011	1:26:31 AM	Bypass valve closed
3/16/2011	1:26:31 AM	Bubbler valve closed
3/16/2011	1:26:31 AM	Helium MFC set to  0.000000
3/16/2011	1:26:31 AM	H2 MFC set to  0.000000
3/16/2011	1:26:31 AM	BCl3 MFC set to  0.000000
3/16/2011	1:26:31 AM	PHl3 MFC set to  0.000000
3/16/2011	1:26:31 AM	SiCl4 MFC set to  0.000000
3/16/2011	1:26:31 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	1:26:31 AM	Tube furnace set to 0
3/16/2011	1:26:31 AM	Run finished at 1:26 AM
3/16/2011	1:51:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2011	1:51:32 AM	Recipe started at 1:51 AM
3/16/2011	1:51:32 AM	H2 valve closed
3/16/2011	1:51:32 AM	BCl3 valve closed
3/16/2011	1:51:32 AM	PH3 valve closed
3/16/2011	1:51:32 AM	SiCl4 pre valve closed
3/16/2011	1:51:32 AM	SiCl4 post valve closed
3/16/2011	1:51:32 AM	Main Vac valve closed
3/16/2011	1:51:32 AM	Bypass valve closed
3/16/2011	1:51:32 AM	Bubbler valve closed
3/16/2011	1:51:32 AM	Helium valve opened
3/16/2011	1:51:32 AM	Helium MFC set to  500.000000
3/16/2011	1:51:32 AM	H2 MFC set to  0.000000
3/16/2011	1:51:32 AM	BCl3 MFC set to  0.000000
3/16/2011	1:51:32 AM	PHl3 MFC set to  0.000000
3/16/2011	1:51:32 AM	SiCl4 MFC set to  0.000000
3/16/2011	1:51:32 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	1:51:32 AM	Tube furnace set to 0
3/16/2011	1:51:39 AM	Helium valve closed
3/16/2011	1:51:39 AM	H2 valve closed
3/16/2011	1:51:39 AM	BCl3 valve closed
3/16/2011	1:51:39 AM	PH3 valve closed
3/16/2011	1:51:39 AM	SiCl4 pre valve closed
3/16/2011	1:51:39 AM	SiCl4 post valve closed
3/16/2011	1:51:39 AM	Main Vac valve closed
3/16/2011	1:51:39 AM	Bypass valve closed
3/16/2011	1:51:39 AM	Bubbler valve closed
3/16/2011	1:51:39 AM	Helium MFC set to  0.000000
3/16/2011	1:51:39 AM	H2 MFC set to  0.000000
3/16/2011	1:51:39 AM	BCl3 MFC set to  0.000000
3/16/2011	1:51:39 AM	PHl3 MFC set to  0.000000
3/16/2011	1:51:39 AM	SiCl4 MFC set to  0.000000
3/16/2011	1:51:39 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	1:51:39 AM	Tube furnace set to 0
3/16/2011	1:51:39 AM	Run finished at 1:51 AM
3/16/2011	1:51:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2011	1:55:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2011	1:55:41 AM	Recipe started at 1:55 AM
3/16/2011	1:55:41 AM	Helium valve closed
3/16/2011	1:55:41 AM	H2 valve closed
3/16/2011	1:55:41 AM	BCl3 valve closed
3/16/2011	1:55:41 AM	PH3 valve closed
3/16/2011	1:55:41 AM	SiCl4 pre valve closed
3/16/2011	1:55:41 AM	SiCl4 post valve closed
3/16/2011	1:55:41 AM	Main Vac valve closed
3/16/2011	1:55:41 AM	Bubbler valve closed
3/16/2011	1:55:41 AM	Bypass valve opened
3/16/2011	1:55:41 AM	Helium MFC set to  0.000000
3/16/2011	1:55:41 AM	H2 MFC set to  0.000000
3/16/2011	1:55:41 AM	BCl3 MFC set to  0.000000
3/16/2011	1:55:41 AM	PHl3 MFC set to  0.000000
3/16/2011	1:55:41 AM	SiCl4 MFC set to  0.000000
3/16/2011	1:55:41 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	1:55:41 AM	Tube furnace set to 0
3/16/2011	1:56:13 AM	Helium valve closed
3/16/2011	1:56:13 AM	H2 valve closed
3/16/2011	1:56:13 AM	BCl3 valve closed
3/16/2011	1:56:13 AM	PH3 valve closed
3/16/2011	1:56:13 AM	SiCl4 pre valve closed
3/16/2011	1:56:13 AM	SiCl4 post valve closed
3/16/2011	1:56:13 AM	Bubbler valve closed
3/16/2011	1:56:13 AM	Main Vac valve opened
3/16/2011	1:56:13 AM	Bypass valve opened
3/16/2011	1:56:13 AM	Helium MFC set to  0.000000
3/16/2011	1:56:13 AM	H2 MFC set to  0.000000
3/16/2011	1:56:13 AM	BCl3 MFC set to  0.000000
3/16/2011	1:56:13 AM	PHl3 MFC set to  0.000000
3/16/2011	1:56:13 AM	SiCl4 MFC set to  0.000000
3/16/2011	1:56:13 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	1:56:14 AM	Tube furnace set to 0
3/16/2011	1:56:14 AM	Run finished at 1:56 AM
3/16/2011	1:56:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2011	1:58:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/16/2011	1:58:32 AM	Recipe started at 1:58 AM
3/16/2011	1:58:32 AM	Helium valve closed
3/16/2011	1:58:32 AM	H2 valve closed
3/16/2011	1:58:32 AM	BCl3 valve closed
3/16/2011	1:58:32 AM	PH3 valve closed
3/16/2011	1:58:32 AM	SiCl4 pre valve closed
3/16/2011	1:58:32 AM	SiCl4 post valve closed
3/16/2011	1:58:32 AM	Main Vac valve closed
3/16/2011	1:58:32 AM	Bubbler valve closed
3/16/2011	1:58:32 AM	Bypass valve opened
3/16/2011	1:58:32 AM	Helium MFC set to  0.000000
3/16/2011	1:58:32 AM	H2 MFC set to  0.000000
3/16/2011	1:58:32 AM	BCl3 MFC set to  0.000000
3/16/2011	1:58:32 AM	PHl3 MFC set to  0.000000
3/16/2011	1:58:32 AM	SiCl4 MFC set to  0.000000
3/16/2011	1:58:32 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	1:58:32 AM	Tube furnace set to 0
3/16/2011	1:58:33 AM	Helium valve closed
3/16/2011	1:58:33 AM	H2 valve closed
3/16/2011	1:58:33 AM	BCl3 valve closed
3/16/2011	1:58:33 AM	PH3 valve closed
3/16/2011	1:58:33 AM	SiCl4 pre valve closed
3/16/2011	1:58:33 AM	SiCl4 post valve closed
3/16/2011	1:58:33 AM	Bubbler valve closed
3/16/2011	1:58:33 AM	Main Vac valve opened
3/16/2011	1:58:33 AM	Bypass valve opened
3/16/2011	1:58:33 AM	Helium MFC set to  0.000000
3/16/2011	1:58:33 AM	H2 MFC set to  0.000000
3/16/2011	1:58:33 AM	BCl3 MFC set to  0.000000
3/16/2011	1:58:33 AM	PHl3 MFC set to  0.000000
3/16/2011	1:58:33 AM	SiCl4 MFC set to  0.000000
3/16/2011	1:58:33 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	1:58:33 AM	Tube furnace set to 0
3/16/2011	1:59:33 AM	H2 valve closed
3/16/2011	1:59:33 AM	BCl3 valve closed
3/16/2011	1:59:33 AM	PH3 valve closed
3/16/2011	1:59:33 AM	SiCl4 pre valve closed
3/16/2011	1:59:33 AM	SiCl4 post valve closed
3/16/2011	1:59:33 AM	Bubbler valve closed
3/16/2011	1:59:33 AM	Helium valve opened
3/16/2011	1:59:33 AM	Main Vac valve opened
3/16/2011	1:59:33 AM	Bypass valve opened
3/16/2011	1:59:33 AM	Helium MFC set to  100.000000
3/16/2011	1:59:33 AM	H2 MFC set to  0.000000
3/16/2011	1:59:33 AM	BCl3 MFC set to  0.000000
3/16/2011	1:59:33 AM	PHl3 MFC set to  0.000000
3/16/2011	1:59:33 AM	SiCl4 MFC set to  0.000000
3/16/2011	1:59:33 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	1:59:33 AM	Tube furnace set to 0
3/16/2011	2:00:33 AM	Helium valve closed
3/16/2011	2:00:33 AM	H2 valve closed
3/16/2011	2:00:33 AM	BCl3 valve closed
3/16/2011	2:00:33 AM	PH3 valve closed
3/16/2011	2:00:33 AM	SiCl4 pre valve closed
3/16/2011	2:00:33 AM	SiCl4 post valve closed
3/16/2011	2:00:33 AM	Bubbler valve closed
3/16/2011	2:00:33 AM	Main Vac valve opened
3/16/2011	2:00:33 AM	Bypass valve opened
3/16/2011	2:00:33 AM	Helium MFC set to  0.000000
3/16/2011	2:00:33 AM	H2 MFC set to  0.000000
3/16/2011	2:00:33 AM	BCl3 MFC set to  0.000000
3/16/2011	2:00:33 AM	PHl3 MFC set to  0.000000
3/16/2011	2:00:33 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:00:33 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:00:33 AM	Tube furnace set to 0
3/16/2011	2:01:33 AM	H2 valve closed
3/16/2011	2:01:33 AM	BCl3 valve closed
3/16/2011	2:01:33 AM	PH3 valve closed
3/16/2011	2:01:33 AM	SiCl4 pre valve closed
3/16/2011	2:01:33 AM	SiCl4 post valve closed
3/16/2011	2:01:33 AM	Bubbler valve closed
3/16/2011	2:01:33 AM	Helium valve opened
3/16/2011	2:01:33 AM	Main Vac valve opened
3/16/2011	2:01:33 AM	Bypass valve opened
3/16/2011	2:01:33 AM	Helium MFC set to  100.000000
3/16/2011	2:01:33 AM	H2 MFC set to  0.000000
3/16/2011	2:01:33 AM	BCl3 MFC set to  0.000000
3/16/2011	2:01:33 AM	PHl3 MFC set to  0.000000
3/16/2011	2:01:33 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:01:33 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:01:33 AM	Tube furnace set to 0
3/16/2011	2:02:33 AM	Helium valve closed
3/16/2011	2:02:33 AM	H2 valve closed
3/16/2011	2:02:33 AM	BCl3 valve closed
3/16/2011	2:02:33 AM	PH3 valve closed
3/16/2011	2:02:33 AM	SiCl4 pre valve closed
3/16/2011	2:02:33 AM	SiCl4 post valve closed
3/16/2011	2:02:33 AM	Bubbler valve closed
3/16/2011	2:02:33 AM	Main Vac valve opened
3/16/2011	2:02:33 AM	Bypass valve opened
3/16/2011	2:02:33 AM	Helium MFC set to  0.000000
3/16/2011	2:02:33 AM	H2 MFC set to  0.000000
3/16/2011	2:02:33 AM	BCl3 MFC set to  0.000000
3/16/2011	2:02:33 AM	PHl3 MFC set to  0.000000
3/16/2011	2:02:33 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:02:33 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:02:34 AM	Tube furnace set to 0
3/16/2011	2:03:34 AM	H2 valve closed
3/16/2011	2:03:34 AM	BCl3 valve closed
3/16/2011	2:03:34 AM	PH3 valve closed
3/16/2011	2:03:34 AM	SiCl4 pre valve closed
3/16/2011	2:03:34 AM	SiCl4 post valve closed
3/16/2011	2:03:34 AM	Bubbler valve closed
3/16/2011	2:03:34 AM	Helium valve opened
3/16/2011	2:03:34 AM	Main Vac valve opened
3/16/2011	2:03:34 AM	Bypass valve opened
3/16/2011	2:03:34 AM	Helium MFC set to  100.000000
3/16/2011	2:03:34 AM	H2 MFC set to  0.000000
3/16/2011	2:03:34 AM	BCl3 MFC set to  0.000000
3/16/2011	2:03:34 AM	PHl3 MFC set to  0.000000
3/16/2011	2:03:34 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:03:34 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:03:34 AM	Tube furnace set to 0
3/16/2011	2:04:34 AM	Helium valve closed
3/16/2011	2:04:34 AM	H2 valve closed
3/16/2011	2:04:34 AM	BCl3 valve closed
3/16/2011	2:04:34 AM	PH3 valve closed
3/16/2011	2:04:34 AM	SiCl4 pre valve closed
3/16/2011	2:04:34 AM	SiCl4 post valve closed
3/16/2011	2:04:34 AM	Bubbler valve closed
3/16/2011	2:04:34 AM	Main Vac valve opened
3/16/2011	2:04:34 AM	Bypass valve opened
3/16/2011	2:04:34 AM	Helium MFC set to  0.000000
3/16/2011	2:04:34 AM	H2 MFC set to  0.000000
3/16/2011	2:04:34 AM	BCl3 MFC set to  0.000000
3/16/2011	2:04:34 AM	PHl3 MFC set to  0.000000
3/16/2011	2:04:34 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:04:34 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:04:34 AM	Tube furnace set to 0
3/16/2011	2:05:34 AM	H2 valve closed
3/16/2011	2:05:34 AM	BCl3 valve closed
3/16/2011	2:05:34 AM	PH3 valve closed
3/16/2011	2:05:34 AM	SiCl4 pre valve closed
3/16/2011	2:05:34 AM	SiCl4 post valve closed
3/16/2011	2:05:34 AM	Bubbler valve closed
3/16/2011	2:05:34 AM	Helium valve opened
3/16/2011	2:05:34 AM	Main Vac valve opened
3/16/2011	2:05:34 AM	Bypass valve opened
3/16/2011	2:05:34 AM	Helium MFC set to  100.000000
3/16/2011	2:05:34 AM	H2 MFC set to  0.000000
3/16/2011	2:05:34 AM	BCl3 MFC set to  0.000000
3/16/2011	2:05:34 AM	PHl3 MFC set to  0.000000
3/16/2011	2:05:34 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:05:34 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:05:34 AM	Tube furnace set to 0
3/16/2011	2:06:34 AM	Helium valve closed
3/16/2011	2:06:34 AM	H2 valve closed
3/16/2011	2:06:34 AM	BCl3 valve closed
3/16/2011	2:06:34 AM	PH3 valve closed
3/16/2011	2:06:34 AM	SiCl4 pre valve closed
3/16/2011	2:06:34 AM	SiCl4 post valve closed
3/16/2011	2:06:34 AM	Bubbler valve closed
3/16/2011	2:06:34 AM	Main Vac valve opened
3/16/2011	2:06:34 AM	Bypass valve opened
3/16/2011	2:06:34 AM	Helium MFC set to  0.000000
3/16/2011	2:06:34 AM	H2 MFC set to  0.000000
3/16/2011	2:06:34 AM	BCl3 MFC set to  0.000000
3/16/2011	2:06:34 AM	PHl3 MFC set to  0.000000
3/16/2011	2:06:34 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:06:34 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:06:34 AM	Tube furnace set to 0
3/16/2011	2:07:34 AM	H2 valve closed
3/16/2011	2:07:34 AM	BCl3 valve closed
3/16/2011	2:07:34 AM	PH3 valve closed
3/16/2011	2:07:34 AM	SiCl4 pre valve closed
3/16/2011	2:07:34 AM	SiCl4 post valve closed
3/16/2011	2:07:34 AM	Bubbler valve closed
3/16/2011	2:07:34 AM	Helium valve opened
3/16/2011	2:07:34 AM	Main Vac valve opened
3/16/2011	2:07:34 AM	Bypass valve opened
3/16/2011	2:07:34 AM	Helium MFC set to  100.000000
3/16/2011	2:07:34 AM	H2 MFC set to  0.000000
3/16/2011	2:07:34 AM	BCl3 MFC set to  0.000000
3/16/2011	2:07:34 AM	PHl3 MFC set to  0.000000
3/16/2011	2:07:34 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:07:34 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:07:35 AM	Tube furnace set to 0
3/16/2011	2:08:35 AM	Helium valve closed
3/16/2011	2:08:35 AM	H2 valve closed
3/16/2011	2:08:35 AM	BCl3 valve closed
3/16/2011	2:08:35 AM	PH3 valve closed
3/16/2011	2:08:35 AM	SiCl4 pre valve closed
3/16/2011	2:08:35 AM	SiCl4 post valve closed
3/16/2011	2:08:35 AM	Bubbler valve closed
3/16/2011	2:08:35 AM	Main Vac valve opened
3/16/2011	2:08:35 AM	Bypass valve opened
3/16/2011	2:08:35 AM	Helium MFC set to  0.000000
3/16/2011	2:08:35 AM	H2 MFC set to  0.000000
3/16/2011	2:08:35 AM	BCl3 MFC set to  0.000000
3/16/2011	2:08:35 AM	PHl3 MFC set to  0.000000
3/16/2011	2:08:35 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:08:35 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:08:35 AM	Tube furnace set to 0
3/16/2011	2:09:35 AM	H2 valve closed
3/16/2011	2:09:35 AM	BCl3 valve closed
3/16/2011	2:09:35 AM	PH3 valve closed
3/16/2011	2:09:35 AM	SiCl4 pre valve closed
3/16/2011	2:09:35 AM	SiCl4 post valve closed
3/16/2011	2:09:35 AM	Bubbler valve closed
3/16/2011	2:09:35 AM	Helium valve opened
3/16/2011	2:09:35 AM	Main Vac valve opened
3/16/2011	2:09:35 AM	Bypass valve opened
3/16/2011	2:09:35 AM	Helium MFC set to  100.000000
3/16/2011	2:09:35 AM	H2 MFC set to  0.000000
3/16/2011	2:09:35 AM	BCl3 MFC set to  0.000000
3/16/2011	2:09:35 AM	PHl3 MFC set to  0.000000
3/16/2011	2:09:35 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:09:35 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:09:35 AM	Tube furnace set to 0
3/16/2011	2:10:35 AM	Helium valve closed
3/16/2011	2:10:35 AM	H2 valve closed
3/16/2011	2:10:35 AM	BCl3 valve closed
3/16/2011	2:10:35 AM	PH3 valve closed
3/16/2011	2:10:35 AM	SiCl4 pre valve closed
3/16/2011	2:10:35 AM	SiCl4 post valve closed
3/16/2011	2:10:35 AM	Bubbler valve closed
3/16/2011	2:10:35 AM	Main Vac valve opened
3/16/2011	2:10:35 AM	Bypass valve opened
3/16/2011	2:10:35 AM	Helium MFC set to  0.000000
3/16/2011	2:10:35 AM	H2 MFC set to  0.000000
3/16/2011	2:10:35 AM	BCl3 MFC set to  0.000000
3/16/2011	2:10:35 AM	PHl3 MFC set to  0.000000
3/16/2011	2:10:35 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:10:35 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:10:35 AM	Tube furnace set to 0
3/16/2011	2:11:35 AM	H2 valve closed
3/16/2011	2:11:35 AM	BCl3 valve closed
3/16/2011	2:11:35 AM	PH3 valve closed
3/16/2011	2:11:35 AM	SiCl4 pre valve closed
3/16/2011	2:11:35 AM	SiCl4 post valve closed
3/16/2011	2:11:35 AM	Bubbler valve closed
3/16/2011	2:11:35 AM	Helium valve opened
3/16/2011	2:11:35 AM	Main Vac valve opened
3/16/2011	2:11:35 AM	Bypass valve opened
3/16/2011	2:11:35 AM	Helium MFC set to  100.000000
3/16/2011	2:11:35 AM	H2 MFC set to  0.000000
3/16/2011	2:11:35 AM	BCl3 MFC set to  0.000000
3/16/2011	2:11:35 AM	PHl3 MFC set to  0.000000
3/16/2011	2:11:35 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:11:35 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:11:35 AM	Tube furnace set to 0
3/16/2011	2:12:35 AM	Helium valve closed
3/16/2011	2:12:35 AM	H2 valve closed
3/16/2011	2:12:35 AM	BCl3 valve closed
3/16/2011	2:12:35 AM	PH3 valve closed
3/16/2011	2:12:35 AM	SiCl4 pre valve closed
3/16/2011	2:12:35 AM	SiCl4 post valve closed
3/16/2011	2:12:35 AM	Bubbler valve closed
3/16/2011	2:12:35 AM	Main Vac valve opened
3/16/2011	2:12:35 AM	Bypass valve opened
3/16/2011	2:12:35 AM	Helium MFC set to  0.000000
3/16/2011	2:12:35 AM	H2 MFC set to  0.000000
3/16/2011	2:12:35 AM	BCl3 MFC set to  0.000000
3/16/2011	2:12:35 AM	PHl3 MFC set to  0.000000
3/16/2011	2:12:35 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:12:35 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:12:36 AM	Tube furnace set to 0
3/16/2011	2:13:36 AM	H2 valve closed
3/16/2011	2:13:36 AM	BCl3 valve closed
3/16/2011	2:13:36 AM	PH3 valve closed
3/16/2011	2:13:36 AM	SiCl4 pre valve closed
3/16/2011	2:13:36 AM	SiCl4 post valve closed
3/16/2011	2:13:36 AM	Bubbler valve closed
3/16/2011	2:13:36 AM	Helium valve opened
3/16/2011	2:13:36 AM	Main Vac valve opened
3/16/2011	2:13:36 AM	Bypass valve opened
3/16/2011	2:13:36 AM	Helium MFC set to  100.000000
3/16/2011	2:13:36 AM	H2 MFC set to  0.000000
3/16/2011	2:13:36 AM	BCl3 MFC set to  0.000000
3/16/2011	2:13:36 AM	PHl3 MFC set to  0.000000
3/16/2011	2:13:36 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:13:36 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:13:36 AM	Tube furnace set to 0
3/16/2011	2:14:36 AM	Helium valve closed
3/16/2011	2:14:36 AM	H2 valve closed
3/16/2011	2:14:36 AM	BCl3 valve closed
3/16/2011	2:14:36 AM	PH3 valve closed
3/16/2011	2:14:36 AM	SiCl4 pre valve closed
3/16/2011	2:14:36 AM	SiCl4 post valve closed
3/16/2011	2:14:36 AM	Bubbler valve closed
3/16/2011	2:14:36 AM	Main Vac valve opened
3/16/2011	2:14:36 AM	Bypass valve opened
3/16/2011	2:14:36 AM	Helium MFC set to  0.000000
3/16/2011	2:14:36 AM	H2 MFC set to  0.000000
3/16/2011	2:14:36 AM	BCl3 MFC set to  0.000000
3/16/2011	2:14:36 AM	PHl3 MFC set to  0.000000
3/16/2011	2:14:36 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:14:36 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:14:36 AM	Tube furnace set to 0
3/16/2011	2:15:08 AM	Run aborted at 2:15 AM
3/16/2011	2:15:08 AM	Helium valve closed
3/16/2011	2:15:08 AM	H2 valve closed
3/16/2011	2:15:08 AM	BCl3 valve closed
3/16/2011	2:15:08 AM	PH3 valve closed
3/16/2011	2:15:08 AM	SiCl4 pre valve closed
3/16/2011	2:15:08 AM	SiCl4 post valve closed
3/16/2011	2:15:08 AM	Bypass valve closed
3/16/2011	2:15:08 AM	Main Vac valve closed
3/16/2011	2:15:08 AM	Bubbler valve closed
3/16/2011	2:15:08 AM	Helium MFC set to  0.000000
3/16/2011	2:15:08 AM	H2 MFC set to  0.000000
3/16/2011	2:15:08 AM	BCl3 MFC set to  0.000000
3/16/2011	2:15:08 AM	PHl3 MFC set to  0.000000
3/16/2011	2:15:08 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:15:09 AM	Tube furnace set to 0
3/16/2011	2:15:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/16/2011	2:15:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/16/2011	2:15:38 AM	Recipe started at 2:15 AM
3/16/2011	2:15:38 AM	Helium valve closed
3/16/2011	2:15:38 AM	H2 valve closed
3/16/2011	2:15:38 AM	BCl3 valve closed
3/16/2011	2:15:38 AM	PH3 valve closed
3/16/2011	2:15:38 AM	SiCl4 pre valve closed
3/16/2011	2:15:38 AM	SiCl4 post valve closed
3/16/2011	2:15:38 AM	Main Vac valve closed
3/16/2011	2:15:38 AM	Bubbler valve closed
3/16/2011	2:15:38 AM	Bypass valve opened
3/16/2011	2:15:38 AM	Helium MFC set to  0.000000
3/16/2011	2:15:38 AM	H2 MFC set to  0.000000
3/16/2011	2:15:38 AM	BCl3 MFC set to  0.000000
3/16/2011	2:15:39 AM	PHl3 MFC set to  0.000000
3/16/2011	2:15:39 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:15:39 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:15:39 AM	Tube furnace set to 0
3/16/2011	2:15:39 AM	Helium valve closed
3/16/2011	2:15:39 AM	H2 valve closed
3/16/2011	2:15:39 AM	BCl3 valve closed
3/16/2011	2:15:39 AM	PH3 valve closed
3/16/2011	2:15:39 AM	SiCl4 pre valve closed
3/16/2011	2:15:39 AM	SiCl4 post valve closed
3/16/2011	2:15:39 AM	Bubbler valve closed
3/16/2011	2:15:39 AM	Main Vac valve opened
3/16/2011	2:15:39 AM	Bypass valve opened
3/16/2011	2:15:39 AM	Helium MFC set to  0.000000
3/16/2011	2:15:39 AM	H2 MFC set to  0.000000
3/16/2011	2:15:39 AM	BCl3 MFC set to  0.000000
3/16/2011	2:15:39 AM	PHl3 MFC set to  0.000000
3/16/2011	2:15:39 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:15:39 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:15:39 AM	Tube furnace set to 0
3/16/2011	2:16:39 AM	H2 valve closed
3/16/2011	2:16:39 AM	BCl3 valve closed
3/16/2011	2:16:39 AM	PH3 valve closed
3/16/2011	2:16:39 AM	SiCl4 pre valve closed
3/16/2011	2:16:39 AM	SiCl4 post valve closed
3/16/2011	2:16:39 AM	Bubbler valve closed
3/16/2011	2:16:39 AM	Helium valve opened
3/16/2011	2:16:39 AM	Main Vac valve opened
3/16/2011	2:16:39 AM	Bypass valve opened
3/16/2011	2:16:39 AM	Helium MFC set to  100.000000
3/16/2011	2:16:39 AM	H2 MFC set to  0.000000
3/16/2011	2:16:39 AM	BCl3 MFC set to  0.000000
3/16/2011	2:16:39 AM	PHl3 MFC set to  0.000000
3/16/2011	2:16:39 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:16:39 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:16:39 AM	Tube furnace set to 0
3/16/2011	2:17:39 AM	Helium valve closed
3/16/2011	2:17:39 AM	H2 valve closed
3/16/2011	2:17:39 AM	BCl3 valve closed
3/16/2011	2:17:39 AM	PH3 valve closed
3/16/2011	2:17:39 AM	SiCl4 pre valve closed
3/16/2011	2:17:39 AM	SiCl4 post valve closed
3/16/2011	2:17:39 AM	Bubbler valve closed
3/16/2011	2:17:39 AM	Main Vac valve opened
3/16/2011	2:17:39 AM	Bypass valve opened
3/16/2011	2:17:39 AM	Helium MFC set to  0.000000
3/16/2011	2:17:39 AM	H2 MFC set to  0.000000
3/16/2011	2:17:39 AM	BCl3 MFC set to  0.000000
3/16/2011	2:17:39 AM	PHl3 MFC set to  0.000000
3/16/2011	2:17:39 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:17:39 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:17:39 AM	Tube furnace set to 0
3/16/2011	2:18:40 AM	H2 valve closed
3/16/2011	2:18:40 AM	BCl3 valve closed
3/16/2011	2:18:40 AM	PH3 valve closed
3/16/2011	2:18:40 AM	SiCl4 pre valve closed
3/16/2011	2:18:40 AM	SiCl4 post valve closed
3/16/2011	2:18:40 AM	Bubbler valve closed
3/16/2011	2:18:40 AM	Helium valve opened
3/16/2011	2:18:40 AM	Main Vac valve opened
3/16/2011	2:18:40 AM	Bypass valve opened
3/16/2011	2:18:40 AM	Helium MFC set to  100.000000
3/16/2011	2:18:40 AM	H2 MFC set to  0.000000
3/16/2011	2:18:40 AM	BCl3 MFC set to  0.000000
3/16/2011	2:18:40 AM	PHl3 MFC set to  0.000000
3/16/2011	2:18:40 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:18:40 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:18:40 AM	Tube furnace set to 0
3/16/2011	2:19:40 AM	Helium valve closed
3/16/2011	2:19:40 AM	H2 valve closed
3/16/2011	2:19:40 AM	BCl3 valve closed
3/16/2011	2:19:40 AM	PH3 valve closed
3/16/2011	2:19:40 AM	SiCl4 pre valve closed
3/16/2011	2:19:40 AM	SiCl4 post valve closed
3/16/2011	2:19:40 AM	Bubbler valve closed
3/16/2011	2:19:40 AM	Main Vac valve opened
3/16/2011	2:19:40 AM	Bypass valve opened
3/16/2011	2:19:40 AM	Helium MFC set to  0.000000
3/16/2011	2:19:40 AM	H2 MFC set to  0.000000
3/16/2011	2:19:40 AM	BCl3 MFC set to  0.000000
3/16/2011	2:19:40 AM	PHl3 MFC set to  0.000000
3/16/2011	2:19:40 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:19:40 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:19:40 AM	Tube furnace set to 0
3/16/2011	2:20:40 AM	H2 valve closed
3/16/2011	2:20:40 AM	BCl3 valve closed
3/16/2011	2:20:40 AM	PH3 valve closed
3/16/2011	2:20:40 AM	SiCl4 pre valve closed
3/16/2011	2:20:40 AM	SiCl4 post valve closed
3/16/2011	2:20:40 AM	Bubbler valve closed
3/16/2011	2:20:40 AM	Helium valve opened
3/16/2011	2:20:40 AM	Main Vac valve opened
3/16/2011	2:20:40 AM	Bypass valve opened
3/16/2011	2:20:40 AM	Helium MFC set to  100.000000
3/16/2011	2:20:40 AM	H2 MFC set to  0.000000
3/16/2011	2:20:40 AM	BCl3 MFC set to  0.000000
3/16/2011	2:20:40 AM	PHl3 MFC set to  0.000000
3/16/2011	2:20:40 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:20:40 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:20:40 AM	Tube furnace set to 0
3/16/2011	2:21:40 AM	Helium valve closed
3/16/2011	2:21:40 AM	H2 valve closed
3/16/2011	2:21:40 AM	BCl3 valve closed
3/16/2011	2:21:40 AM	PH3 valve closed
3/16/2011	2:21:40 AM	SiCl4 pre valve closed
3/16/2011	2:21:40 AM	SiCl4 post valve closed
3/16/2011	2:21:40 AM	Bubbler valve closed
3/16/2011	2:21:40 AM	Main Vac valve opened
3/16/2011	2:21:40 AM	Bypass valve opened
3/16/2011	2:21:40 AM	Helium MFC set to  0.000000
3/16/2011	2:21:40 AM	H2 MFC set to  0.000000
3/16/2011	2:21:40 AM	BCl3 MFC set to  0.000000
3/16/2011	2:21:40 AM	PHl3 MFC set to  0.000000
3/16/2011	2:21:40 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:21:40 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:21:40 AM	Tube furnace set to 0
3/16/2011	2:22:40 AM	H2 valve closed
3/16/2011	2:22:40 AM	BCl3 valve closed
3/16/2011	2:22:40 AM	PH3 valve closed
3/16/2011	2:22:40 AM	SiCl4 pre valve closed
3/16/2011	2:22:40 AM	SiCl4 post valve closed
3/16/2011	2:22:40 AM	Bubbler valve closed
3/16/2011	2:22:40 AM	Helium valve opened
3/16/2011	2:22:40 AM	Main Vac valve opened
3/16/2011	2:22:40 AM	Bypass valve opened
3/16/2011	2:22:40 AM	Helium MFC set to  100.000000
3/16/2011	2:22:40 AM	H2 MFC set to  0.000000
3/16/2011	2:22:40 AM	BCl3 MFC set to  0.000000
3/16/2011	2:22:40 AM	PHl3 MFC set to  0.000000
3/16/2011	2:22:40 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:22:40 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:22:40 AM	Tube furnace set to 0
3/16/2011	2:23:40 AM	Helium valve closed
3/16/2011	2:23:40 AM	H2 valve closed
3/16/2011	2:23:40 AM	BCl3 valve closed
3/16/2011	2:23:41 AM	PH3 valve closed
3/16/2011	2:23:41 AM	SiCl4 pre valve closed
3/16/2011	2:23:41 AM	SiCl4 post valve closed
3/16/2011	2:23:41 AM	Bubbler valve closed
3/16/2011	2:23:41 AM	Main Vac valve opened
3/16/2011	2:23:41 AM	Bypass valve opened
3/16/2011	2:23:41 AM	Helium MFC set to  0.000000
3/16/2011	2:23:41 AM	H2 MFC set to  0.000000
3/16/2011	2:23:41 AM	BCl3 MFC set to  0.000000
3/16/2011	2:23:41 AM	PHl3 MFC set to  0.000000
3/16/2011	2:23:41 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:23:41 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:23:41 AM	Tube furnace set to 0
3/16/2011	2:24:41 AM	H2 valve closed
3/16/2011	2:24:41 AM	BCl3 valve closed
3/16/2011	2:24:41 AM	PH3 valve closed
3/16/2011	2:24:41 AM	SiCl4 pre valve closed
3/16/2011	2:24:41 AM	SiCl4 post valve closed
3/16/2011	2:24:41 AM	Bubbler valve closed
3/16/2011	2:24:41 AM	Helium valve opened
3/16/2011	2:24:41 AM	Main Vac valve opened
3/16/2011	2:24:41 AM	Bypass valve opened
3/16/2011	2:24:41 AM	Helium MFC set to  100.000000
3/16/2011	2:24:41 AM	H2 MFC set to  0.000000
3/16/2011	2:24:41 AM	BCl3 MFC set to  0.000000
3/16/2011	2:24:41 AM	PHl3 MFC set to  0.000000
3/16/2011	2:24:41 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:24:41 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:24:41 AM	Tube furnace set to 0
3/16/2011	2:25:33 AM	Run aborted at 2:25 AM
3/16/2011	2:25:33 AM	Helium valve closed
3/16/2011	2:25:33 AM	H2 valve closed
3/16/2011	2:25:33 AM	BCl3 valve closed
3/16/2011	2:25:33 AM	PH3 valve closed
3/16/2011	2:25:33 AM	SiCl4 pre valve closed
3/16/2011	2:25:33 AM	SiCl4 post valve closed
3/16/2011	2:25:33 AM	Bypass valve closed
3/16/2011	2:25:33 AM	Main Vac valve closed
3/16/2011	2:25:33 AM	Bubbler valve closed
3/16/2011	2:25:33 AM	Helium MFC set to  0.000000
3/16/2011	2:25:33 AM	H2 MFC set to  0.000000
3/16/2011	2:25:33 AM	BCl3 MFC set to  0.000000
3/16/2011	2:25:33 AM	PHl3 MFC set to  0.000000
3/16/2011	2:25:33 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:25:33 AM	Tube furnace set to 0
3/16/2011	2:25:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/16/2011	2:25:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2011	2:25:34 AM	Recipe started at 2:25 AM
3/16/2011	2:25:34 AM	Helium valve closed
3/16/2011	2:25:34 AM	H2 valve closed
3/16/2011	2:25:34 AM	BCl3 valve closed
3/16/2011	2:25:34 AM	PH3 valve closed
3/16/2011	2:25:34 AM	SiCl4 pre valve closed
3/16/2011	2:25:34 AM	SiCl4 post valve closed
3/16/2011	2:25:34 AM	Main Vac valve closed
3/16/2011	2:25:34 AM	Bubbler valve closed
3/16/2011	2:25:34 AM	Bypass valve opened
3/16/2011	2:25:34 AM	Helium MFC set to  0.000000
3/16/2011	2:25:34 AM	H2 MFC set to  0.000000
3/16/2011	2:25:34 AM	BCl3 MFC set to  0.000000
3/16/2011	2:25:34 AM	PHl3 MFC set to  0.000000
3/16/2011	2:25:34 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:25:34 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:25:34 AM	Tube furnace set to 0
3/16/2011	2:25:35 AM	Helium valve closed
3/16/2011	2:25:35 AM	H2 valve closed
3/16/2011	2:25:35 AM	BCl3 valve closed
3/16/2011	2:25:35 AM	PH3 valve closed
3/16/2011	2:25:35 AM	SiCl4 pre valve closed
3/16/2011	2:25:35 AM	SiCl4 post valve closed
3/16/2011	2:25:35 AM	Bubbler valve closed
3/16/2011	2:25:35 AM	Main Vac valve opened
3/16/2011	2:25:35 AM	Bypass valve opened
3/16/2011	2:25:35 AM	Helium MFC set to  0.000000
3/16/2011	2:25:35 AM	H2 MFC set to  0.000000
3/16/2011	2:25:35 AM	BCl3 MFC set to  0.000000
3/16/2011	2:25:35 AM	PHl3 MFC set to  0.000000
3/16/2011	2:25:35 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:25:35 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:25:35 AM	Tube furnace set to 0
3/16/2011	2:25:35 AM	Run finished at 2:25 AM
3/16/2011	2:25:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2011	2:26:26 AM	Recipe started at 2:26 AM
3/16/2011	2:26:26 AM	Helium valve closed
3/16/2011	2:26:26 AM	BCl3 valve closed
3/16/2011	2:26:26 AM	PH3 valve closed
3/16/2011	2:26:26 AM	SiCl4 pre valve closed
3/16/2011	2:26:26 AM	SiCl4 post valve closed
3/16/2011	2:26:26 AM	Main Vac valve closed
3/16/2011	2:26:26 AM	Bypass valve closed
3/16/2011	2:26:26 AM	Bubbler valve closed
3/16/2011	2:26:26 AM	H2 valve opened
3/16/2011	2:26:26 AM	Helium MFC set to  0.000000
3/16/2011	2:26:26 AM	H2 MFC set to  500.000000
3/16/2011	2:26:26 AM	BCl3 MFC set to  0.000000
3/16/2011	2:26:26 AM	PHl3 MFC set to  0.000000
3/16/2011	2:26:26 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:26:26 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:26:27 AM	Tube furnace set to 0
3/16/2011	2:27:45 AM	Helium valve closed
3/16/2011	2:27:45 AM	BCl3 valve closed
3/16/2011	2:27:45 AM	PH3 valve closed
3/16/2011	2:27:45 AM	SiCl4 pre valve closed
3/16/2011	2:27:45 AM	SiCl4 post valve closed
3/16/2011	2:27:45 AM	Main Vac valve closed
3/16/2011	2:27:45 AM	Bypass valve closed
3/16/2011	2:27:45 AM	H2 valve opened
3/16/2011	2:27:45 AM	Bubbler valve opened
3/16/2011	2:27:45 AM	Helium MFC set to  0.000000
3/16/2011	2:27:45 AM	H2 MFC set to  500.000000
3/16/2011	2:27:45 AM	BCl3 MFC set to  0.000000
3/16/2011	2:27:45 AM	PHl3 MFC set to  0.000000
3/16/2011	2:27:45 AM	SiCl4 MFC set to  0.000000
3/16/2011	2:27:45 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:27:45 AM	Tube furnace set to 1000
3/16/2011	2:47:45 AM	Helium valve closed
3/16/2011	2:47:45 AM	PH3 valve closed
3/16/2011	2:47:45 AM	Main Vac valve closed
3/16/2011	2:47:45 AM	Bypass valve closed
3/16/2011	2:47:45 AM	H2 valve opened
3/16/2011	2:47:45 AM	BCl3 valve opened
3/16/2011	2:47:45 AM	SiCl4 pre valve opened
3/16/2011	2:47:45 AM	SiCl4 post valve opened
3/16/2011	2:47:45 AM	Bubbler valve opened
3/16/2011	2:47:45 AM	Helium MFC set to  0.000000
3/16/2011	2:47:45 AM	H2 MFC set to  500.000000
3/16/2011	2:47:45 AM	BCl3 MFC set to  3.000000
3/16/2011	2:47:45 AM	PHl3 MFC set to  0.000000
3/16/2011	2:47:45 AM	SiCl4 MFC set to  75.000000
3/16/2011	2:47:45 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:47:45 AM	Tube furnace set to 1000
3/16/2011	3:07:45 AM	H2 valve closed
3/16/2011	3:07:45 AM	BCl3 valve closed
3/16/2011	3:07:45 AM	PH3 valve closed
3/16/2011	3:07:45 AM	SiCl4 pre valve closed
3/16/2011	3:07:45 AM	SiCl4 post valve closed
3/16/2011	3:07:45 AM	Main Vac valve closed
3/16/2011	3:07:45 AM	Bypass valve closed
3/16/2011	3:07:45 AM	Helium valve opened
3/16/2011	3:07:45 AM	Bubbler valve opened
3/16/2011	3:07:45 AM	Helium MFC set to  500.000000
3/16/2011	3:07:45 AM	H2 MFC set to  0.000000
3/16/2011	3:07:45 AM	BCl3 MFC set to  0.000000
3/16/2011	3:07:45 AM	PHl3 MFC set to  0.000000
3/16/2011	3:07:45 AM	SiCl4 MFC set to  0.000000
3/16/2011	3:07:45 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:07:46 AM	Tube furnace set to 0
3/16/2011	3:27:46 AM	Helium valve closed
3/16/2011	3:27:46 AM	H2 valve closed
3/16/2011	3:27:46 AM	BCl3 valve closed
3/16/2011	3:27:46 AM	PH3 valve closed
3/16/2011	3:27:46 AM	SiCl4 pre valve closed
3/16/2011	3:27:46 AM	SiCl4 post valve closed
3/16/2011	3:27:46 AM	Main Vac valve closed
3/16/2011	3:27:46 AM	Bypass valve closed
3/16/2011	3:27:46 AM	Bubbler valve closed
3/16/2011	3:27:46 AM	Helium MFC set to  0.000000
3/16/2011	3:27:46 AM	H2 MFC set to  0.000000
3/16/2011	3:27:46 AM	BCl3 MFC set to  0.000000
3/16/2011	3:27:46 AM	PHl3 MFC set to  0.000000
3/16/2011	3:27:46 AM	SiCl4 MFC set to  0.000000
3/16/2011	3:27:46 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:27:46 AM	Tube furnace set to 0
3/16/2011	3:27:46 AM	Run finished at 3:27 AM
3/16/2011	4:37:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2011	4:38:00 AM	Recipe started at 4:37 AM
3/16/2011	4:38:00 AM	H2 valve closed
3/16/2011	4:38:00 AM	BCl3 valve closed
3/16/2011	4:38:00 AM	PH3 valve closed
3/16/2011	4:38:00 AM	SiCl4 pre valve closed
3/16/2011	4:38:00 AM	SiCl4 post valve closed
3/16/2011	4:38:00 AM	Main Vac valve closed
3/16/2011	4:38:00 AM	Bypass valve closed
3/16/2011	4:38:00 AM	Bubbler valve closed
3/16/2011	4:38:00 AM	Helium valve opened
3/16/2011	4:38:00 AM	Helium MFC set to  500.000000
3/16/2011	4:38:00 AM	H2 MFC set to  0.000000
3/16/2011	4:38:00 AM	BCl3 MFC set to  0.000000
3/16/2011	4:38:00 AM	PHl3 MFC set to  0.000000
3/16/2011	4:38:00 AM	SiCl4 MFC set to  0.000000
3/16/2011	4:38:00 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	4:38:00 AM	Tube furnace set to 0
3/16/2011	4:38:06 AM	Helium valve closed
3/16/2011	4:38:06 AM	H2 valve closed
3/16/2011	4:38:06 AM	BCl3 valve closed
3/16/2011	4:38:06 AM	PH3 valve closed
3/16/2011	4:38:06 AM	SiCl4 pre valve closed
3/16/2011	4:38:06 AM	SiCl4 post valve closed
3/16/2011	4:38:06 AM	Main Vac valve closed
3/16/2011	4:38:06 AM	Bypass valve closed
3/16/2011	4:38:06 AM	Bubbler valve closed
3/16/2011	4:38:06 AM	Helium MFC set to  0.000000
3/16/2011	4:38:06 AM	H2 MFC set to  0.000000
3/16/2011	4:38:06 AM	BCl3 MFC set to  0.000000
3/16/2011	4:38:06 AM	PHl3 MFC set to  0.000000
3/16/2011	4:38:06 AM	SiCl4 MFC set to  0.000000
3/16/2011	4:38:06 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	4:38:06 AM	Tube furnace set to 0
3/16/2011	4:38:06 AM	Run finished at 4:38 AM
3/16/2011	4:38:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2011	4:46:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2011	4:46:41 AM	Recipe started at 4:46 AM
3/16/2011	4:46:41 AM	Helium valve closed
3/16/2011	4:46:41 AM	H2 valve closed
3/16/2011	4:46:41 AM	BCl3 valve closed
3/16/2011	4:46:41 AM	PH3 valve closed
3/16/2011	4:46:41 AM	SiCl4 pre valve closed
3/16/2011	4:46:41 AM	SiCl4 post valve closed
3/16/2011	4:46:41 AM	Main Vac valve closed
3/16/2011	4:46:41 AM	Bubbler valve closed
3/16/2011	4:46:41 AM	Bypass valve opened
3/16/2011	4:46:41 AM	Helium MFC set to  0.000000
3/16/2011	4:46:41 AM	H2 MFC set to  0.000000
3/16/2011	4:46:41 AM	BCl3 MFC set to  0.000000
3/16/2011	4:46:41 AM	PHl3 MFC set to  0.000000
3/16/2011	4:46:41 AM	SiCl4 MFC set to  0.000000
3/16/2011	4:46:41 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	4:46:41 AM	Tube furnace set to 0
3/16/2011	4:47:14 AM	Helium valve closed
3/16/2011	4:47:14 AM	H2 valve closed
3/16/2011	4:47:14 AM	BCl3 valve closed
3/16/2011	4:47:14 AM	PH3 valve closed
3/16/2011	4:47:14 AM	SiCl4 pre valve closed
3/16/2011	4:47:14 AM	SiCl4 post valve closed
3/16/2011	4:47:14 AM	Bubbler valve closed
3/16/2011	4:47:14 AM	Main Vac valve opened
3/16/2011	4:47:14 AM	Bypass valve opened
3/16/2011	4:47:14 AM	Helium MFC set to  0.000000
3/16/2011	4:47:14 AM	H2 MFC set to  0.000000
3/16/2011	4:47:14 AM	BCl3 MFC set to  0.000000
3/16/2011	4:47:14 AM	PHl3 MFC set to  0.000000
3/16/2011	4:47:14 AM	SiCl4 MFC set to  0.000000
3/16/2011	4:47:14 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	4:47:14 AM	Tube furnace set to 0
3/16/2011	4:47:14 AM	Run finished at 4:47 AM
3/16/2011	4:47:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2011	4:47:40 AM	Helium MFC set to  50.000000
3/16/2011	4:47:41 AM	Helium valve opened
3/16/2011	4:55:29 AM	Helium MFC set to  0.000000
3/16/2011	4:55:30 AM	Helium valve closed
3/16/2011	4:56:28 AM	Tube furnace set to 400
3/16/2011	5:03:54 AM	Tube furnace set to 390
3/16/2011	5:06:47 AM	Tube furnace set to 380
3/16/2011	5:16:54 AM	Tube furnace set to 370
3/16/2011	5:20:48 AM	Tube furnace set to 360
3/16/2011	5:26:18 AM	Tube furnace set to 350
3/16/2011	5:30:12 AM	Tube furnace set to 340
3/16/2011	5:30:55 AM	Helium MFC set to  10.000000
3/16/2011	5:30:56 AM	Helium valve opened
3/16/2011	5:34:33 AM	Tube furnace set to 330
3/16/2011	5:38:28 AM	Tube furnace set to 320
3/16/2011	5:44:03 AM	Tube furnace set to 310
3/16/2011	5:50:17 AM	Tube furnace set to 300
3/16/2011	5:50:21 AM	Helium MFC set to  0.000000
3/16/2011	5:50:21 AM	Helium valve closed
3/16/2011	5:59:24 AM	Recipe started at 5:59 AM
3/16/2011	5:59:24 AM	Helium valve closed
3/16/2011	5:59:24 AM	H2 valve closed
3/16/2011	5:59:24 AM	BCl3 valve closed
3/16/2011	5:59:24 AM	PH3 valve closed
3/16/2011	5:59:24 AM	SiCl4 pre valve closed
3/16/2011	5:59:24 AM	SiCl4 post valve closed
3/16/2011	5:59:24 AM	Bubbler valve closed
3/16/2011	5:59:24 AM	Main Vac valve opened
3/16/2011	5:59:24 AM	Bypass valve opened
3/16/2011	5:59:24 AM	Helium MFC set to  0.000000
3/16/2011	5:59:24 AM	H2 MFC set to  0.000000
3/16/2011	5:59:24 AM	BCl3 MFC set to  0.000000
3/16/2011	5:59:24 AM	PHl3 MFC set to  0.000000
3/16/2011	5:59:24 AM	SiCl4 MFC set to  0.000000
3/16/2011	5:59:24 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	5:59:24 AM	Tube furnace set to 300
3/16/2011	8:29:25 AM	Helium valve closed
3/16/2011	8:29:25 AM	H2 valve closed
3/16/2011	8:29:25 AM	BCl3 valve closed
3/16/2011	8:29:25 AM	PH3 valve closed
3/16/2011	8:29:25 AM	SiCl4 pre valve closed
3/16/2011	8:29:25 AM	SiCl4 post valve closed
3/16/2011	8:29:25 AM	Bubbler valve closed
3/16/2011	8:29:25 AM	Main Vac valve opened
3/16/2011	8:29:25 AM	Bypass valve opened
3/16/2011	8:29:25 AM	Helium MFC set to  0.000000
3/16/2011	8:29:25 AM	H2 MFC set to  0.000000
3/16/2011	8:29:25 AM	BCl3 MFC set to  0.000000
3/16/2011	8:29:25 AM	PHl3 MFC set to  0.000000
3/16/2011	8:29:25 AM	SiCl4 MFC set to  0.000000
3/16/2011	8:29:25 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	8:29:25 AM	Tube furnace set to 0
3/16/2011	8:29:25 AM	Run finished at 8:29 AM
3/16/2011	9:30:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2011	9:30:27 AM	Recipe started at 9:30 AM
3/16/2011	9:30:27 AM	H2 valve closed
3/16/2011	9:30:27 AM	BCl3 valve closed
3/16/2011	9:30:27 AM	PH3 valve closed
3/16/2011	9:30:27 AM	SiCl4 pre valve closed
3/16/2011	9:30:27 AM	SiCl4 post valve closed
3/16/2011	9:30:27 AM	Main Vac valve closed
3/16/2011	9:30:27 AM	Bypass valve closed
3/16/2011	9:30:27 AM	Bubbler valve closed
3/16/2011	9:30:27 AM	Helium valve opened
3/16/2011	9:30:27 AM	Helium MFC set to  500.000000
3/16/2011	9:30:27 AM	H2 MFC set to  0.000000
3/16/2011	9:30:27 AM	BCl3 MFC set to  0.000000
3/16/2011	9:30:27 AM	PHl3 MFC set to  0.000000
3/16/2011	9:30:27 AM	SiCl4 MFC set to  0.000000
3/16/2011	9:30:27 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	9:30:27 AM	Tube furnace set to 0
3/16/2011	9:31:43 AM	Helium valve closed
3/16/2011	9:31:43 AM	H2 valve closed
3/16/2011	9:31:43 AM	BCl3 valve closed
3/16/2011	9:31:43 AM	PH3 valve closed
3/16/2011	9:31:43 AM	SiCl4 pre valve closed
3/16/2011	9:31:43 AM	SiCl4 post valve closed
3/16/2011	9:31:43 AM	Main Vac valve closed
3/16/2011	9:31:43 AM	Bypass valve closed
3/16/2011	9:31:43 AM	Bubbler valve closed
3/16/2011	9:31:43 AM	Helium MFC set to  0.000000
3/16/2011	9:31:43 AM	H2 MFC set to  0.000000
3/16/2011	9:31:43 AM	BCl3 MFC set to  0.000000
3/16/2011	9:31:43 AM	PHl3 MFC set to  0.000000
3/16/2011	9:31:43 AM	SiCl4 MFC set to  0.000000
3/16/2011	9:31:43 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	9:31:43 AM	Tube furnace set to 0
3/16/2011	9:31:43 AM	Run finished at 9:31 AM
3/16/2011	9:31:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2011	9:46:53 AM	Bypass valve opened
3/16/2011	9:46:56 AM	Bypass valve closed
3/16/2011	9:47:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2011	9:47:02 AM	Recipe started at 9:47 AM
3/16/2011	9:47:02 AM	Helium valve closed
3/16/2011	9:47:02 AM	H2 valve closed
3/16/2011	9:47:02 AM	BCl3 valve closed
3/16/2011	9:47:02 AM	PH3 valve closed
3/16/2011	9:47:02 AM	SiCl4 pre valve closed
3/16/2011	9:47:02 AM	SiCl4 post valve closed
3/16/2011	9:47:02 AM	Main Vac valve closed
3/16/2011	9:47:02 AM	Bubbler valve closed
3/16/2011	9:47:02 AM	Bypass valve opened
3/16/2011	9:47:02 AM	Helium MFC set to  0.000000
3/16/2011	9:47:02 AM	H2 MFC set to  0.000000
3/16/2011	9:47:02 AM	BCl3 MFC set to  0.000000
3/16/2011	9:47:02 AM	PHl3 MFC set to  0.000000
3/16/2011	9:47:02 AM	SiCl4 MFC set to  0.000000
3/16/2011	9:47:02 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	9:47:02 AM	Tube furnace set to 0
3/16/2011	9:47:31 AM	Helium valve closed
3/16/2011	9:47:31 AM	H2 valve closed
3/16/2011	9:47:31 AM	BCl3 valve closed
3/16/2011	9:47:31 AM	PH3 valve closed
3/16/2011	9:47:31 AM	SiCl4 pre valve closed
3/16/2011	9:47:31 AM	SiCl4 post valve closed
3/16/2011	9:47:31 AM	Bubbler valve closed
3/16/2011	9:47:31 AM	Main Vac valve opened
3/16/2011	9:47:31 AM	Bypass valve opened
3/16/2011	9:47:31 AM	Helium MFC set to  0.000000
3/16/2011	9:47:31 AM	H2 MFC set to  0.000000
3/16/2011	9:47:31 AM	BCl3 MFC set to  0.000000
3/16/2011	9:47:31 AM	PHl3 MFC set to  0.000000
3/16/2011	9:47:31 AM	SiCl4 MFC set to  0.000000
3/16/2011	9:47:31 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	9:47:31 AM	Tube furnace set to 0
3/16/2011	9:47:32 AM	Run finished at 9:47 AM
3/16/2011	9:47:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2011	9:49:57 AM	Bypass valve closed
3/16/2011	9:49:57 AM	Main Vac valve closed
3/16/2011	9:50:41 AM	Bypass valve opened
3/16/2011	9:50:42 AM	Main Vac valve opened
3/16/2011	9:50:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/16/2011	9:50:56 AM	Recipe started at 9:50 AM
3/16/2011	9:50:56 AM	Helium valve closed
3/16/2011	9:50:56 AM	H2 valve closed
3/16/2011	9:50:56 AM	BCl3 valve closed
3/16/2011	9:50:56 AM	PH3 valve closed
3/16/2011	9:50:56 AM	SiCl4 pre valve closed
3/16/2011	9:50:56 AM	SiCl4 post valve closed
3/16/2011	9:50:56 AM	Main Vac valve closed
3/16/2011	9:50:56 AM	Bubbler valve closed
3/16/2011	9:50:56 AM	Bypass valve opened
3/16/2011	9:50:56 AM	Helium MFC set to  0.000000
3/16/2011	9:50:56 AM	H2 MFC set to  0.000000
3/16/2011	9:50:56 AM	BCl3 MFC set to  0.000000
3/16/2011	9:50:56 AM	PHl3 MFC set to  0.000000
3/16/2011	9:50:56 AM	SiCl4 MFC set to  0.000000
3/16/2011	9:50:56 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	9:50:57 AM	Tube furnace set to 0
3/16/2011	9:50:57 AM	Helium valve closed
3/16/2011	9:50:57 AM	H2 valve closed
3/16/2011	9:50:57 AM	BCl3 valve closed
3/16/2011	9:50:57 AM	PH3 valve closed
3/16/2011	9:50:57 AM	SiCl4 pre valve closed
3/16/2011	9:50:57 AM	SiCl4 post valve closed
3/16/2011	9:50:57 AM	Bubbler valve closed
3/16/2011	9:50:57 AM	Main Vac valve opened
3/16/2011	9:50:57 AM	Bypass valve opened
3/16/2011	9:50:57 AM	Helium MFC set to  0.000000
3/16/2011	9:50:57 AM	H2 MFC set to  0.000000
3/16/2011	9:50:57 AM	BCl3 MFC set to  0.000000
3/16/2011	9:50:57 AM	PHl3 MFC set to  0.000000
3/16/2011	9:50:57 AM	SiCl4 MFC set to  0.000000
3/16/2011	9:50:57 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	9:50:57 AM	Tube furnace set to 0
3/16/2011	9:51:57 AM	H2 valve closed
3/16/2011	9:51:57 AM	BCl3 valve closed
3/16/2011	9:51:57 AM	PH3 valve closed
3/16/2011	9:51:57 AM	SiCl4 pre valve closed
3/16/2011	9:51:57 AM	SiCl4 post valve closed
3/16/2011	9:51:57 AM	Bubbler valve closed
3/16/2011	9:51:57 AM	Helium valve opened
3/16/2011	9:51:57 AM	Main Vac valve opened
3/16/2011	9:51:57 AM	Bypass valve opened
3/16/2011	9:51:57 AM	Helium MFC set to  100.000000
3/16/2011	9:51:57 AM	H2 MFC set to  0.000000
3/16/2011	9:51:57 AM	BCl3 MFC set to  0.000000
3/16/2011	9:51:57 AM	PHl3 MFC set to  0.000000
3/16/2011	9:51:57 AM	SiCl4 MFC set to  0.000000
3/16/2011	9:51:57 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	9:51:57 AM	Tube furnace set to 0
3/16/2011	9:52:57 AM	Helium valve closed
3/16/2011	9:52:57 AM	H2 valve closed
3/16/2011	9:52:57 AM	BCl3 valve closed
3/16/2011	9:52:57 AM	PH3 valve closed
3/16/2011	9:52:57 AM	SiCl4 pre valve closed
3/16/2011	9:52:57 AM	SiCl4 post valve closed
3/16/2011	9:52:57 AM	Bubbler valve closed
3/16/2011	9:52:57 AM	Main Vac valve opened
3/16/2011	9:52:57 AM	Bypass valve opened
3/16/2011	9:52:57 AM	Helium MFC set to  0.000000
3/16/2011	9:52:57 AM	H2 MFC set to  0.000000
3/16/2011	9:52:57 AM	BCl3 MFC set to  0.000000
3/16/2011	9:52:57 AM	PHl3 MFC set to  0.000000
3/16/2011	9:52:57 AM	SiCl4 MFC set to  0.000000
3/16/2011	9:52:57 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	9:52:57 AM	Tube furnace set to 0
3/16/2011	9:53:57 AM	H2 valve closed
3/16/2011	9:53:57 AM	BCl3 valve closed
3/16/2011	9:53:57 AM	PH3 valve closed
3/16/2011	9:53:57 AM	SiCl4 pre valve closed
3/16/2011	9:53:57 AM	SiCl4 post valve closed
3/16/2011	9:53:57 AM	Bubbler valve closed
3/16/2011	9:53:57 AM	Helium valve opened
3/16/2011	9:53:57 AM	Main Vac valve opened
3/16/2011	9:53:57 AM	Bypass valve opened
3/16/2011	9:53:57 AM	Helium MFC set to  100.000000
3/16/2011	9:53:57 AM	H2 MFC set to  0.000000
3/16/2011	9:53:57 AM	BCl3 MFC set to  0.000000
3/16/2011	9:53:57 AM	PHl3 MFC set to  0.000000
3/16/2011	9:53:57 AM	SiCl4 MFC set to  0.000000
3/16/2011	9:53:57 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	9:53:58 AM	Tube furnace set to 0
3/16/2011	9:54:58 AM	Helium valve closed
3/16/2011	9:54:58 AM	H2 valve closed
3/16/2011	9:54:58 AM	BCl3 valve closed
3/16/2011	9:54:58 AM	PH3 valve closed
3/16/2011	9:54:58 AM	SiCl4 pre valve closed
3/16/2011	9:54:58 AM	SiCl4 post valve closed
3/16/2011	9:54:58 AM	Bubbler valve closed
3/16/2011	9:54:58 AM	Main Vac valve opened
3/16/2011	9:54:58 AM	Bypass valve opened
3/16/2011	9:54:58 AM	Helium MFC set to  0.000000
3/16/2011	9:54:58 AM	H2 MFC set to  0.000000
3/16/2011	9:54:58 AM	BCl3 MFC set to  0.000000
3/16/2011	9:54:58 AM	PHl3 MFC set to  0.000000
3/16/2011	9:54:58 AM	SiCl4 MFC set to  0.000000
3/16/2011	9:54:58 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	9:54:58 AM	Tube furnace set to 0
3/16/2011	9:55:58 AM	H2 valve closed
3/16/2011	9:55:58 AM	BCl3 valve closed
3/16/2011	9:55:58 AM	PH3 valve closed
3/16/2011	9:55:58 AM	SiCl4 pre valve closed
3/16/2011	9:55:58 AM	SiCl4 post valve closed
3/16/2011	9:55:58 AM	Bubbler valve closed
3/16/2011	9:55:58 AM	Helium valve opened
3/16/2011	9:55:58 AM	Main Vac valve opened
3/16/2011	9:55:58 AM	Bypass valve opened
3/16/2011	9:55:58 AM	Helium MFC set to  100.000000
3/16/2011	9:55:58 AM	H2 MFC set to  0.000000
3/16/2011	9:55:58 AM	BCl3 MFC set to  0.000000
3/16/2011	9:55:58 AM	PHl3 MFC set to  0.000000
3/16/2011	9:55:58 AM	SiCl4 MFC set to  0.000000
3/16/2011	9:55:58 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	9:55:58 AM	Tube furnace set to 0
3/16/2011	9:56:58 AM	Helium valve closed
3/16/2011	9:56:58 AM	H2 valve closed
3/16/2011	9:56:58 AM	BCl3 valve closed
3/16/2011	9:56:58 AM	PH3 valve closed
3/16/2011	9:56:58 AM	SiCl4 pre valve closed
3/16/2011	9:56:58 AM	SiCl4 post valve closed
3/16/2011	9:56:58 AM	Bubbler valve closed
3/16/2011	9:56:58 AM	Main Vac valve opened
3/16/2011	9:56:58 AM	Bypass valve opened
3/16/2011	9:56:58 AM	Helium MFC set to  0.000000
3/16/2011	9:56:58 AM	H2 MFC set to  0.000000
3/16/2011	9:56:58 AM	BCl3 MFC set to  0.000000
3/16/2011	9:56:58 AM	PHl3 MFC set to  0.000000
3/16/2011	9:56:58 AM	SiCl4 MFC set to  0.000000
3/16/2011	9:56:58 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	9:56:58 AM	Tube furnace set to 0
3/16/2011	9:57:58 AM	H2 valve closed
3/16/2011	9:57:58 AM	BCl3 valve closed
3/16/2011	9:57:58 AM	PH3 valve closed
3/16/2011	9:57:58 AM	SiCl4 pre valve closed
3/16/2011	9:57:58 AM	SiCl4 post valve closed
3/16/2011	9:57:58 AM	Bubbler valve closed
3/16/2011	9:57:58 AM	Helium valve opened
3/16/2011	9:57:58 AM	Main Vac valve opened
3/16/2011	9:57:58 AM	Bypass valve opened
3/16/2011	9:57:58 AM	Helium MFC set to  100.000000
3/16/2011	9:57:58 AM	H2 MFC set to  0.000000
3/16/2011	9:57:58 AM	BCl3 MFC set to  0.000000
3/16/2011	9:57:58 AM	PHl3 MFC set to  0.000000
3/16/2011	9:57:58 AM	SiCl4 MFC set to  0.000000
3/16/2011	9:57:58 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	9:57:58 AM	Tube furnace set to 0
3/16/2011	9:58:58 AM	Helium valve closed
3/16/2011	9:58:58 AM	H2 valve closed
3/16/2011	9:58:58 AM	BCl3 valve closed
3/16/2011	9:58:58 AM	PH3 valve closed
3/16/2011	9:58:58 AM	SiCl4 pre valve closed
3/16/2011	9:58:58 AM	SiCl4 post valve closed
3/16/2011	9:58:58 AM	Bubbler valve closed
3/16/2011	9:58:58 AM	Main Vac valve opened
3/16/2011	9:58:58 AM	Bypass valve opened
3/16/2011	9:58:58 AM	Helium MFC set to  0.000000
3/16/2011	9:58:58 AM	H2 MFC set to  0.000000
3/16/2011	9:58:58 AM	BCl3 MFC set to  0.000000
3/16/2011	9:58:58 AM	PHl3 MFC set to  0.000000
3/16/2011	9:58:58 AM	SiCl4 MFC set to  0.000000
3/16/2011	9:58:58 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	9:58:59 AM	Tube furnace set to 0
3/16/2011	9:59:59 AM	H2 valve closed
3/16/2011	9:59:59 AM	BCl3 valve closed
3/16/2011	9:59:59 AM	PH3 valve closed
3/16/2011	9:59:59 AM	SiCl4 pre valve closed
3/16/2011	9:59:59 AM	SiCl4 post valve closed
3/16/2011	9:59:59 AM	Bubbler valve closed
3/16/2011	9:59:59 AM	Helium valve opened
3/16/2011	9:59:59 AM	Main Vac valve opened
3/16/2011	9:59:59 AM	Bypass valve opened
3/16/2011	9:59:59 AM	Helium MFC set to  100.000000
3/16/2011	9:59:59 AM	H2 MFC set to  0.000000
3/16/2011	9:59:59 AM	BCl3 MFC set to  0.000000
3/16/2011	9:59:59 AM	PHl3 MFC set to  0.000000
3/16/2011	9:59:59 AM	SiCl4 MFC set to  0.000000
3/16/2011	9:59:59 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	9:59:59 AM	Tube furnace set to 0
3/16/2011	10:00:59 AM	Helium valve closed
3/16/2011	10:00:59 AM	H2 valve closed
3/16/2011	10:00:59 AM	BCl3 valve closed
3/16/2011	10:00:59 AM	PH3 valve closed
3/16/2011	10:00:59 AM	SiCl4 pre valve closed
3/16/2011	10:00:59 AM	SiCl4 post valve closed
3/16/2011	10:00:59 AM	Bubbler valve closed
3/16/2011	10:00:59 AM	Main Vac valve opened
3/16/2011	10:00:59 AM	Bypass valve opened
3/16/2011	10:00:59 AM	Helium MFC set to  0.000000
3/16/2011	10:00:59 AM	H2 MFC set to  0.000000
3/16/2011	10:00:59 AM	BCl3 MFC set to  0.000000
3/16/2011	10:00:59 AM	PHl3 MFC set to  0.000000
3/16/2011	10:00:59 AM	SiCl4 MFC set to  0.000000
3/16/2011	10:00:59 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	10:00:59 AM	Tube furnace set to 0
3/16/2011	10:01:59 AM	H2 valve closed
3/16/2011	10:01:59 AM	BCl3 valve closed
3/16/2011	10:01:59 AM	PH3 valve closed
3/16/2011	10:01:59 AM	SiCl4 pre valve closed
3/16/2011	10:01:59 AM	SiCl4 post valve closed
3/16/2011	10:01:59 AM	Bubbler valve closed
3/16/2011	10:01:59 AM	Helium valve opened
3/16/2011	10:01:59 AM	Main Vac valve opened
3/16/2011	10:01:59 AM	Bypass valve opened
3/16/2011	10:01:59 AM	Helium MFC set to  100.000000
3/16/2011	10:01:59 AM	H2 MFC set to  0.000000
3/16/2011	10:01:59 AM	BCl3 MFC set to  0.000000
3/16/2011	10:01:59 AM	PHl3 MFC set to  0.000000
3/16/2011	10:01:59 AM	SiCl4 MFC set to  0.000000
3/16/2011	10:01:59 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	10:01:59 AM	Tube furnace set to 0
3/16/2011	10:02:59 AM	Helium valve closed
3/16/2011	10:02:59 AM	H2 valve closed
3/16/2011	10:02:59 AM	BCl3 valve closed
3/16/2011	10:02:59 AM	PH3 valve closed
3/16/2011	10:02:59 AM	SiCl4 pre valve closed
3/16/2011	10:02:59 AM	SiCl4 post valve closed
3/16/2011	10:02:59 AM	Bubbler valve closed
3/16/2011	10:02:59 AM	Main Vac valve opened
3/16/2011	10:02:59 AM	Bypass valve opened
3/16/2011	10:02:59 AM	Helium MFC set to  0.000000
3/16/2011	10:02:59 AM	H2 MFC set to  0.000000
3/16/2011	10:02:59 AM	BCl3 MFC set to  0.000000
3/16/2011	10:02:59 AM	PHl3 MFC set to  0.000000
3/16/2011	10:02:59 AM	SiCl4 MFC set to  0.000000
3/16/2011	10:02:59 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	10:02:59 AM	Tube furnace set to 0
3/16/2011	10:03:59 AM	H2 valve closed
3/16/2011	10:03:59 AM	BCl3 valve closed
3/16/2011	10:03:59 AM	PH3 valve closed
3/16/2011	10:03:59 AM	SiCl4 pre valve closed
3/16/2011	10:03:59 AM	SiCl4 post valve closed
3/16/2011	10:03:59 AM	Bubbler valve closed
3/16/2011	10:03:59 AM	Helium valve opened
3/16/2011	10:03:59 AM	Main Vac valve opened
3/16/2011	10:03:59 AM	Bypass valve opened
3/16/2011	10:03:59 AM	Helium MFC set to  100.000000
3/16/2011	10:03:59 AM	H2 MFC set to  0.000000
3/16/2011	10:03:59 AM	BCl3 MFC set to  0.000000
3/16/2011	10:03:59 AM	PHl3 MFC set to  0.000000
3/16/2011	10:03:59 AM	SiCl4 MFC set to  0.000000
3/16/2011	10:03:59 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	10:04:00 AM	Tube furnace set to 0
3/16/2011	10:05:00 AM	Helium valve closed
3/16/2011	10:05:00 AM	H2 valve closed
3/16/2011	10:05:00 AM	BCl3 valve closed
3/16/2011	10:05:00 AM	PH3 valve closed
3/16/2011	10:05:00 AM	SiCl4 pre valve closed
3/16/2011	10:05:00 AM	SiCl4 post valve closed
3/16/2011	10:05:00 AM	Bubbler valve closed
3/16/2011	10:05:00 AM	Main Vac valve opened
3/16/2011	10:05:00 AM	Bypass valve opened
3/16/2011	10:05:00 AM	Helium MFC set to  0.000000
3/16/2011	10:05:00 AM	H2 MFC set to  0.000000
3/16/2011	10:05:00 AM	BCl3 MFC set to  0.000000
3/16/2011	10:05:00 AM	PHl3 MFC set to  0.000000
3/16/2011	10:05:00 AM	SiCl4 MFC set to  0.000000
3/16/2011	10:05:00 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	10:05:00 AM	Tube furnace set to 0
3/16/2011	10:06:00 AM	H2 valve closed
3/16/2011	10:06:00 AM	BCl3 valve closed
3/16/2011	10:06:00 AM	PH3 valve closed
3/16/2011	10:06:00 AM	SiCl4 pre valve closed
3/16/2011	10:06:00 AM	SiCl4 post valve closed
3/16/2011	10:06:00 AM	Bubbler valve closed
3/16/2011	10:06:00 AM	Helium valve opened
3/16/2011	10:06:00 AM	Main Vac valve opened
3/16/2011	10:06:00 AM	Bypass valve opened
3/16/2011	10:06:00 AM	Helium MFC set to  100.000000
3/16/2011	10:06:00 AM	H2 MFC set to  0.000000
3/16/2011	10:06:00 AM	BCl3 MFC set to  0.000000
3/16/2011	10:06:00 AM	PHl3 MFC set to  0.000000
3/16/2011	10:06:00 AM	SiCl4 MFC set to  0.000000
3/16/2011	10:06:00 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	10:06:00 AM	Tube furnace set to 0
3/16/2011	10:07:00 AM	Helium valve closed
3/16/2011	10:07:00 AM	H2 valve closed
3/16/2011	10:07:00 AM	BCl3 valve closed
3/16/2011	10:07:00 AM	PH3 valve closed
3/16/2011	10:07:00 AM	SiCl4 pre valve closed
3/16/2011	10:07:00 AM	SiCl4 post valve closed
3/16/2011	10:07:00 AM	Bubbler valve closed
3/16/2011	10:07:00 AM	Main Vac valve opened
3/16/2011	10:07:00 AM	Bypass valve opened
3/16/2011	10:07:00 AM	Helium MFC set to  0.000000
3/16/2011	10:07:00 AM	H2 MFC set to  0.000000
3/16/2011	10:07:00 AM	BCl3 MFC set to  0.000000
3/16/2011	10:07:00 AM	PHl3 MFC set to  0.000000
3/16/2011	10:07:00 AM	SiCl4 MFC set to  0.000000
3/16/2011	10:07:00 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	10:07:00 AM	Tube furnace set to 0
3/16/2011	10:08:00 AM	H2 valve closed
3/16/2011	10:08:00 AM	BCl3 valve closed
3/16/2011	10:08:00 AM	PH3 valve closed
3/16/2011	10:08:00 AM	SiCl4 pre valve closed
3/16/2011	10:08:00 AM	SiCl4 post valve closed
3/16/2011	10:08:00 AM	Bubbler valve closed
3/16/2011	10:08:00 AM	Helium valve opened
3/16/2011	10:08:00 AM	Main Vac valve opened
3/16/2011	10:08:00 AM	Bypass valve opened
3/16/2011	10:08:00 AM	Helium MFC set to  100.000000
3/16/2011	10:08:00 AM	H2 MFC set to  0.000000
3/16/2011	10:08:00 AM	BCl3 MFC set to  0.000000
3/16/2011	10:08:00 AM	PHl3 MFC set to  0.000000
3/16/2011	10:08:00 AM	SiCl4 MFC set to  0.000000
3/16/2011	10:08:00 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	10:08:00 AM	Tube furnace set to 0
3/16/2011	10:09:00 AM	Helium valve closed
3/16/2011	10:09:00 AM	H2 valve closed
3/16/2011	10:09:00 AM	BCl3 valve closed
3/16/2011	10:09:00 AM	PH3 valve closed
3/16/2011	10:09:00 AM	SiCl4 pre valve closed
3/16/2011	10:09:00 AM	SiCl4 post valve closed
3/16/2011	10:09:00 AM	Bubbler valve closed
3/16/2011	10:09:00 AM	Main Vac valve opened
3/16/2011	10:09:00 AM	Bypass valve opened
3/16/2011	10:09:00 AM	Helium MFC set to  0.000000
3/16/2011	10:09:00 AM	H2 MFC set to  0.000000
3/16/2011	10:09:00 AM	BCl3 MFC set to  0.000000
3/16/2011	10:09:00 AM	PHl3 MFC set to  0.000000
3/16/2011	10:09:00 AM	SiCl4 MFC set to  0.000000
3/16/2011	10:09:00 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	10:09:01 AM	Tube furnace set to 0
3/16/2011	10:10:01 AM	H2 valve closed
3/16/2011	10:10:01 AM	BCl3 valve closed
3/16/2011	10:10:01 AM	PH3 valve closed
3/16/2011	10:10:01 AM	SiCl4 pre valve closed
3/16/2011	10:10:01 AM	SiCl4 post valve closed
3/16/2011	10:10:01 AM	Bubbler valve closed
3/16/2011	10:10:01 AM	Helium valve opened
3/16/2011	10:10:01 AM	Main Vac valve opened
3/16/2011	10:10:01 AM	Bypass valve opened
3/16/2011	10:10:01 AM	Helium MFC set to  100.000000
3/16/2011	10:10:01 AM	H2 MFC set to  0.000000
3/16/2011	10:10:01 AM	BCl3 MFC set to  0.000000
3/16/2011	10:10:01 AM	PHl3 MFC set to  0.000000
3/16/2011	10:10:01 AM	SiCl4 MFC set to  0.000000
3/16/2011	10:10:01 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	10:10:01 AM	Tube furnace set to 0
3/16/2011	10:11:01 AM	Helium valve closed
3/16/2011	10:11:01 AM	H2 valve closed
3/16/2011	10:11:01 AM	BCl3 valve closed
3/16/2011	10:11:01 AM	PH3 valve closed
3/16/2011	10:11:01 AM	SiCl4 pre valve closed
3/16/2011	10:11:01 AM	SiCl4 post valve closed
3/16/2011	10:11:01 AM	Bubbler valve closed
3/16/2011	10:11:01 AM	Main Vac valve opened
3/16/2011	10:11:01 AM	Bypass valve opened
3/16/2011	10:11:01 AM	Helium MFC set to  0.000000
3/16/2011	10:11:01 AM	H2 MFC set to  0.000000
3/16/2011	10:11:01 AM	BCl3 MFC set to  0.000000
3/16/2011	10:11:01 AM	PHl3 MFC set to  0.000000
3/16/2011	10:11:01 AM	SiCl4 MFC set to  0.000000
3/16/2011	10:11:01 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	10:11:01 AM	Tube furnace set to 0
3/16/2011	10:11:02 AM	Run finished at 10:11 AM
3/16/2011	10:11:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/16/2011	10:18:24 AM	Bypass valve closed
3/16/2011	10:18:25 AM	Main Vac valve closed
3/16/2011	10:19:03 AM	Main Vac valve opened
3/16/2011	10:19:04 AM	Bypass valve opened
3/16/2011	10:21:11 AM	Recipe started at 10:21 AM
3/16/2011	10:21:11 AM	Helium valve closed
3/16/2011	10:21:11 AM	BCl3 valve closed
3/16/2011	10:21:11 AM	PH3 valve closed
3/16/2011	10:21:11 AM	SiCl4 pre valve closed
3/16/2011	10:21:11 AM	SiCl4 post valve closed
3/16/2011	10:21:11 AM	Main Vac valve closed
3/16/2011	10:21:11 AM	Bypass valve closed
3/16/2011	10:21:11 AM	Bubbler valve closed
3/16/2011	10:21:11 AM	H2 valve opened
3/16/2011	10:21:11 AM	Helium MFC set to  0.000000
3/16/2011	10:21:11 AM	H2 MFC set to  500.000000
3/16/2011	10:21:11 AM	BCl3 MFC set to  0.000000
3/16/2011	10:21:11 AM	PHl3 MFC set to  0.000000
3/16/2011	10:21:11 AM	SiCl4 MFC set to  0.000000
3/16/2011	10:21:11 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	10:21:11 AM	Tube furnace set to 100
3/16/2011	10:22:32 AM	Helium valve closed
3/16/2011	10:22:32 AM	BCl3 valve closed
3/16/2011	10:22:32 AM	PH3 valve closed
3/16/2011	10:22:32 AM	SiCl4 pre valve closed
3/16/2011	10:22:32 AM	SiCl4 post valve closed
3/16/2011	10:22:32 AM	Main Vac valve closed
3/16/2011	10:22:32 AM	Bypass valve closed
3/16/2011	10:22:32 AM	H2 valve opened
3/16/2011	10:22:32 AM	Bubbler valve opened
3/16/2011	10:22:32 AM	Helium MFC set to  0.000000
3/16/2011	10:22:32 AM	H2 MFC set to  500.000000
3/16/2011	10:22:32 AM	BCl3 MFC set to  0.000000
3/16/2011	10:22:32 AM	PHl3 MFC set to  0.000000
3/16/2011	10:22:32 AM	SiCl4 MFC set to  0.000000
3/16/2011	10:22:32 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	10:22:32 AM	Tube furnace set to 1000
3/16/2011	10:42:32 AM	Helium valve closed
3/16/2011	10:42:32 AM	PH3 valve closed
3/16/2011	10:42:32 AM	Main Vac valve closed
3/16/2011	10:42:32 AM	Bypass valve closed
3/16/2011	10:42:32 AM	H2 valve opened
3/16/2011	10:42:32 AM	BCl3 valve opened
3/16/2011	10:42:32 AM	SiCl4 pre valve opened
3/16/2011	10:42:32 AM	SiCl4 post valve opened
3/16/2011	10:42:32 AM	Bubbler valve opened
3/16/2011	10:42:32 AM	Helium MFC set to  0.000000
3/16/2011	10:42:32 AM	H2 MFC set to  500.000000
3/16/2011	10:42:32 AM	BCl3 MFC set to  3.000000
3/16/2011	10:42:32 AM	PHl3 MFC set to  0.000000
3/16/2011	10:42:32 AM	SiCl4 MFC set to  50.000000
3/16/2011	10:42:32 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	10:42:32 AM	Tube furnace set to 1000
3/16/2011	10:54:32 AM	H2 valve closed
3/16/2011	10:54:32 AM	BCl3 valve closed
3/16/2011	10:54:32 AM	PH3 valve closed
3/16/2011	10:54:32 AM	SiCl4 pre valve closed
3/16/2011	10:54:32 AM	SiCl4 post valve closed
3/16/2011	10:54:32 AM	Main Vac valve closed
3/16/2011	10:54:32 AM	Bypass valve closed
3/16/2011	10:54:33 AM	Helium valve opened
3/16/2011	10:54:33 AM	Bubbler valve opened
3/16/2011	10:54:33 AM	Helium MFC set to  500.000000
3/16/2011	10:54:33 AM	H2 MFC set to  0.000000
3/16/2011	10:54:33 AM	BCl3 MFC set to  0.000000
3/16/2011	10:54:33 AM	PHl3 MFC set to  0.000000
3/16/2011	10:54:33 AM	SiCl4 MFC set to  0.000000
3/16/2011	10:54:33 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	10:54:33 AM	Tube furnace set to 0
3/16/2011	11:14:33 AM	Helium valve closed
3/16/2011	11:14:33 AM	H2 valve closed
3/16/2011	11:14:33 AM	BCl3 valve closed
3/16/2011	11:14:33 AM	PH3 valve closed
3/16/2011	11:14:33 AM	SiCl4 pre valve closed
3/16/2011	11:14:33 AM	SiCl4 post valve closed
3/16/2011	11:14:33 AM	Main Vac valve closed
3/16/2011	11:14:33 AM	Bypass valve closed
3/16/2011	11:14:33 AM	Bubbler valve closed
3/16/2011	11:14:33 AM	Helium MFC set to  0.000000
3/16/2011	11:14:33 AM	H2 MFC set to  0.000000
3/16/2011	11:14:33 AM	BCl3 MFC set to  0.000000
3/16/2011	11:14:33 AM	PHl3 MFC set to  0.000000
3/16/2011	11:14:33 AM	SiCl4 MFC set to  0.000000
3/16/2011	11:14:33 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	11:14:33 AM	Tube furnace set to 0
3/16/2011	11:14:33 AM	Run finished at 11:14 AM
3/16/2011	11:58:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2011	11:58:03 AM	Recipe started at 11:58 AM
3/16/2011	11:58:03 AM	Helium valve closed
3/16/2011	11:58:03 AM	H2 valve closed
3/16/2011	11:58:03 AM	BCl3 valve closed
3/16/2011	11:58:03 AM	PH3 valve closed
3/16/2011	11:58:03 AM	SiCl4 pre valve closed
3/16/2011	11:58:03 AM	SiCl4 post valve closed
3/16/2011	11:58:03 AM	Main Vac valve closed
3/16/2011	11:58:03 AM	Bubbler valve closed
3/16/2011	11:58:03 AM	Bypass valve opened
3/16/2011	11:58:03 AM	Helium MFC set to  0.000000
3/16/2011	11:58:03 AM	H2 MFC set to  0.000000
3/16/2011	11:58:03 AM	BCl3 MFC set to  0.000000
3/16/2011	11:58:03 AM	PHl3 MFC set to  0.000000
3/16/2011	11:58:03 AM	SiCl4 MFC set to  0.000000
3/16/2011	11:58:03 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	11:58:03 AM	Tube furnace set to 0
3/16/2011	11:58:34 AM	Helium valve closed
3/16/2011	11:58:34 AM	H2 valve closed
3/16/2011	11:58:34 AM	BCl3 valve closed
3/16/2011	11:58:34 AM	PH3 valve closed
3/16/2011	11:58:34 AM	SiCl4 pre valve closed
3/16/2011	11:58:34 AM	SiCl4 post valve closed
3/16/2011	11:58:34 AM	Bubbler valve closed
3/16/2011	11:58:34 AM	Main Vac valve opened
3/16/2011	11:58:34 AM	Bypass valve opened
3/16/2011	11:58:34 AM	Helium MFC set to  0.000000
3/16/2011	11:58:34 AM	H2 MFC set to  0.000000
3/16/2011	11:58:34 AM	BCl3 MFC set to  0.000000
3/16/2011	11:58:34 AM	PHl3 MFC set to  0.000000
3/16/2011	11:58:34 AM	SiCl4 MFC set to  0.000000
3/16/2011	11:58:34 AM	Bypass solenoid MFC set to  0.000000
3/16/2011	11:58:34 AM	Tube furnace set to 0
3/16/2011	11:58:34 AM	Run finished at 11:58 AM
3/16/2011	11:58:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2011	12:07:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/16/2011	12:07:15 PM	Recipe started at 12:07 PM
3/16/2011	12:07:15 PM	Helium valve closed
3/16/2011	12:07:15 PM	H2 valve closed
3/16/2011	12:07:15 PM	BCl3 valve closed
3/16/2011	12:07:15 PM	PH3 valve closed
3/16/2011	12:07:15 PM	SiCl4 pre valve closed
3/16/2011	12:07:15 PM	SiCl4 post valve closed
3/16/2011	12:07:15 PM	Main Vac valve closed
3/16/2011	12:07:15 PM	Bubbler valve closed
3/16/2011	12:07:15 PM	Bypass valve opened
3/16/2011	12:07:15 PM	Helium MFC set to  0.000000
3/16/2011	12:07:15 PM	H2 MFC set to  0.000000
3/16/2011	12:07:15 PM	BCl3 MFC set to  0.000000
3/16/2011	12:07:15 PM	PHl3 MFC set to  0.000000
3/16/2011	12:07:15 PM	SiCl4 MFC set to  0.000000
3/16/2011	12:07:15 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:07:16 PM	Tube furnace set to 0
3/16/2011	12:07:16 PM	Helium valve closed
3/16/2011	12:07:16 PM	H2 valve closed
3/16/2011	12:07:16 PM	BCl3 valve closed
3/16/2011	12:07:16 PM	PH3 valve closed
3/16/2011	12:07:16 PM	SiCl4 pre valve closed
3/16/2011	12:07:16 PM	SiCl4 post valve closed
3/16/2011	12:07:16 PM	Bubbler valve closed
3/16/2011	12:07:16 PM	Main Vac valve opened
3/16/2011	12:07:16 PM	Bypass valve opened
3/16/2011	12:07:16 PM	Helium MFC set to  0.000000
3/16/2011	12:07:16 PM	H2 MFC set to  0.000000
3/16/2011	12:07:16 PM	BCl3 MFC set to  0.000000
3/16/2011	12:07:16 PM	PHl3 MFC set to  0.000000
3/16/2011	12:07:16 PM	SiCl4 MFC set to  0.000000
3/16/2011	12:07:16 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:07:16 PM	Tube furnace set to 0
3/16/2011	12:08:16 PM	H2 valve closed
3/16/2011	12:08:16 PM	BCl3 valve closed
3/16/2011	12:08:16 PM	PH3 valve closed
3/16/2011	12:08:16 PM	SiCl4 pre valve closed
3/16/2011	12:08:16 PM	SiCl4 post valve closed
3/16/2011	12:08:16 PM	Bubbler valve closed
3/16/2011	12:08:16 PM	Helium valve opened
3/16/2011	12:08:16 PM	Main Vac valve opened
3/16/2011	12:08:16 PM	Bypass valve opened
3/16/2011	12:08:16 PM	Helium MFC set to  100.000000
3/16/2011	12:08:16 PM	H2 MFC set to  0.000000
3/16/2011	12:08:16 PM	BCl3 MFC set to  0.000000
3/16/2011	12:08:16 PM	PHl3 MFC set to  0.000000
3/16/2011	12:08:16 PM	SiCl4 MFC set to  0.000000
3/16/2011	12:08:16 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:08:16 PM	Tube furnace set to 0
3/16/2011	12:09:16 PM	Helium valve closed
3/16/2011	12:09:16 PM	H2 valve closed
3/16/2011	12:09:16 PM	BCl3 valve closed
3/16/2011	12:09:16 PM	PH3 valve closed
3/16/2011	12:09:16 PM	SiCl4 pre valve closed
3/16/2011	12:09:16 PM	SiCl4 post valve closed
3/16/2011	12:09:16 PM	Bubbler valve closed
3/16/2011	12:09:16 PM	Main Vac valve opened
3/16/2011	12:09:16 PM	Bypass valve opened
3/16/2011	12:09:16 PM	Helium MFC set to  0.000000
3/16/2011	12:09:16 PM	H2 MFC set to  0.000000
3/16/2011	12:09:16 PM	BCl3 MFC set to  0.000000
3/16/2011	12:09:16 PM	PHl3 MFC set to  0.000000
3/16/2011	12:09:16 PM	SiCl4 MFC set to  0.000000
3/16/2011	12:09:16 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:09:16 PM	Tube furnace set to 0
3/16/2011	12:10:16 PM	H2 valve closed
3/16/2011	12:10:16 PM	BCl3 valve closed
3/16/2011	12:10:16 PM	PH3 valve closed
3/16/2011	12:10:16 PM	SiCl4 pre valve closed
3/16/2011	12:10:16 PM	SiCl4 post valve closed
3/16/2011	12:10:16 PM	Bubbler valve closed
3/16/2011	12:10:16 PM	Helium valve opened
3/16/2011	12:10:16 PM	Main Vac valve opened
3/16/2011	12:10:16 PM	Bypass valve opened
3/16/2011	12:10:16 PM	Helium MFC set to  100.000000
3/16/2011	12:10:16 PM	H2 MFC set to  0.000000
3/16/2011	12:10:16 PM	BCl3 MFC set to  0.000000
3/16/2011	12:10:16 PM	PHl3 MFC set to  0.000000
3/16/2011	12:10:16 PM	SiCl4 MFC set to  0.000000
3/16/2011	12:10:16 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:10:17 PM	Tube furnace set to 0
3/16/2011	12:11:17 PM	Helium valve closed
3/16/2011	12:11:17 PM	H2 valve closed
3/16/2011	12:11:17 PM	BCl3 valve closed
3/16/2011	12:11:17 PM	PH3 valve closed
3/16/2011	12:11:17 PM	SiCl4 pre valve closed
3/16/2011	12:11:17 PM	SiCl4 post valve closed
3/16/2011	12:11:17 PM	Bubbler valve closed
3/16/2011	12:11:17 PM	Main Vac valve opened
3/16/2011	12:11:17 PM	Bypass valve opened
3/16/2011	12:11:17 PM	Helium MFC set to  0.000000
3/16/2011	12:11:17 PM	H2 MFC set to  0.000000
3/16/2011	12:11:17 PM	BCl3 MFC set to  0.000000
3/16/2011	12:11:17 PM	PHl3 MFC set to  0.000000
3/16/2011	12:11:17 PM	SiCl4 MFC set to  0.000000
3/16/2011	12:11:17 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:11:17 PM	Tube furnace set to 0
3/16/2011	12:12:17 PM	H2 valve closed
3/16/2011	12:12:17 PM	BCl3 valve closed
3/16/2011	12:12:17 PM	PH3 valve closed
3/16/2011	12:12:17 PM	SiCl4 pre valve closed
3/16/2011	12:12:17 PM	SiCl4 post valve closed
3/16/2011	12:12:17 PM	Bubbler valve closed
3/16/2011	12:12:17 PM	Helium valve opened
3/16/2011	12:12:17 PM	Main Vac valve opened
3/16/2011	12:12:17 PM	Bypass valve opened
3/16/2011	12:12:17 PM	Helium MFC set to  100.000000
3/16/2011	12:12:17 PM	H2 MFC set to  0.000000
3/16/2011	12:12:17 PM	BCl3 MFC set to  0.000000
3/16/2011	12:12:17 PM	PHl3 MFC set to  0.000000
3/16/2011	12:12:17 PM	SiCl4 MFC set to  0.000000
3/16/2011	12:12:17 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:12:17 PM	Tube furnace set to 0
3/16/2011	12:13:17 PM	Helium valve closed
3/16/2011	12:13:17 PM	H2 valve closed
3/16/2011	12:13:17 PM	BCl3 valve closed
3/16/2011	12:13:17 PM	PH3 valve closed
3/16/2011	12:13:17 PM	SiCl4 pre valve closed
3/16/2011	12:13:17 PM	SiCl4 post valve closed
3/16/2011	12:13:17 PM	Bubbler valve closed
3/16/2011	12:13:17 PM	Main Vac valve opened
3/16/2011	12:13:17 PM	Bypass valve opened
3/16/2011	12:13:17 PM	Helium MFC set to  0.000000
3/16/2011	12:13:17 PM	H2 MFC set to  0.000000
3/16/2011	12:13:17 PM	BCl3 MFC set to  0.000000
3/16/2011	12:13:17 PM	PHl3 MFC set to  0.000000
3/16/2011	12:13:17 PM	SiCl4 MFC set to  0.000000
3/16/2011	12:13:17 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:13:17 PM	Tube furnace set to 0
3/16/2011	12:14:17 PM	H2 valve closed
3/16/2011	12:14:17 PM	BCl3 valve closed
3/16/2011	12:14:17 PM	PH3 valve closed
3/16/2011	12:14:17 PM	SiCl4 pre valve closed
3/16/2011	12:14:17 PM	SiCl4 post valve closed
3/16/2011	12:14:17 PM	Bubbler valve closed
3/16/2011	12:14:17 PM	Helium valve opened
3/16/2011	12:14:17 PM	Main Vac valve opened
3/16/2011	12:14:17 PM	Bypass valve opened
3/16/2011	12:14:17 PM	Helium MFC set to  100.000000
3/16/2011	12:14:17 PM	H2 MFC set to  0.000000
3/16/2011	12:14:17 PM	BCl3 MFC set to  0.000000
3/16/2011	12:14:17 PM	PHl3 MFC set to  0.000000
3/16/2011	12:14:17 PM	SiCl4 MFC set to  0.000000
3/16/2011	12:14:17 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:14:17 PM	Tube furnace set to 0
3/16/2011	12:15:17 PM	Helium valve closed
3/16/2011	12:15:17 PM	H2 valve closed
3/16/2011	12:15:17 PM	BCl3 valve closed
3/16/2011	12:15:17 PM	PH3 valve closed
3/16/2011	12:15:17 PM	SiCl4 pre valve closed
3/16/2011	12:15:17 PM	SiCl4 post valve closed
3/16/2011	12:15:17 PM	Bubbler valve closed
3/16/2011	12:15:17 PM	Main Vac valve opened
3/16/2011	12:15:17 PM	Bypass valve opened
3/16/2011	12:15:17 PM	Helium MFC set to  0.000000
3/16/2011	12:15:17 PM	H2 MFC set to  0.000000
3/16/2011	12:15:17 PM	BCl3 MFC set to  0.000000
3/16/2011	12:15:17 PM	PHl3 MFC set to  0.000000
3/16/2011	12:15:17 PM	SiCl4 MFC set to  0.000000
3/16/2011	12:15:17 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:15:18 PM	Tube furnace set to 0
3/16/2011	12:16:18 PM	H2 valve closed
3/16/2011	12:16:18 PM	BCl3 valve closed
3/16/2011	12:16:18 PM	PH3 valve closed
3/16/2011	12:16:18 PM	SiCl4 pre valve closed
3/16/2011	12:16:18 PM	SiCl4 post valve closed
3/16/2011	12:16:18 PM	Bubbler valve closed
3/16/2011	12:16:18 PM	Helium valve opened
3/16/2011	12:16:18 PM	Main Vac valve opened
3/16/2011	12:16:18 PM	Bypass valve opened
3/16/2011	12:16:18 PM	Helium MFC set to  100.000000
3/16/2011	12:16:18 PM	H2 MFC set to  0.000000
3/16/2011	12:16:18 PM	BCl3 MFC set to  0.000000
3/16/2011	12:16:18 PM	PHl3 MFC set to  0.000000
3/16/2011	12:16:18 PM	SiCl4 MFC set to  0.000000
3/16/2011	12:16:18 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:16:18 PM	Tube furnace set to 0
3/16/2011	12:17:18 PM	Helium valve closed
3/16/2011	12:17:18 PM	H2 valve closed
3/16/2011	12:17:18 PM	BCl3 valve closed
3/16/2011	12:17:18 PM	PH3 valve closed
3/16/2011	12:17:18 PM	SiCl4 pre valve closed
3/16/2011	12:17:18 PM	SiCl4 post valve closed
3/16/2011	12:17:18 PM	Bubbler valve closed
3/16/2011	12:17:18 PM	Main Vac valve opened
3/16/2011	12:17:18 PM	Bypass valve opened
3/16/2011	12:17:18 PM	Helium MFC set to  0.000000
3/16/2011	12:17:18 PM	H2 MFC set to  0.000000
3/16/2011	12:17:18 PM	BCl3 MFC set to  0.000000
3/16/2011	12:17:18 PM	PHl3 MFC set to  0.000000
3/16/2011	12:17:18 PM	SiCl4 MFC set to  0.000000
3/16/2011	12:17:18 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:17:18 PM	Tube furnace set to 0
3/16/2011	12:18:18 PM	H2 valve closed
3/16/2011	12:18:18 PM	BCl3 valve closed
3/16/2011	12:18:18 PM	PH3 valve closed
3/16/2011	12:18:18 PM	SiCl4 pre valve closed
3/16/2011	12:18:18 PM	SiCl4 post valve closed
3/16/2011	12:18:18 PM	Bubbler valve closed
3/16/2011	12:18:18 PM	Helium valve opened
3/16/2011	12:18:18 PM	Main Vac valve opened
3/16/2011	12:18:18 PM	Bypass valve opened
3/16/2011	12:18:18 PM	Helium MFC set to  100.000000
3/16/2011	12:18:18 PM	H2 MFC set to  0.000000
3/16/2011	12:18:18 PM	BCl3 MFC set to  0.000000
3/16/2011	12:18:18 PM	PHl3 MFC set to  0.000000
3/16/2011	12:18:18 PM	SiCl4 MFC set to  0.000000
3/16/2011	12:18:18 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:18:18 PM	Tube furnace set to 0
3/16/2011	12:19:18 PM	Helium valve closed
3/16/2011	12:19:18 PM	H2 valve closed
3/16/2011	12:19:18 PM	BCl3 valve closed
3/16/2011	12:19:18 PM	PH3 valve closed
3/16/2011	12:19:18 PM	SiCl4 pre valve closed
3/16/2011	12:19:18 PM	SiCl4 post valve closed
3/16/2011	12:19:18 PM	Bubbler valve closed
3/16/2011	12:19:18 PM	Main Vac valve opened
3/16/2011	12:19:18 PM	Bypass valve opened
3/16/2011	12:19:18 PM	Helium MFC set to  0.000000
3/16/2011	12:19:18 PM	H2 MFC set to  0.000000
3/16/2011	12:19:18 PM	BCl3 MFC set to  0.000000
3/16/2011	12:19:18 PM	PHl3 MFC set to  0.000000
3/16/2011	12:19:18 PM	SiCl4 MFC set to  0.000000
3/16/2011	12:19:18 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:19:18 PM	Tube furnace set to 0
3/16/2011	12:20:18 PM	H2 valve closed
3/16/2011	12:20:18 PM	BCl3 valve closed
3/16/2011	12:20:18 PM	PH3 valve closed
3/16/2011	12:20:18 PM	SiCl4 pre valve closed
3/16/2011	12:20:18 PM	SiCl4 post valve closed
3/16/2011	12:20:18 PM	Bubbler valve closed
3/16/2011	12:20:18 PM	Helium valve opened
3/16/2011	12:20:18 PM	Main Vac valve opened
3/16/2011	12:20:18 PM	Bypass valve opened
3/16/2011	12:20:18 PM	Helium MFC set to  100.000000
3/16/2011	12:20:18 PM	H2 MFC set to  0.000000
3/16/2011	12:20:18 PM	BCl3 MFC set to  0.000000
3/16/2011	12:20:18 PM	PHl3 MFC set to  0.000000
3/16/2011	12:20:18 PM	SiCl4 MFC set to  0.000000
3/16/2011	12:20:18 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:20:19 PM	Tube furnace set to 0
3/16/2011	12:21:19 PM	Helium valve closed
3/16/2011	12:21:19 PM	H2 valve closed
3/16/2011	12:21:19 PM	BCl3 valve closed
3/16/2011	12:21:19 PM	PH3 valve closed
3/16/2011	12:21:19 PM	SiCl4 pre valve closed
3/16/2011	12:21:19 PM	SiCl4 post valve closed
3/16/2011	12:21:19 PM	Bubbler valve closed
3/16/2011	12:21:19 PM	Main Vac valve opened
3/16/2011	12:21:19 PM	Bypass valve opened
3/16/2011	12:21:19 PM	Helium MFC set to  0.000000
3/16/2011	12:21:19 PM	H2 MFC set to  0.000000
3/16/2011	12:21:19 PM	BCl3 MFC set to  0.000000
3/16/2011	12:21:19 PM	PHl3 MFC set to  0.000000
3/16/2011	12:21:19 PM	SiCl4 MFC set to  0.000000
3/16/2011	12:21:19 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:21:19 PM	Tube furnace set to 0
3/16/2011	12:22:19 PM	H2 valve closed
3/16/2011	12:22:19 PM	BCl3 valve closed
3/16/2011	12:22:19 PM	PH3 valve closed
3/16/2011	12:22:19 PM	SiCl4 pre valve closed
3/16/2011	12:22:19 PM	SiCl4 post valve closed
3/16/2011	12:22:19 PM	Bubbler valve closed
3/16/2011	12:22:19 PM	Helium valve opened
3/16/2011	12:22:19 PM	Main Vac valve opened
3/16/2011	12:22:19 PM	Bypass valve opened
3/16/2011	12:22:19 PM	Helium MFC set to  100.000000
3/16/2011	12:22:19 PM	H2 MFC set to  0.000000
3/16/2011	12:22:19 PM	BCl3 MFC set to  0.000000
3/16/2011	12:22:19 PM	PHl3 MFC set to  0.000000
3/16/2011	12:22:19 PM	SiCl4 MFC set to  0.000000
3/16/2011	12:22:19 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:22:19 PM	Tube furnace set to 0
3/16/2011	12:23:19 PM	Helium valve closed
3/16/2011	12:23:19 PM	H2 valve closed
3/16/2011	12:23:19 PM	BCl3 valve closed
3/16/2011	12:23:19 PM	PH3 valve closed
3/16/2011	12:23:19 PM	SiCl4 pre valve closed
3/16/2011	12:23:19 PM	SiCl4 post valve closed
3/16/2011	12:23:19 PM	Bubbler valve closed
3/16/2011	12:23:19 PM	Main Vac valve opened
3/16/2011	12:23:19 PM	Bypass valve opened
3/16/2011	12:23:19 PM	Helium MFC set to  0.000000
3/16/2011	12:23:19 PM	H2 MFC set to  0.000000
3/16/2011	12:23:19 PM	BCl3 MFC set to  0.000000
3/16/2011	12:23:19 PM	PHl3 MFC set to  0.000000
3/16/2011	12:23:19 PM	SiCl4 MFC set to  0.000000
3/16/2011	12:23:19 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:23:19 PM	Tube furnace set to 0
3/16/2011	12:24:19 PM	H2 valve closed
3/16/2011	12:24:19 PM	BCl3 valve closed
3/16/2011	12:24:19 PM	PH3 valve closed
3/16/2011	12:24:19 PM	SiCl4 pre valve closed
3/16/2011	12:24:19 PM	SiCl4 post valve closed
3/16/2011	12:24:19 PM	Bubbler valve closed
3/16/2011	12:24:19 PM	Helium valve opened
3/16/2011	12:24:19 PM	Main Vac valve opened
3/16/2011	12:24:19 PM	Bypass valve opened
3/16/2011	12:24:19 PM	Helium MFC set to  100.000000
3/16/2011	12:24:19 PM	H2 MFC set to  0.000000
3/16/2011	12:24:19 PM	BCl3 MFC set to  0.000000
3/16/2011	12:24:19 PM	PHl3 MFC set to  0.000000
3/16/2011	12:24:19 PM	SiCl4 MFC set to  0.000000
3/16/2011	12:24:19 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:24:19 PM	Tube furnace set to 0
3/16/2011	12:25:19 PM	Helium valve closed
3/16/2011	12:25:19 PM	H2 valve closed
3/16/2011	12:25:19 PM	BCl3 valve closed
3/16/2011	12:25:19 PM	PH3 valve closed
3/16/2011	12:25:19 PM	SiCl4 pre valve closed
3/16/2011	12:25:19 PM	SiCl4 post valve closed
3/16/2011	12:25:19 PM	Bubbler valve closed
3/16/2011	12:25:19 PM	Main Vac valve opened
3/16/2011	12:25:19 PM	Bypass valve opened
3/16/2011	12:25:19 PM	Helium MFC set to  0.000000
3/16/2011	12:25:19 PM	H2 MFC set to  0.000000
3/16/2011	12:25:19 PM	BCl3 MFC set to  0.000000
3/16/2011	12:25:19 PM	PHl3 MFC set to  0.000000
3/16/2011	12:25:19 PM	SiCl4 MFC set to  0.000000
3/16/2011	12:25:19 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:25:20 PM	Tube furnace set to 0
3/16/2011	12:26:20 PM	H2 valve closed
3/16/2011	12:26:20 PM	BCl3 valve closed
3/16/2011	12:26:20 PM	PH3 valve closed
3/16/2011	12:26:20 PM	SiCl4 pre valve closed
3/16/2011	12:26:20 PM	SiCl4 post valve closed
3/16/2011	12:26:20 PM	Bubbler valve closed
3/16/2011	12:26:20 PM	Helium valve opened
3/16/2011	12:26:20 PM	Main Vac valve opened
3/16/2011	12:26:20 PM	Bypass valve opened
3/16/2011	12:26:20 PM	Helium MFC set to  100.000000
3/16/2011	12:26:20 PM	H2 MFC set to  0.000000
3/16/2011	12:26:20 PM	BCl3 MFC set to  0.000000
3/16/2011	12:26:20 PM	PHl3 MFC set to  0.000000
3/16/2011	12:26:20 PM	SiCl4 MFC set to  0.000000
3/16/2011	12:26:20 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:26:20 PM	Tube furnace set to 0
3/16/2011	12:27:20 PM	Helium valve closed
3/16/2011	12:27:20 PM	H2 valve closed
3/16/2011	12:27:20 PM	BCl3 valve closed
3/16/2011	12:27:20 PM	PH3 valve closed
3/16/2011	12:27:20 PM	SiCl4 pre valve closed
3/16/2011	12:27:20 PM	SiCl4 post valve closed
3/16/2011	12:27:20 PM	Bubbler valve closed
3/16/2011	12:27:20 PM	Main Vac valve opened
3/16/2011	12:27:20 PM	Bypass valve opened
3/16/2011	12:27:20 PM	Helium MFC set to  0.000000
3/16/2011	12:27:20 PM	H2 MFC set to  0.000000
3/16/2011	12:27:20 PM	BCl3 MFC set to  0.000000
3/16/2011	12:27:20 PM	PHl3 MFC set to  0.000000
3/16/2011	12:27:20 PM	SiCl4 MFC set to  0.000000
3/16/2011	12:27:20 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	12:27:20 PM	Tube furnace set to 0
3/16/2011	12:27:21 PM	Run finished at 12:27 PM
3/16/2011	12:27:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/16/2011	1:33:00 PM	Bypass valve closed
3/16/2011	1:33:01 PM	Main Vac valve closed
3/16/2011	1:33:19 PM	Main Vac valve opened
3/16/2011	1:33:20 PM	Bypass valve opened
3/16/2011	1:33:48 PM	Recipe started at 1:33 PM
3/16/2011	1:33:48 PM	Helium valve closed
3/16/2011	1:33:48 PM	BCl3 valve closed
3/16/2011	1:33:48 PM	PH3 valve closed
3/16/2011	1:33:48 PM	SiCl4 pre valve closed
3/16/2011	1:33:48 PM	SiCl4 post valve closed
3/16/2011	1:33:48 PM	Main Vac valve closed
3/16/2011	1:33:48 PM	Bypass valve closed
3/16/2011	1:33:48 PM	Bubbler valve closed
3/16/2011	1:33:48 PM	H2 valve opened
3/16/2011	1:33:48 PM	Helium MFC set to  0.000000
3/16/2011	1:33:48 PM	H2 MFC set to  500.000000
3/16/2011	1:33:48 PM	BCl3 MFC set to  0.000000
3/16/2011	1:33:48 PM	PHl3 MFC set to  0.000000
3/16/2011	1:33:48 PM	SiCl4 MFC set to  0.000000
3/16/2011	1:33:48 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	1:33:48 PM	Tube furnace set to 100
3/16/2011	1:35:07 PM	Helium valve closed
3/16/2011	1:35:07 PM	BCl3 valve closed
3/16/2011	1:35:07 PM	PH3 valve closed
3/16/2011	1:35:07 PM	SiCl4 pre valve closed
3/16/2011	1:35:07 PM	SiCl4 post valve closed
3/16/2011	1:35:07 PM	Main Vac valve closed
3/16/2011	1:35:07 PM	Bypass valve closed
3/16/2011	1:35:07 PM	H2 valve opened
3/16/2011	1:35:07 PM	Bubbler valve opened
3/16/2011	1:35:07 PM	Helium MFC set to  0.000000
3/16/2011	1:35:07 PM	H2 MFC set to  500.000000
3/16/2011	1:35:07 PM	BCl3 MFC set to  0.000000
3/16/2011	1:35:07 PM	PHl3 MFC set to  0.000000
3/16/2011	1:35:07 PM	SiCl4 MFC set to  0.000000
3/16/2011	1:35:07 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	1:35:07 PM	Tube furnace set to 1000
3/16/2011	1:55:07 PM	Helium valve closed
3/16/2011	1:55:07 PM	PH3 valve closed
3/16/2011	1:55:07 PM	Main Vac valve closed
3/16/2011	1:55:07 PM	Bypass valve closed
3/16/2011	1:55:07 PM	H2 valve opened
3/16/2011	1:55:07 PM	BCl3 valve opened
3/16/2011	1:55:07 PM	SiCl4 pre valve opened
3/16/2011	1:55:07 PM	SiCl4 post valve opened
3/16/2011	1:55:07 PM	Bubbler valve opened
3/16/2011	1:55:07 PM	Helium MFC set to  0.000000
3/16/2011	1:55:07 PM	H2 MFC set to  500.000000
3/16/2011	1:55:07 PM	BCl3 MFC set to  3.000000
3/16/2011	1:55:07 PM	PHl3 MFC set to  0.000000
3/16/2011	1:55:07 PM	SiCl4 MFC set to  50.000000
3/16/2011	1:55:07 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	1:55:07 PM	Tube furnace set to 1000
3/16/2011	2:07:07 PM	H2 valve closed
3/16/2011	2:07:07 PM	BCl3 valve closed
3/16/2011	2:07:07 PM	PH3 valve closed
3/16/2011	2:07:07 PM	SiCl4 pre valve closed
3/16/2011	2:07:07 PM	SiCl4 post valve closed
3/16/2011	2:07:07 PM	Main Vac valve closed
3/16/2011	2:07:07 PM	Bypass valve closed
3/16/2011	2:07:07 PM	Helium valve opened
3/16/2011	2:07:07 PM	Bubbler valve opened
3/16/2011	2:07:07 PM	Helium MFC set to  500.000000
3/16/2011	2:07:07 PM	H2 MFC set to  0.000000
3/16/2011	2:07:07 PM	BCl3 MFC set to  0.000000
3/16/2011	2:07:07 PM	PHl3 MFC set to  0.000000
3/16/2011	2:07:07 PM	SiCl4 MFC set to  0.000000
3/16/2011	2:07:07 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:07:07 PM	Tube furnace set to 0
3/16/2011	2:27:07 PM	Helium valve closed
3/16/2011	2:27:07 PM	H2 valve closed
3/16/2011	2:27:07 PM	BCl3 valve closed
3/16/2011	2:27:07 PM	PH3 valve closed
3/16/2011	2:27:07 PM	SiCl4 pre valve closed
3/16/2011	2:27:07 PM	SiCl4 post valve closed
3/16/2011	2:27:07 PM	Main Vac valve closed
3/16/2011	2:27:07 PM	Bypass valve closed
3/16/2011	2:27:07 PM	Bubbler valve closed
3/16/2011	2:27:07 PM	Helium MFC set to  0.000000
3/16/2011	2:27:07 PM	H2 MFC set to  0.000000
3/16/2011	2:27:07 PM	BCl3 MFC set to  0.000000
3/16/2011	2:27:07 PM	PHl3 MFC set to  0.000000
3/16/2011	2:27:07 PM	SiCl4 MFC set to  0.000000
3/16/2011	2:27:07 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	2:27:07 PM	Tube furnace set to 0
3/16/2011	2:27:08 PM	Run finished at 2:27 PM
3/16/2011	3:03:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2011	3:03:14 PM	Recipe started at 3:03 PM
3/16/2011	3:03:14 PM	Helium valve closed
3/16/2011	3:03:14 PM	H2 valve closed
3/16/2011	3:03:14 PM	BCl3 valve closed
3/16/2011	3:03:14 PM	PH3 valve closed
3/16/2011	3:03:14 PM	SiCl4 pre valve closed
3/16/2011	3:03:14 PM	SiCl4 post valve closed
3/16/2011	3:03:14 PM	Main Vac valve closed
3/16/2011	3:03:14 PM	Bubbler valve closed
3/16/2011	3:03:14 PM	Bypass valve opened
3/16/2011	3:03:14 PM	Helium MFC set to  0.000000
3/16/2011	3:03:14 PM	H2 MFC set to  0.000000
3/16/2011	3:03:14 PM	BCl3 MFC set to  0.000000
3/16/2011	3:03:14 PM	PHl3 MFC set to  0.000000
3/16/2011	3:03:14 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:03:14 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:03:15 PM	Tube furnace set to 0
3/16/2011	3:03:46 PM	Helium valve closed
3/16/2011	3:03:46 PM	H2 valve closed
3/16/2011	3:03:46 PM	BCl3 valve closed
3/16/2011	3:03:46 PM	PH3 valve closed
3/16/2011	3:03:46 PM	SiCl4 pre valve closed
3/16/2011	3:03:46 PM	SiCl4 post valve closed
3/16/2011	3:03:46 PM	Bubbler valve closed
3/16/2011	3:03:46 PM	Main Vac valve opened
3/16/2011	3:03:46 PM	Bypass valve opened
3/16/2011	3:03:46 PM	Helium MFC set to  0.000000
3/16/2011	3:03:46 PM	H2 MFC set to  0.000000
3/16/2011	3:03:46 PM	BCl3 MFC set to  0.000000
3/16/2011	3:03:46 PM	PHl3 MFC set to  0.000000
3/16/2011	3:03:46 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:03:46 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:03:46 PM	Tube furnace set to 0
3/16/2011	3:03:47 PM	Run finished at 3:03 PM
3/16/2011	3:03:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2011	3:15:10 PM	Bypass valve closed
3/16/2011	3:15:10 PM	Main Vac valve closed
3/16/2011	3:15:25 PM	Main Vac valve opened
3/16/2011	3:15:25 PM	Bypass valve opened
3/16/2011	3:16:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/16/2011	3:16:28 PM	Recipe started at 3:16 PM
3/16/2011	3:16:28 PM	Helium valve closed
3/16/2011	3:16:28 PM	H2 valve closed
3/16/2011	3:16:28 PM	BCl3 valve closed
3/16/2011	3:16:28 PM	PH3 valve closed
3/16/2011	3:16:28 PM	SiCl4 pre valve closed
3/16/2011	3:16:28 PM	SiCl4 post valve closed
3/16/2011	3:16:28 PM	Main Vac valve closed
3/16/2011	3:16:28 PM	Bubbler valve closed
3/16/2011	3:16:28 PM	Bypass valve opened
3/16/2011	3:16:28 PM	Helium MFC set to  0.000000
3/16/2011	3:16:28 PM	H2 MFC set to  0.000000
3/16/2011	3:16:28 PM	BCl3 MFC set to  0.000000
3/16/2011	3:16:28 PM	PHl3 MFC set to  0.000000
3/16/2011	3:16:28 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:16:28 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:16:29 PM	Tube furnace set to 0
3/16/2011	3:16:29 PM	Helium valve closed
3/16/2011	3:16:29 PM	H2 valve closed
3/16/2011	3:16:29 PM	BCl3 valve closed
3/16/2011	3:16:29 PM	PH3 valve closed
3/16/2011	3:16:29 PM	SiCl4 pre valve closed
3/16/2011	3:16:29 PM	SiCl4 post valve closed
3/16/2011	3:16:29 PM	Bubbler valve closed
3/16/2011	3:16:29 PM	Main Vac valve opened
3/16/2011	3:16:29 PM	Bypass valve opened
3/16/2011	3:16:29 PM	Helium MFC set to  0.000000
3/16/2011	3:16:29 PM	H2 MFC set to  0.000000
3/16/2011	3:16:29 PM	BCl3 MFC set to  0.000000
3/16/2011	3:16:29 PM	PHl3 MFC set to  0.000000
3/16/2011	3:16:29 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:16:29 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:16:29 PM	Tube furnace set to 0
3/16/2011	3:17:29 PM	H2 valve closed
3/16/2011	3:17:29 PM	BCl3 valve closed
3/16/2011	3:17:29 PM	PH3 valve closed
3/16/2011	3:17:29 PM	SiCl4 pre valve closed
3/16/2011	3:17:29 PM	SiCl4 post valve closed
3/16/2011	3:17:29 PM	Bubbler valve closed
3/16/2011	3:17:29 PM	Helium valve opened
3/16/2011	3:17:29 PM	Main Vac valve opened
3/16/2011	3:17:29 PM	Bypass valve opened
3/16/2011	3:17:29 PM	Helium MFC set to  100.000000
3/16/2011	3:17:29 PM	H2 MFC set to  0.000000
3/16/2011	3:17:29 PM	BCl3 MFC set to  0.000000
3/16/2011	3:17:29 PM	PHl3 MFC set to  0.000000
3/16/2011	3:17:29 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:17:29 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:17:29 PM	Tube furnace set to 0
3/16/2011	3:18:29 PM	Helium valve closed
3/16/2011	3:18:29 PM	H2 valve closed
3/16/2011	3:18:29 PM	BCl3 valve closed
3/16/2011	3:18:29 PM	PH3 valve closed
3/16/2011	3:18:29 PM	SiCl4 pre valve closed
3/16/2011	3:18:29 PM	SiCl4 post valve closed
3/16/2011	3:18:29 PM	Bubbler valve closed
3/16/2011	3:18:29 PM	Main Vac valve opened
3/16/2011	3:18:29 PM	Bypass valve opened
3/16/2011	3:18:29 PM	Helium MFC set to  0.000000
3/16/2011	3:18:29 PM	H2 MFC set to  0.000000
3/16/2011	3:18:29 PM	BCl3 MFC set to  0.000000
3/16/2011	3:18:29 PM	PHl3 MFC set to  0.000000
3/16/2011	3:18:29 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:18:29 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:18:29 PM	Tube furnace set to 0
3/16/2011	3:19:29 PM	H2 valve closed
3/16/2011	3:19:29 PM	BCl3 valve closed
3/16/2011	3:19:29 PM	PH3 valve closed
3/16/2011	3:19:29 PM	SiCl4 pre valve closed
3/16/2011	3:19:29 PM	SiCl4 post valve closed
3/16/2011	3:19:29 PM	Bubbler valve closed
3/16/2011	3:19:29 PM	Helium valve opened
3/16/2011	3:19:29 PM	Main Vac valve opened
3/16/2011	3:19:29 PM	Bypass valve opened
3/16/2011	3:19:29 PM	Helium MFC set to  100.000000
3/16/2011	3:19:29 PM	H2 MFC set to  0.000000
3/16/2011	3:19:29 PM	BCl3 MFC set to  0.000000
3/16/2011	3:19:29 PM	PHl3 MFC set to  0.000000
3/16/2011	3:19:29 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:19:29 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:19:30 PM	Tube furnace set to 0
3/16/2011	3:20:30 PM	Helium valve closed
3/16/2011	3:20:30 PM	H2 valve closed
3/16/2011	3:20:30 PM	BCl3 valve closed
3/16/2011	3:20:30 PM	PH3 valve closed
3/16/2011	3:20:30 PM	SiCl4 pre valve closed
3/16/2011	3:20:30 PM	SiCl4 post valve closed
3/16/2011	3:20:30 PM	Bubbler valve closed
3/16/2011	3:20:30 PM	Main Vac valve opened
3/16/2011	3:20:30 PM	Bypass valve opened
3/16/2011	3:20:30 PM	Helium MFC set to  0.000000
3/16/2011	3:20:30 PM	H2 MFC set to  0.000000
3/16/2011	3:20:30 PM	BCl3 MFC set to  0.000000
3/16/2011	3:20:30 PM	PHl3 MFC set to  0.000000
3/16/2011	3:20:30 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:20:30 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:20:30 PM	Tube furnace set to 0
3/16/2011	3:21:30 PM	H2 valve closed
3/16/2011	3:21:30 PM	BCl3 valve closed
3/16/2011	3:21:30 PM	PH3 valve closed
3/16/2011	3:21:30 PM	SiCl4 pre valve closed
3/16/2011	3:21:30 PM	SiCl4 post valve closed
3/16/2011	3:21:30 PM	Bubbler valve closed
3/16/2011	3:21:30 PM	Helium valve opened
3/16/2011	3:21:30 PM	Main Vac valve opened
3/16/2011	3:21:30 PM	Bypass valve opened
3/16/2011	3:21:30 PM	Helium MFC set to  100.000000
3/16/2011	3:21:30 PM	H2 MFC set to  0.000000
3/16/2011	3:21:30 PM	BCl3 MFC set to  0.000000
3/16/2011	3:21:30 PM	PHl3 MFC set to  0.000000
3/16/2011	3:21:30 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:21:30 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:21:30 PM	Tube furnace set to 0
3/16/2011	3:22:30 PM	Helium valve closed
3/16/2011	3:22:30 PM	H2 valve closed
3/16/2011	3:22:30 PM	BCl3 valve closed
3/16/2011	3:22:30 PM	PH3 valve closed
3/16/2011	3:22:30 PM	SiCl4 pre valve closed
3/16/2011	3:22:30 PM	SiCl4 post valve closed
3/16/2011	3:22:30 PM	Bubbler valve closed
3/16/2011	3:22:30 PM	Main Vac valve opened
3/16/2011	3:22:30 PM	Bypass valve opened
3/16/2011	3:22:30 PM	Helium MFC set to  0.000000
3/16/2011	3:22:30 PM	H2 MFC set to  0.000000
3/16/2011	3:22:30 PM	BCl3 MFC set to  0.000000
3/16/2011	3:22:30 PM	PHl3 MFC set to  0.000000
3/16/2011	3:22:30 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:22:30 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:22:30 PM	Tube furnace set to 0
3/16/2011	3:23:30 PM	H2 valve closed
3/16/2011	3:23:30 PM	BCl3 valve closed
3/16/2011	3:23:30 PM	PH3 valve closed
3/16/2011	3:23:30 PM	SiCl4 pre valve closed
3/16/2011	3:23:30 PM	SiCl4 post valve closed
3/16/2011	3:23:30 PM	Bubbler valve closed
3/16/2011	3:23:30 PM	Helium valve opened
3/16/2011	3:23:30 PM	Main Vac valve opened
3/16/2011	3:23:30 PM	Bypass valve opened
3/16/2011	3:23:30 PM	Helium MFC set to  100.000000
3/16/2011	3:23:30 PM	H2 MFC set to  0.000000
3/16/2011	3:23:30 PM	BCl3 MFC set to  0.000000
3/16/2011	3:23:30 PM	PHl3 MFC set to  0.000000
3/16/2011	3:23:30 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:23:30 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:23:30 PM	Tube furnace set to 0
3/16/2011	3:24:30 PM	Helium valve closed
3/16/2011	3:24:30 PM	H2 valve closed
3/16/2011	3:24:30 PM	BCl3 valve closed
3/16/2011	3:24:30 PM	PH3 valve closed
3/16/2011	3:24:30 PM	SiCl4 pre valve closed
3/16/2011	3:24:30 PM	SiCl4 post valve closed
3/16/2011	3:24:30 PM	Bubbler valve closed
3/16/2011	3:24:30 PM	Main Vac valve opened
3/16/2011	3:24:30 PM	Bypass valve opened
3/16/2011	3:24:30 PM	Helium MFC set to  0.000000
3/16/2011	3:24:30 PM	H2 MFC set to  0.000000
3/16/2011	3:24:30 PM	BCl3 MFC set to  0.000000
3/16/2011	3:24:30 PM	PHl3 MFC set to  0.000000
3/16/2011	3:24:30 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:24:30 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:24:31 PM	Tube furnace set to 0
3/16/2011	3:25:31 PM	H2 valve closed
3/16/2011	3:25:31 PM	BCl3 valve closed
3/16/2011	3:25:31 PM	PH3 valve closed
3/16/2011	3:25:31 PM	SiCl4 pre valve closed
3/16/2011	3:25:31 PM	SiCl4 post valve closed
3/16/2011	3:25:31 PM	Bubbler valve closed
3/16/2011	3:25:31 PM	Helium valve opened
3/16/2011	3:25:31 PM	Main Vac valve opened
3/16/2011	3:25:31 PM	Bypass valve opened
3/16/2011	3:25:31 PM	Helium MFC set to  100.000000
3/16/2011	3:25:31 PM	H2 MFC set to  0.000000
3/16/2011	3:25:31 PM	BCl3 MFC set to  0.000000
3/16/2011	3:25:31 PM	PHl3 MFC set to  0.000000
3/16/2011	3:25:31 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:25:31 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:25:31 PM	Tube furnace set to 0
3/16/2011	3:26:31 PM	Helium valve closed
3/16/2011	3:26:31 PM	H2 valve closed
3/16/2011	3:26:31 PM	BCl3 valve closed
3/16/2011	3:26:31 PM	PH3 valve closed
3/16/2011	3:26:31 PM	SiCl4 pre valve closed
3/16/2011	3:26:31 PM	SiCl4 post valve closed
3/16/2011	3:26:31 PM	Bubbler valve closed
3/16/2011	3:26:31 PM	Main Vac valve opened
3/16/2011	3:26:31 PM	Bypass valve opened
3/16/2011	3:26:31 PM	Helium MFC set to  0.000000
3/16/2011	3:26:31 PM	H2 MFC set to  0.000000
3/16/2011	3:26:31 PM	BCl3 MFC set to  0.000000
3/16/2011	3:26:31 PM	PHl3 MFC set to  0.000000
3/16/2011	3:26:31 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:26:31 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:26:31 PM	Tube furnace set to 0
3/16/2011	3:27:31 PM	H2 valve closed
3/16/2011	3:27:31 PM	BCl3 valve closed
3/16/2011	3:27:31 PM	PH3 valve closed
3/16/2011	3:27:31 PM	SiCl4 pre valve closed
3/16/2011	3:27:31 PM	SiCl4 post valve closed
3/16/2011	3:27:31 PM	Bubbler valve closed
3/16/2011	3:27:31 PM	Helium valve opened
3/16/2011	3:27:31 PM	Main Vac valve opened
3/16/2011	3:27:31 PM	Bypass valve opened
3/16/2011	3:27:31 PM	Helium MFC set to  100.000000
3/16/2011	3:27:31 PM	H2 MFC set to  0.000000
3/16/2011	3:27:31 PM	BCl3 MFC set to  0.000000
3/16/2011	3:27:31 PM	PHl3 MFC set to  0.000000
3/16/2011	3:27:31 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:27:31 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:27:31 PM	Tube furnace set to 0
3/16/2011	3:28:31 PM	Helium valve closed
3/16/2011	3:28:31 PM	H2 valve closed
3/16/2011	3:28:31 PM	BCl3 valve closed
3/16/2011	3:28:31 PM	PH3 valve closed
3/16/2011	3:28:31 PM	SiCl4 pre valve closed
3/16/2011	3:28:31 PM	SiCl4 post valve closed
3/16/2011	3:28:31 PM	Bubbler valve closed
3/16/2011	3:28:31 PM	Main Vac valve opened
3/16/2011	3:28:31 PM	Bypass valve opened
3/16/2011	3:28:31 PM	Helium MFC set to  0.000000
3/16/2011	3:28:31 PM	H2 MFC set to  0.000000
3/16/2011	3:28:31 PM	BCl3 MFC set to  0.000000
3/16/2011	3:28:31 PM	PHl3 MFC set to  0.000000
3/16/2011	3:28:31 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:28:31 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:28:31 PM	Tube furnace set to 0
3/16/2011	3:29:31 PM	H2 valve closed
3/16/2011	3:29:31 PM	BCl3 valve closed
3/16/2011	3:29:31 PM	PH3 valve closed
3/16/2011	3:29:31 PM	SiCl4 pre valve closed
3/16/2011	3:29:31 PM	SiCl4 post valve closed
3/16/2011	3:29:31 PM	Bubbler valve closed
3/16/2011	3:29:31 PM	Helium valve opened
3/16/2011	3:29:31 PM	Main Vac valve opened
3/16/2011	3:29:31 PM	Bypass valve opened
3/16/2011	3:29:31 PM	Helium MFC set to  100.000000
3/16/2011	3:29:31 PM	H2 MFC set to  0.000000
3/16/2011	3:29:31 PM	BCl3 MFC set to  0.000000
3/16/2011	3:29:31 PM	PHl3 MFC set to  0.000000
3/16/2011	3:29:31 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:29:31 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:29:32 PM	Tube furnace set to 0
3/16/2011	3:30:32 PM	Helium valve closed
3/16/2011	3:30:32 PM	H2 valve closed
3/16/2011	3:30:32 PM	BCl3 valve closed
3/16/2011	3:30:32 PM	PH3 valve closed
3/16/2011	3:30:32 PM	SiCl4 pre valve closed
3/16/2011	3:30:32 PM	SiCl4 post valve closed
3/16/2011	3:30:32 PM	Bubbler valve closed
3/16/2011	3:30:32 PM	Main Vac valve opened
3/16/2011	3:30:32 PM	Bypass valve opened
3/16/2011	3:30:32 PM	Helium MFC set to  0.000000
3/16/2011	3:30:32 PM	H2 MFC set to  0.000000
3/16/2011	3:30:32 PM	BCl3 MFC set to  0.000000
3/16/2011	3:30:32 PM	PHl3 MFC set to  0.000000
3/16/2011	3:30:32 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:30:32 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:30:32 PM	Tube furnace set to 0
3/16/2011	3:31:32 PM	H2 valve closed
3/16/2011	3:31:32 PM	BCl3 valve closed
3/16/2011	3:31:32 PM	PH3 valve closed
3/16/2011	3:31:32 PM	SiCl4 pre valve closed
3/16/2011	3:31:32 PM	SiCl4 post valve closed
3/16/2011	3:31:32 PM	Bubbler valve closed
3/16/2011	3:31:32 PM	Helium valve opened
3/16/2011	3:31:32 PM	Main Vac valve opened
3/16/2011	3:31:32 PM	Bypass valve opened
3/16/2011	3:31:32 PM	Helium MFC set to  100.000000
3/16/2011	3:31:32 PM	H2 MFC set to  0.000000
3/16/2011	3:31:32 PM	BCl3 MFC set to  0.000000
3/16/2011	3:31:32 PM	PHl3 MFC set to  0.000000
3/16/2011	3:31:32 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:31:32 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:31:32 PM	Tube furnace set to 0
3/16/2011	3:32:32 PM	Helium valve closed
3/16/2011	3:32:32 PM	H2 valve closed
3/16/2011	3:32:32 PM	BCl3 valve closed
3/16/2011	3:32:32 PM	PH3 valve closed
3/16/2011	3:32:32 PM	SiCl4 pre valve closed
3/16/2011	3:32:32 PM	SiCl4 post valve closed
3/16/2011	3:32:32 PM	Bubbler valve closed
3/16/2011	3:32:32 PM	Main Vac valve opened
3/16/2011	3:32:32 PM	Bypass valve opened
3/16/2011	3:32:32 PM	Helium MFC set to  0.000000
3/16/2011	3:32:32 PM	H2 MFC set to  0.000000
3/16/2011	3:32:32 PM	BCl3 MFC set to  0.000000
3/16/2011	3:32:32 PM	PHl3 MFC set to  0.000000
3/16/2011	3:32:32 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:32:32 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:32:32 PM	Tube furnace set to 0
3/16/2011	3:33:32 PM	H2 valve closed
3/16/2011	3:33:32 PM	BCl3 valve closed
3/16/2011	3:33:32 PM	PH3 valve closed
3/16/2011	3:33:32 PM	SiCl4 pre valve closed
3/16/2011	3:33:32 PM	SiCl4 post valve closed
3/16/2011	3:33:32 PM	Bubbler valve closed
3/16/2011	3:33:32 PM	Helium valve opened
3/16/2011	3:33:32 PM	Main Vac valve opened
3/16/2011	3:33:32 PM	Bypass valve opened
3/16/2011	3:33:32 PM	Helium MFC set to  100.000000
3/16/2011	3:33:32 PM	H2 MFC set to  0.000000
3/16/2011	3:33:32 PM	BCl3 MFC set to  0.000000
3/16/2011	3:33:32 PM	PHl3 MFC set to  0.000000
3/16/2011	3:33:32 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:33:32 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:33:32 PM	Tube furnace set to 0
3/16/2011	3:34:32 PM	Helium valve closed
3/16/2011	3:34:32 PM	H2 valve closed
3/16/2011	3:34:32 PM	BCl3 valve closed
3/16/2011	3:34:32 PM	PH3 valve closed
3/16/2011	3:34:32 PM	SiCl4 pre valve closed
3/16/2011	3:34:32 PM	SiCl4 post valve closed
3/16/2011	3:34:32 PM	Bubbler valve closed
3/16/2011	3:34:32 PM	Main Vac valve opened
3/16/2011	3:34:32 PM	Bypass valve opened
3/16/2011	3:34:32 PM	Helium MFC set to  0.000000
3/16/2011	3:34:32 PM	H2 MFC set to  0.000000
3/16/2011	3:34:32 PM	BCl3 MFC set to  0.000000
3/16/2011	3:34:32 PM	PHl3 MFC set to  0.000000
3/16/2011	3:34:32 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:34:32 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:34:32 PM	Tube furnace set to 0
3/16/2011	3:35:33 PM	H2 valve closed
3/16/2011	3:35:33 PM	BCl3 valve closed
3/16/2011	3:35:33 PM	PH3 valve closed
3/16/2011	3:35:33 PM	SiCl4 pre valve closed
3/16/2011	3:35:33 PM	SiCl4 post valve closed
3/16/2011	3:35:33 PM	Bubbler valve closed
3/16/2011	3:35:33 PM	Helium valve opened
3/16/2011	3:35:33 PM	Main Vac valve opened
3/16/2011	3:35:33 PM	Bypass valve opened
3/16/2011	3:35:33 PM	Helium MFC set to  100.000000
3/16/2011	3:35:33 PM	H2 MFC set to  0.000000
3/16/2011	3:35:33 PM	BCl3 MFC set to  0.000000
3/16/2011	3:35:33 PM	PHl3 MFC set to  0.000000
3/16/2011	3:35:33 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:35:33 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:35:33 PM	Tube furnace set to 0
3/16/2011	3:36:33 PM	Helium valve closed
3/16/2011	3:36:33 PM	H2 valve closed
3/16/2011	3:36:33 PM	BCl3 valve closed
3/16/2011	3:36:33 PM	PH3 valve closed
3/16/2011	3:36:33 PM	SiCl4 pre valve closed
3/16/2011	3:36:33 PM	SiCl4 post valve closed
3/16/2011	3:36:33 PM	Bubbler valve closed
3/16/2011	3:36:33 PM	Main Vac valve opened
3/16/2011	3:36:33 PM	Bypass valve opened
3/16/2011	3:36:33 PM	Helium MFC set to  0.000000
3/16/2011	3:36:33 PM	H2 MFC set to  0.000000
3/16/2011	3:36:33 PM	BCl3 MFC set to  0.000000
3/16/2011	3:36:33 PM	PHl3 MFC set to  0.000000
3/16/2011	3:36:33 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:36:33 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:36:33 PM	Tube furnace set to 0
3/16/2011	3:36:34 PM	Run finished at 3:36 PM
3/16/2011	3:36:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/16/2011	3:44:11 PM	Bypass valve closed
3/16/2011	3:44:12 PM	Main Vac valve closed
3/16/2011	3:44:32 PM	Bypass valve opened
3/16/2011	3:44:32 PM	Main Vac valve opened
3/16/2011	3:44:37 PM	Helium MFC set to  100.000000
3/16/2011	3:44:39 PM	Helium valve opened
3/16/2011	3:44:46 PM	Helium valve closed
3/16/2011	3:44:49 PM	Helium MFC set to  0.000000
3/16/2011	3:50:17 PM	Recipe started at 3:50 PM
3/16/2011	3:50:18 PM	Helium valve closed
3/16/2011	3:50:18 PM	BCl3 valve closed
3/16/2011	3:50:18 PM	PH3 valve closed
3/16/2011	3:50:18 PM	SiCl4 pre valve closed
3/16/2011	3:50:18 PM	SiCl4 post valve closed
3/16/2011	3:50:18 PM	Main Vac valve closed
3/16/2011	3:50:18 PM	Bypass valve closed
3/16/2011	3:50:18 PM	Bubbler valve closed
3/16/2011	3:50:18 PM	H2 valve opened
3/16/2011	3:50:18 PM	Helium MFC set to  0.000000
3/16/2011	3:50:18 PM	H2 MFC set to  500.000000
3/16/2011	3:50:18 PM	BCl3 MFC set to  0.000000
3/16/2011	3:50:18 PM	PHl3 MFC set to  0.000000
3/16/2011	3:50:18 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:50:18 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:50:18 PM	Tube furnace set to 100
3/16/2011	3:51:36 PM	Helium valve closed
3/16/2011	3:51:36 PM	BCl3 valve closed
3/16/2011	3:51:36 PM	PH3 valve closed
3/16/2011	3:51:36 PM	SiCl4 pre valve closed
3/16/2011	3:51:36 PM	SiCl4 post valve closed
3/16/2011	3:51:36 PM	Main Vac valve closed
3/16/2011	3:51:36 PM	Bypass valve closed
3/16/2011	3:51:36 PM	H2 valve opened
3/16/2011	3:51:36 PM	Bubbler valve opened
3/16/2011	3:51:36 PM	Helium MFC set to  0.000000
3/16/2011	3:51:36 PM	H2 MFC set to  500.000000
3/16/2011	3:51:36 PM	BCl3 MFC set to  0.000000
3/16/2011	3:51:36 PM	PHl3 MFC set to  0.000000
3/16/2011	3:51:36 PM	SiCl4 MFC set to  0.000000
3/16/2011	3:51:36 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	3:51:36 PM	Tube furnace set to 1000
3/16/2011	4:11:36 PM	Helium valve closed
3/16/2011	4:11:36 PM	PH3 valve closed
3/16/2011	4:11:36 PM	Main Vac valve closed
3/16/2011	4:11:36 PM	Bypass valve closed
3/16/2011	4:11:36 PM	H2 valve opened
3/16/2011	4:11:36 PM	BCl3 valve opened
3/16/2011	4:11:36 PM	SiCl4 pre valve opened
3/16/2011	4:11:36 PM	SiCl4 post valve opened
3/16/2011	4:11:36 PM	Bubbler valve opened
3/16/2011	4:11:36 PM	Helium MFC set to  0.000000
3/16/2011	4:11:36 PM	H2 MFC set to  500.000000
3/16/2011	4:11:36 PM	BCl3 MFC set to  3.000000
3/16/2011	4:11:36 PM	PHl3 MFC set to  0.000000
3/16/2011	4:11:36 PM	SiCl4 MFC set to  50.000000
3/16/2011	4:11:36 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	4:11:36 PM	Tube furnace set to 1000
3/16/2011	4:23:36 PM	H2 valve closed
3/16/2011	4:23:36 PM	BCl3 valve closed
3/16/2011	4:23:36 PM	PH3 valve closed
3/16/2011	4:23:36 PM	SiCl4 pre valve closed
3/16/2011	4:23:36 PM	SiCl4 post valve closed
3/16/2011	4:23:36 PM	Main Vac valve closed
3/16/2011	4:23:36 PM	Bypass valve closed
3/16/2011	4:23:36 PM	Helium valve opened
3/16/2011	4:23:36 PM	Bubbler valve opened
3/16/2011	4:23:36 PM	Helium MFC set to  500.000000
3/16/2011	4:23:36 PM	H2 MFC set to  0.000000
3/16/2011	4:23:36 PM	BCl3 MFC set to  0.000000
3/16/2011	4:23:36 PM	PHl3 MFC set to  0.000000
3/16/2011	4:23:36 PM	SiCl4 MFC set to  0.000000
3/16/2011	4:23:36 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	4:23:36 PM	Tube furnace set to 0
3/16/2011	4:43:36 PM	Helium valve closed
3/16/2011	4:43:36 PM	H2 valve closed
3/16/2011	4:43:36 PM	BCl3 valve closed
3/16/2011	4:43:36 PM	PH3 valve closed
3/16/2011	4:43:36 PM	SiCl4 pre valve closed
3/16/2011	4:43:36 PM	SiCl4 post valve closed
3/16/2011	4:43:36 PM	Main Vac valve closed
3/16/2011	4:43:36 PM	Bypass valve closed
3/16/2011	4:43:36 PM	Bubbler valve closed
3/16/2011	4:43:36 PM	Helium MFC set to  0.000000
3/16/2011	4:43:36 PM	H2 MFC set to  0.000000
3/16/2011	4:43:36 PM	BCl3 MFC set to  0.000000
3/16/2011	4:43:36 PM	PHl3 MFC set to  0.000000
3/16/2011	4:43:36 PM	SiCl4 MFC set to  0.000000
3/16/2011	4:43:36 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	4:43:37 PM	Tube furnace set to 0
3/16/2011	4:43:37 PM	Run finished at 4:43 PM
3/16/2011	4:53:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2011	4:53:48 PM	Recipe started at 4:53 PM
3/16/2011	4:53:48 PM	Helium valve closed
3/16/2011	4:53:48 PM	H2 valve closed
3/16/2011	4:53:48 PM	BCl3 valve closed
3/16/2011	4:53:48 PM	PH3 valve closed
3/16/2011	4:53:48 PM	SiCl4 pre valve closed
3/16/2011	4:53:48 PM	SiCl4 post valve closed
3/16/2011	4:53:48 PM	Main Vac valve closed
3/16/2011	4:53:48 PM	Bubbler valve closed
3/16/2011	4:53:48 PM	Bypass valve opened
3/16/2011	4:53:48 PM	Helium MFC set to  0.000000
3/16/2011	4:53:48 PM	H2 MFC set to  0.000000
3/16/2011	4:53:48 PM	BCl3 MFC set to  0.000000
3/16/2011	4:53:48 PM	PHl3 MFC set to  0.000000
3/16/2011	4:53:48 PM	SiCl4 MFC set to  0.000000
3/16/2011	4:53:48 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	4:53:48 PM	Tube furnace set to 0
3/16/2011	4:54:19 PM	Helium valve closed
3/16/2011	4:54:19 PM	H2 valve closed
3/16/2011	4:54:19 PM	BCl3 valve closed
3/16/2011	4:54:19 PM	PH3 valve closed
3/16/2011	4:54:19 PM	SiCl4 pre valve closed
3/16/2011	4:54:19 PM	SiCl4 post valve closed
3/16/2011	4:54:19 PM	Bubbler valve closed
3/16/2011	4:54:19 PM	Main Vac valve opened
3/16/2011	4:54:19 PM	Bypass valve opened
3/16/2011	4:54:19 PM	Helium MFC set to  0.000000
3/16/2011	4:54:19 PM	H2 MFC set to  0.000000
3/16/2011	4:54:19 PM	BCl3 MFC set to  0.000000
3/16/2011	4:54:19 PM	PHl3 MFC set to  0.000000
3/16/2011	4:54:19 PM	SiCl4 MFC set to  0.000000
3/16/2011	4:54:19 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	4:54:19 PM	Tube furnace set to 0
3/16/2011	4:54:19 PM	Run finished at 4:54 PM
3/16/2011	4:54:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2011	4:55:24 PM	Bypass valve closed
3/16/2011	4:55:24 PM	Main Vac valve closed
3/16/2011	4:55:32 PM	Bypass valve opened
3/16/2011	4:55:32 PM	Main Vac valve opened
3/16/2011	4:55:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/16/2011	4:55:51 PM	Recipe started at 4:55 PM
3/16/2011	4:55:51 PM	Helium valve closed
3/16/2011	4:55:51 PM	H2 valve closed
3/16/2011	4:55:51 PM	BCl3 valve closed
3/16/2011	4:55:51 PM	PH3 valve closed
3/16/2011	4:55:51 PM	SiCl4 pre valve closed
3/16/2011	4:55:51 PM	SiCl4 post valve closed
3/16/2011	4:55:51 PM	Main Vac valve closed
3/16/2011	4:55:51 PM	Bubbler valve closed
3/16/2011	4:55:51 PM	Bypass valve opened
3/16/2011	4:55:51 PM	Helium MFC set to  0.000000
3/16/2011	4:55:51 PM	H2 MFC set to  0.000000
3/16/2011	4:55:51 PM	BCl3 MFC set to  0.000000
3/16/2011	4:55:51 PM	PHl3 MFC set to  0.000000
3/16/2011	4:55:51 PM	SiCl4 MFC set to  0.000000
3/16/2011	4:55:51 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	4:55:51 PM	Tube furnace set to 0
3/16/2011	4:55:51 PM	Helium valve closed
3/16/2011	4:55:51 PM	H2 valve closed
3/16/2011	4:55:51 PM	BCl3 valve closed
3/16/2011	4:55:51 PM	PH3 valve closed
3/16/2011	4:55:51 PM	SiCl4 pre valve closed
3/16/2011	4:55:51 PM	SiCl4 post valve closed
3/16/2011	4:55:51 PM	Bubbler valve closed
3/16/2011	4:55:51 PM	Main Vac valve opened
3/16/2011	4:55:51 PM	Bypass valve opened
3/16/2011	4:55:51 PM	Helium MFC set to  0.000000
3/16/2011	4:55:51 PM	H2 MFC set to  0.000000
3/16/2011	4:55:51 PM	BCl3 MFC set to  0.000000
3/16/2011	4:55:51 PM	PHl3 MFC set to  0.000000
3/16/2011	4:55:51 PM	SiCl4 MFC set to  0.000000
3/16/2011	4:55:51 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	4:55:51 PM	Tube furnace set to 0
3/16/2011	4:56:51 PM	H2 valve closed
3/16/2011	4:56:51 PM	BCl3 valve closed
3/16/2011	4:56:51 PM	PH3 valve closed
3/16/2011	4:56:51 PM	SiCl4 pre valve closed
3/16/2011	4:56:51 PM	SiCl4 post valve closed
3/16/2011	4:56:51 PM	Bubbler valve closed
3/16/2011	4:56:51 PM	Helium valve opened
3/16/2011	4:56:51 PM	Main Vac valve opened
3/16/2011	4:56:51 PM	Bypass valve opened
3/16/2011	4:56:51 PM	Helium MFC set to  100.000000
3/16/2011	4:56:51 PM	H2 MFC set to  0.000000
3/16/2011	4:56:51 PM	BCl3 MFC set to  0.000000
3/16/2011	4:56:51 PM	PHl3 MFC set to  0.000000
3/16/2011	4:56:51 PM	SiCl4 MFC set to  0.000000
3/16/2011	4:56:51 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	4:56:52 PM	Tube furnace set to 0
3/16/2011	4:57:52 PM	Helium valve closed
3/16/2011	4:57:52 PM	H2 valve closed
3/16/2011	4:57:52 PM	BCl3 valve closed
3/16/2011	4:57:52 PM	PH3 valve closed
3/16/2011	4:57:52 PM	SiCl4 pre valve closed
3/16/2011	4:57:52 PM	SiCl4 post valve closed
3/16/2011	4:57:52 PM	Bubbler valve closed
3/16/2011	4:57:52 PM	Main Vac valve opened
3/16/2011	4:57:52 PM	Bypass valve opened
3/16/2011	4:57:52 PM	Helium MFC set to  0.000000
3/16/2011	4:57:52 PM	H2 MFC set to  0.000000
3/16/2011	4:57:52 PM	BCl3 MFC set to  0.000000
3/16/2011	4:57:52 PM	PHl3 MFC set to  0.000000
3/16/2011	4:57:52 PM	SiCl4 MFC set to  0.000000
3/16/2011	4:57:52 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	4:57:52 PM	Tube furnace set to 0
3/16/2011	4:58:52 PM	H2 valve closed
3/16/2011	4:58:52 PM	BCl3 valve closed
3/16/2011	4:58:52 PM	PH3 valve closed
3/16/2011	4:58:52 PM	SiCl4 pre valve closed
3/16/2011	4:58:52 PM	SiCl4 post valve closed
3/16/2011	4:58:52 PM	Bubbler valve closed
3/16/2011	4:58:52 PM	Helium valve opened
3/16/2011	4:58:52 PM	Main Vac valve opened
3/16/2011	4:58:52 PM	Bypass valve opened
3/16/2011	4:58:52 PM	Helium MFC set to  100.000000
3/16/2011	4:58:52 PM	H2 MFC set to  0.000000
3/16/2011	4:58:52 PM	BCl3 MFC set to  0.000000
3/16/2011	4:58:52 PM	PHl3 MFC set to  0.000000
3/16/2011	4:58:52 PM	SiCl4 MFC set to  0.000000
3/16/2011	4:58:52 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	4:58:52 PM	Tube furnace set to 0
3/16/2011	4:59:52 PM	Helium valve closed
3/16/2011	4:59:52 PM	H2 valve closed
3/16/2011	4:59:52 PM	BCl3 valve closed
3/16/2011	4:59:52 PM	PH3 valve closed
3/16/2011	4:59:52 PM	SiCl4 pre valve closed
3/16/2011	4:59:52 PM	SiCl4 post valve closed
3/16/2011	4:59:52 PM	Bubbler valve closed
3/16/2011	4:59:52 PM	Main Vac valve opened
3/16/2011	4:59:52 PM	Bypass valve opened
3/16/2011	4:59:52 PM	Helium MFC set to  0.000000
3/16/2011	4:59:52 PM	H2 MFC set to  0.000000
3/16/2011	4:59:52 PM	BCl3 MFC set to  0.000000
3/16/2011	4:59:52 PM	PHl3 MFC set to  0.000000
3/16/2011	4:59:52 PM	SiCl4 MFC set to  0.000000
3/16/2011	4:59:52 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	4:59:52 PM	Tube furnace set to 0
3/16/2011	5:00:52 PM	H2 valve closed
3/16/2011	5:00:52 PM	BCl3 valve closed
3/16/2011	5:00:52 PM	PH3 valve closed
3/16/2011	5:00:52 PM	SiCl4 pre valve closed
3/16/2011	5:00:52 PM	SiCl4 post valve closed
3/16/2011	5:00:52 PM	Bubbler valve closed
3/16/2011	5:00:52 PM	Helium valve opened
3/16/2011	5:00:52 PM	Main Vac valve opened
3/16/2011	5:00:52 PM	Bypass valve opened
3/16/2011	5:00:52 PM	Helium MFC set to  100.000000
3/16/2011	5:00:52 PM	H2 MFC set to  0.000000
3/16/2011	5:00:52 PM	BCl3 MFC set to  0.000000
3/16/2011	5:00:52 PM	PHl3 MFC set to  0.000000
3/16/2011	5:00:52 PM	SiCl4 MFC set to  0.000000
3/16/2011	5:00:52 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	5:00:52 PM	Tube furnace set to 0
3/16/2011	5:01:52 PM	Helium valve closed
3/16/2011	5:01:52 PM	H2 valve closed
3/16/2011	5:01:52 PM	BCl3 valve closed
3/16/2011	5:01:52 PM	PH3 valve closed
3/16/2011	5:01:52 PM	SiCl4 pre valve closed
3/16/2011	5:01:52 PM	SiCl4 post valve closed
3/16/2011	5:01:52 PM	Bubbler valve closed
3/16/2011	5:01:52 PM	Main Vac valve opened
3/16/2011	5:01:52 PM	Bypass valve opened
3/16/2011	5:01:52 PM	Helium MFC set to  0.000000
3/16/2011	5:01:52 PM	H2 MFC set to  0.000000
3/16/2011	5:01:52 PM	BCl3 MFC set to  0.000000
3/16/2011	5:01:52 PM	PHl3 MFC set to  0.000000
3/16/2011	5:01:52 PM	SiCl4 MFC set to  0.000000
3/16/2011	5:01:52 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	5:01:53 PM	Tube furnace set to 0
3/16/2011	5:02:53 PM	H2 valve closed
3/16/2011	5:02:53 PM	BCl3 valve closed
3/16/2011	5:02:53 PM	PH3 valve closed
3/16/2011	5:02:53 PM	SiCl4 pre valve closed
3/16/2011	5:02:53 PM	SiCl4 post valve closed
3/16/2011	5:02:53 PM	Bubbler valve closed
3/16/2011	5:02:53 PM	Helium valve opened
3/16/2011	5:02:53 PM	Main Vac valve opened
3/16/2011	5:02:53 PM	Bypass valve opened
3/16/2011	5:02:53 PM	Helium MFC set to  100.000000
3/16/2011	5:02:53 PM	H2 MFC set to  0.000000
3/16/2011	5:02:53 PM	BCl3 MFC set to  0.000000
3/16/2011	5:02:53 PM	PHl3 MFC set to  0.000000
3/16/2011	5:02:53 PM	SiCl4 MFC set to  0.000000
3/16/2011	5:02:53 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	5:02:53 PM	Tube furnace set to 0
3/16/2011	5:03:53 PM	Helium valve closed
3/16/2011	5:03:53 PM	H2 valve closed
3/16/2011	5:03:53 PM	BCl3 valve closed
3/16/2011	5:03:53 PM	PH3 valve closed
3/16/2011	5:03:53 PM	SiCl4 pre valve closed
3/16/2011	5:03:53 PM	SiCl4 post valve closed
3/16/2011	5:03:53 PM	Bubbler valve closed
3/16/2011	5:03:53 PM	Main Vac valve opened
3/16/2011	5:03:53 PM	Bypass valve opened
3/16/2011	5:03:53 PM	Helium MFC set to  0.000000
3/16/2011	5:03:53 PM	H2 MFC set to  0.000000
3/16/2011	5:03:53 PM	BCl3 MFC set to  0.000000
3/16/2011	5:03:53 PM	PHl3 MFC set to  0.000000
3/16/2011	5:03:53 PM	SiCl4 MFC set to  0.000000
3/16/2011	5:03:53 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	5:03:53 PM	Tube furnace set to 0
3/16/2011	5:04:53 PM	H2 valve closed
3/16/2011	5:04:53 PM	BCl3 valve closed
3/16/2011	5:04:53 PM	PH3 valve closed
3/16/2011	5:04:53 PM	SiCl4 pre valve closed
3/16/2011	5:04:53 PM	SiCl4 post valve closed
3/16/2011	5:04:53 PM	Bubbler valve closed
3/16/2011	5:04:53 PM	Helium valve opened
3/16/2011	5:04:53 PM	Main Vac valve opened
3/16/2011	5:04:53 PM	Bypass valve opened
3/16/2011	5:04:53 PM	Helium MFC set to  100.000000
3/16/2011	5:04:53 PM	H2 MFC set to  0.000000
3/16/2011	5:04:53 PM	BCl3 MFC set to  0.000000
3/16/2011	5:04:53 PM	PHl3 MFC set to  0.000000
3/16/2011	5:04:53 PM	SiCl4 MFC set to  0.000000
3/16/2011	5:04:53 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	5:04:53 PM	Tube furnace set to 0
3/16/2011	5:05:53 PM	Helium valve closed
3/16/2011	5:05:53 PM	H2 valve closed
3/16/2011	5:05:53 PM	BCl3 valve closed
3/16/2011	5:05:53 PM	PH3 valve closed
3/16/2011	5:05:53 PM	SiCl4 pre valve closed
3/16/2011	5:05:53 PM	SiCl4 post valve closed
3/16/2011	5:05:53 PM	Bubbler valve closed
3/16/2011	5:05:53 PM	Main Vac valve opened
3/16/2011	5:05:53 PM	Bypass valve opened
3/16/2011	5:05:53 PM	Helium MFC set to  0.000000
3/16/2011	5:05:53 PM	H2 MFC set to  0.000000
3/16/2011	5:05:53 PM	BCl3 MFC set to  0.000000
3/16/2011	5:05:53 PM	PHl3 MFC set to  0.000000
3/16/2011	5:05:53 PM	SiCl4 MFC set to  0.000000
3/16/2011	5:05:53 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	5:05:53 PM	Tube furnace set to 0
3/16/2011	5:06:53 PM	H2 valve closed
3/16/2011	5:06:53 PM	BCl3 valve closed
3/16/2011	5:06:53 PM	PH3 valve closed
3/16/2011	5:06:53 PM	SiCl4 pre valve closed
3/16/2011	5:06:53 PM	SiCl4 post valve closed
3/16/2011	5:06:53 PM	Bubbler valve closed
3/16/2011	5:06:53 PM	Helium valve opened
3/16/2011	5:06:53 PM	Main Vac valve opened
3/16/2011	5:06:53 PM	Bypass valve opened
3/16/2011	5:06:53 PM	Helium MFC set to  100.000000
3/16/2011	5:06:53 PM	H2 MFC set to  0.000000
3/16/2011	5:06:53 PM	BCl3 MFC set to  0.000000
3/16/2011	5:06:53 PM	PHl3 MFC set to  0.000000
3/16/2011	5:06:53 PM	SiCl4 MFC set to  0.000000
3/16/2011	5:06:53 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	5:06:54 PM	Tube furnace set to 0
3/16/2011	5:07:54 PM	Helium valve closed
3/16/2011	5:07:54 PM	H2 valve closed
3/16/2011	5:07:54 PM	BCl3 valve closed
3/16/2011	5:07:54 PM	PH3 valve closed
3/16/2011	5:07:54 PM	SiCl4 pre valve closed
3/16/2011	5:07:54 PM	SiCl4 post valve closed
3/16/2011	5:07:54 PM	Bubbler valve closed
3/16/2011	5:07:54 PM	Main Vac valve opened
3/16/2011	5:07:54 PM	Bypass valve opened
3/16/2011	5:07:54 PM	Helium MFC set to  0.000000
3/16/2011	5:07:54 PM	H2 MFC set to  0.000000
3/16/2011	5:07:54 PM	BCl3 MFC set to  0.000000
3/16/2011	5:07:54 PM	PHl3 MFC set to  0.000000
3/16/2011	5:07:54 PM	SiCl4 MFC set to  0.000000
3/16/2011	5:07:54 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	5:07:54 PM	Tube furnace set to 0
3/16/2011	5:08:54 PM	H2 valve closed
3/16/2011	5:08:54 PM	BCl3 valve closed
3/16/2011	5:08:54 PM	PH3 valve closed
3/16/2011	5:08:54 PM	SiCl4 pre valve closed
3/16/2011	5:08:54 PM	SiCl4 post valve closed
3/16/2011	5:08:54 PM	Bubbler valve closed
3/16/2011	5:08:54 PM	Helium valve opened
3/16/2011	5:08:54 PM	Main Vac valve opened
3/16/2011	5:08:54 PM	Bypass valve opened
3/16/2011	5:08:54 PM	Helium MFC set to  100.000000
3/16/2011	5:08:54 PM	H2 MFC set to  0.000000
3/16/2011	5:08:54 PM	BCl3 MFC set to  0.000000
3/16/2011	5:08:54 PM	PHl3 MFC set to  0.000000
3/16/2011	5:08:54 PM	SiCl4 MFC set to  0.000000
3/16/2011	5:08:54 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	5:08:54 PM	Tube furnace set to 0
3/16/2011	5:09:54 PM	Helium valve closed
3/16/2011	5:09:54 PM	H2 valve closed
3/16/2011	5:09:54 PM	BCl3 valve closed
3/16/2011	5:09:54 PM	PH3 valve closed
3/16/2011	5:09:54 PM	SiCl4 pre valve closed
3/16/2011	5:09:54 PM	SiCl4 post valve closed
3/16/2011	5:09:54 PM	Bubbler valve closed
3/16/2011	5:09:54 PM	Main Vac valve opened
3/16/2011	5:09:54 PM	Bypass valve opened
3/16/2011	5:09:54 PM	Helium MFC set to  0.000000
3/16/2011	5:09:54 PM	H2 MFC set to  0.000000
3/16/2011	5:09:54 PM	BCl3 MFC set to  0.000000
3/16/2011	5:09:54 PM	PHl3 MFC set to  0.000000
3/16/2011	5:09:54 PM	SiCl4 MFC set to  0.000000
3/16/2011	5:09:54 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	5:09:54 PM	Tube furnace set to 0
3/16/2011	5:10:54 PM	H2 valve closed
3/16/2011	5:10:54 PM	BCl3 valve closed
3/16/2011	5:10:54 PM	PH3 valve closed
3/16/2011	5:10:54 PM	SiCl4 pre valve closed
3/16/2011	5:10:54 PM	SiCl4 post valve closed
3/16/2011	5:10:54 PM	Bubbler valve closed
3/16/2011	5:10:54 PM	Helium valve opened
3/16/2011	5:10:54 PM	Main Vac valve opened
3/16/2011	5:10:54 PM	Bypass valve opened
3/16/2011	5:10:54 PM	Helium MFC set to  100.000000
3/16/2011	5:10:54 PM	H2 MFC set to  0.000000
3/16/2011	5:10:54 PM	BCl3 MFC set to  0.000000
3/16/2011	5:10:54 PM	PHl3 MFC set to  0.000000
3/16/2011	5:10:54 PM	SiCl4 MFC set to  0.000000
3/16/2011	5:10:54 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	5:10:54 PM	Tube furnace set to 0
3/16/2011	5:11:54 PM	Helium valve closed
3/16/2011	5:11:54 PM	H2 valve closed
3/16/2011	5:11:54 PM	BCl3 valve closed
3/16/2011	5:11:54 PM	PH3 valve closed
3/16/2011	5:11:54 PM	SiCl4 pre valve closed
3/16/2011	5:11:54 PM	SiCl4 post valve closed
3/16/2011	5:11:54 PM	Bubbler valve closed
3/16/2011	5:11:54 PM	Main Vac valve opened
3/16/2011	5:11:54 PM	Bypass valve opened
3/16/2011	5:11:54 PM	Helium MFC set to  0.000000
3/16/2011	5:11:54 PM	H2 MFC set to  0.000000
3/16/2011	5:11:54 PM	BCl3 MFC set to  0.000000
3/16/2011	5:11:54 PM	PHl3 MFC set to  0.000000
3/16/2011	5:11:54 PM	SiCl4 MFC set to  0.000000
3/16/2011	5:11:54 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	5:11:55 PM	Tube furnace set to 0
3/16/2011	5:12:55 PM	H2 valve closed
3/16/2011	5:12:55 PM	BCl3 valve closed
3/16/2011	5:12:55 PM	PH3 valve closed
3/16/2011	5:12:55 PM	SiCl4 pre valve closed
3/16/2011	5:12:55 PM	SiCl4 post valve closed
3/16/2011	5:12:55 PM	Bubbler valve closed
3/16/2011	5:12:55 PM	Helium valve opened
3/16/2011	5:12:55 PM	Main Vac valve opened
3/16/2011	5:12:55 PM	Bypass valve opened
3/16/2011	5:12:55 PM	Helium MFC set to  100.000000
3/16/2011	5:12:55 PM	H2 MFC set to  0.000000
3/16/2011	5:12:55 PM	BCl3 MFC set to  0.000000
3/16/2011	5:12:55 PM	PHl3 MFC set to  0.000000
3/16/2011	5:12:55 PM	SiCl4 MFC set to  0.000000
3/16/2011	5:12:55 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	5:12:55 PM	Tube furnace set to 0
3/16/2011	5:13:55 PM	Helium valve closed
3/16/2011	5:13:55 PM	H2 valve closed
3/16/2011	5:13:55 PM	BCl3 valve closed
3/16/2011	5:13:55 PM	PH3 valve closed
3/16/2011	5:13:55 PM	SiCl4 pre valve closed
3/16/2011	5:13:55 PM	SiCl4 post valve closed
3/16/2011	5:13:55 PM	Bubbler valve closed
3/16/2011	5:13:55 PM	Main Vac valve opened
3/16/2011	5:13:55 PM	Bypass valve opened
3/16/2011	5:13:55 PM	Helium MFC set to  0.000000
3/16/2011	5:13:55 PM	H2 MFC set to  0.000000
3/16/2011	5:13:55 PM	BCl3 MFC set to  0.000000
3/16/2011	5:13:55 PM	PHl3 MFC set to  0.000000
3/16/2011	5:13:55 PM	SiCl4 MFC set to  0.000000
3/16/2011	5:13:55 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	5:13:55 PM	Tube furnace set to 0
3/16/2011	5:14:55 PM	H2 valve closed
3/16/2011	5:14:55 PM	BCl3 valve closed
3/16/2011	5:14:55 PM	PH3 valve closed
3/16/2011	5:14:55 PM	SiCl4 pre valve closed
3/16/2011	5:14:55 PM	SiCl4 post valve closed
3/16/2011	5:14:55 PM	Bubbler valve closed
3/16/2011	5:14:55 PM	Helium valve opened
3/16/2011	5:14:55 PM	Main Vac valve opened
3/16/2011	5:14:55 PM	Bypass valve opened
3/16/2011	5:14:55 PM	Helium MFC set to  100.000000
3/16/2011	5:14:55 PM	H2 MFC set to  0.000000
3/16/2011	5:14:55 PM	BCl3 MFC set to  0.000000
3/16/2011	5:14:55 PM	PHl3 MFC set to  0.000000
3/16/2011	5:14:55 PM	SiCl4 MFC set to  0.000000
3/16/2011	5:14:55 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	5:14:55 PM	Tube furnace set to 0
3/16/2011	5:15:55 PM	Helium valve closed
3/16/2011	5:15:55 PM	H2 valve closed
3/16/2011	5:15:55 PM	BCl3 valve closed
3/16/2011	5:15:55 PM	PH3 valve closed
3/16/2011	5:15:55 PM	SiCl4 pre valve closed
3/16/2011	5:15:55 PM	SiCl4 post valve closed
3/16/2011	5:15:55 PM	Bubbler valve closed
3/16/2011	5:15:55 PM	Main Vac valve opened
3/16/2011	5:15:55 PM	Bypass valve opened
3/16/2011	5:15:55 PM	Helium MFC set to  0.000000
3/16/2011	5:15:55 PM	H2 MFC set to  0.000000
3/16/2011	5:15:55 PM	BCl3 MFC set to  0.000000
3/16/2011	5:15:55 PM	PHl3 MFC set to  0.000000
3/16/2011	5:15:55 PM	SiCl4 MFC set to  0.000000
3/16/2011	5:15:55 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	5:15:55 PM	Tube furnace set to 0
3/16/2011	5:15:56 PM	Run finished at 5:15 PM
3/16/2011	5:15:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/16/2011	5:59:13 PM	Bypass valve closed
3/16/2011	5:59:13 PM	Main Vac valve closed
3/16/2011	5:59:19 PM	Main Vac valve opened
3/16/2011	5:59:20 PM	Bypass valve opened
3/16/2011	5:59:33 PM	Recipe started at 5:59 PM
3/16/2011	5:59:33 PM	Helium valve closed
3/16/2011	5:59:33 PM	BCl3 valve closed
3/16/2011	5:59:33 PM	PH3 valve closed
3/16/2011	5:59:33 PM	SiCl4 pre valve closed
3/16/2011	5:59:33 PM	SiCl4 post valve closed
3/16/2011	5:59:33 PM	Main Vac valve closed
3/16/2011	5:59:33 PM	Bypass valve closed
3/16/2011	5:59:33 PM	Bubbler valve closed
3/16/2011	5:59:33 PM	H2 valve opened
3/16/2011	5:59:33 PM	Helium MFC set to  0.000000
3/16/2011	5:59:33 PM	H2 MFC set to  500.000000
3/16/2011	5:59:33 PM	BCl3 MFC set to  0.000000
3/16/2011	5:59:33 PM	PHl3 MFC set to  0.000000
3/16/2011	5:59:33 PM	SiCl4 MFC set to  0.000000
3/16/2011	5:59:33 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	5:59:34 PM	Tube furnace set to 100
3/16/2011	6:00:51 PM	Helium valve closed
3/16/2011	6:00:51 PM	BCl3 valve closed
3/16/2011	6:00:51 PM	PH3 valve closed
3/16/2011	6:00:51 PM	SiCl4 pre valve closed
3/16/2011	6:00:51 PM	SiCl4 post valve closed
3/16/2011	6:00:51 PM	Main Vac valve closed
3/16/2011	6:00:51 PM	Bypass valve closed
3/16/2011	6:00:51 PM	H2 valve opened
3/16/2011	6:00:51 PM	Bubbler valve opened
3/16/2011	6:00:51 PM	Helium MFC set to  0.000000
3/16/2011	6:00:51 PM	H2 MFC set to  500.000000
3/16/2011	6:00:51 PM	BCl3 MFC set to  0.000000
3/16/2011	6:00:51 PM	PHl3 MFC set to  0.000000
3/16/2011	6:00:51 PM	SiCl4 MFC set to  0.000000
3/16/2011	6:00:51 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	6:00:52 PM	Tube furnace set to 1000
3/16/2011	6:20:51 PM	Helium valve closed
3/16/2011	6:20:51 PM	PH3 valve closed
3/16/2011	6:20:51 PM	Main Vac valve closed
3/16/2011	6:20:51 PM	Bypass valve closed
3/16/2011	6:20:51 PM	H2 valve opened
3/16/2011	6:20:52 PM	BCl3 valve opened
3/16/2011	6:20:52 PM	SiCl4 pre valve opened
3/16/2011	6:20:52 PM	SiCl4 post valve opened
3/16/2011	6:20:52 PM	Bubbler valve opened
3/16/2011	6:20:52 PM	Helium MFC set to  0.000000
3/16/2011	6:20:52 PM	H2 MFC set to  500.000000
3/16/2011	6:20:52 PM	BCl3 MFC set to  3.000000
3/16/2011	6:20:52 PM	PHl3 MFC set to  0.000000
3/16/2011	6:20:52 PM	SiCl4 MFC set to  50.000000
3/16/2011	6:20:52 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	6:20:52 PM	Tube furnace set to 1000
3/16/2011	6:32:52 PM	H2 valve closed
3/16/2011	6:32:52 PM	BCl3 valve closed
3/16/2011	6:32:52 PM	PH3 valve closed
3/16/2011	6:32:52 PM	SiCl4 pre valve closed
3/16/2011	6:32:52 PM	SiCl4 post valve closed
3/16/2011	6:32:52 PM	Main Vac valve closed
3/16/2011	6:32:52 PM	Bypass valve closed
3/16/2011	6:32:52 PM	Helium valve opened
3/16/2011	6:32:52 PM	Bubbler valve opened
3/16/2011	6:32:52 PM	Helium MFC set to  500.000000
3/16/2011	6:32:52 PM	H2 MFC set to  0.000000
3/16/2011	6:32:52 PM	BCl3 MFC set to  0.000000
3/16/2011	6:32:52 PM	PHl3 MFC set to  0.000000
3/16/2011	6:32:52 PM	SiCl4 MFC set to  0.000000
3/16/2011	6:32:52 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	6:32:52 PM	Tube furnace set to 0
3/16/2011	6:52:52 PM	Helium valve closed
3/16/2011	6:52:52 PM	H2 valve closed
3/16/2011	6:52:52 PM	BCl3 valve closed
3/16/2011	6:52:52 PM	PH3 valve closed
3/16/2011	6:52:52 PM	SiCl4 pre valve closed
3/16/2011	6:52:52 PM	SiCl4 post valve closed
3/16/2011	6:52:52 PM	Main Vac valve closed
3/16/2011	6:52:52 PM	Bypass valve closed
3/16/2011	6:52:52 PM	Bubbler valve closed
3/16/2011	6:52:52 PM	Helium MFC set to  0.000000
3/16/2011	6:52:52 PM	H2 MFC set to  0.000000
3/16/2011	6:52:52 PM	BCl3 MFC set to  0.000000
3/16/2011	6:52:52 PM	PHl3 MFC set to  0.000000
3/16/2011	6:52:52 PM	SiCl4 MFC set to  0.000000
3/16/2011	6:52:52 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	6:52:52 PM	Tube furnace set to 0
3/16/2011	6:52:52 PM	Run finished at 6:52 PM
3/16/2011	7:18:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2011	7:18:56 PM	Recipe started at 7:18 PM
3/16/2011	7:18:56 PM	Helium valve closed
3/16/2011	7:18:56 PM	H2 valve closed
3/16/2011	7:18:56 PM	BCl3 valve closed
3/16/2011	7:18:56 PM	PH3 valve closed
3/16/2011	7:18:56 PM	SiCl4 pre valve closed
3/16/2011	7:18:56 PM	SiCl4 post valve closed
3/16/2011	7:18:56 PM	Main Vac valve closed
3/16/2011	7:18:56 PM	Bubbler valve closed
3/16/2011	7:18:56 PM	Bypass valve opened
3/16/2011	7:18:56 PM	Helium MFC set to  0.000000
3/16/2011	7:18:56 PM	H2 MFC set to  0.000000
3/16/2011	7:18:56 PM	BCl3 MFC set to  0.000000
3/16/2011	7:18:56 PM	PHl3 MFC set to  0.000000
3/16/2011	7:18:56 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:18:56 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:18:56 PM	Tube furnace set to 0
3/16/2011	7:19:27 PM	Helium valve closed
3/16/2011	7:19:27 PM	H2 valve closed
3/16/2011	7:19:27 PM	BCl3 valve closed
3/16/2011	7:19:27 PM	PH3 valve closed
3/16/2011	7:19:27 PM	SiCl4 pre valve closed
3/16/2011	7:19:27 PM	SiCl4 post valve closed
3/16/2011	7:19:27 PM	Bubbler valve closed
3/16/2011	7:19:27 PM	Main Vac valve opened
3/16/2011	7:19:27 PM	Bypass valve opened
3/16/2011	7:19:27 PM	Helium MFC set to  0.000000
3/16/2011	7:19:27 PM	H2 MFC set to  0.000000
3/16/2011	7:19:27 PM	BCl3 MFC set to  0.000000
3/16/2011	7:19:27 PM	PHl3 MFC set to  0.000000
3/16/2011	7:19:27 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:19:27 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:19:27 PM	Tube furnace set to 0
3/16/2011	7:19:27 PM	Run finished at 7:19 PM
3/16/2011	7:19:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2011	7:21:28 PM	Bypass valve closed
3/16/2011	7:21:29 PM	Main Vac valve closed
3/16/2011	7:21:34 PM	Bypass valve opened
3/16/2011	7:21:34 PM	Main Vac valve opened
3/16/2011	7:24:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/16/2011	7:24:44 PM	Recipe started at 7:24 PM
3/16/2011	7:24:44 PM	Helium valve closed
3/16/2011	7:24:44 PM	H2 valve closed
3/16/2011	7:24:44 PM	BCl3 valve closed
3/16/2011	7:24:44 PM	PH3 valve closed
3/16/2011	7:24:44 PM	SiCl4 pre valve closed
3/16/2011	7:24:44 PM	SiCl4 post valve closed
3/16/2011	7:24:44 PM	Main Vac valve closed
3/16/2011	7:24:44 PM	Bubbler valve closed
3/16/2011	7:24:44 PM	Bypass valve opened
3/16/2011	7:24:44 PM	Helium MFC set to  0.000000
3/16/2011	7:24:44 PM	H2 MFC set to  0.000000
3/16/2011	7:24:44 PM	BCl3 MFC set to  0.000000
3/16/2011	7:24:44 PM	PHl3 MFC set to  0.000000
3/16/2011	7:24:44 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:24:44 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:24:44 PM	Tube furnace set to 0
3/16/2011	7:24:44 PM	Helium valve closed
3/16/2011	7:24:44 PM	H2 valve closed
3/16/2011	7:24:44 PM	BCl3 valve closed
3/16/2011	7:24:44 PM	PH3 valve closed
3/16/2011	7:24:44 PM	SiCl4 pre valve closed
3/16/2011	7:24:44 PM	SiCl4 post valve closed
3/16/2011	7:24:44 PM	Bubbler valve closed
3/16/2011	7:24:44 PM	Main Vac valve opened
3/16/2011	7:24:44 PM	Bypass valve opened
3/16/2011	7:24:44 PM	Helium MFC set to  0.000000
3/16/2011	7:24:44 PM	H2 MFC set to  0.000000
3/16/2011	7:24:44 PM	BCl3 MFC set to  0.000000
3/16/2011	7:24:44 PM	PHl3 MFC set to  0.000000
3/16/2011	7:24:44 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:24:44 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:24:45 PM	Tube furnace set to 0
3/16/2011	7:25:45 PM	H2 valve closed
3/16/2011	7:25:45 PM	BCl3 valve closed
3/16/2011	7:25:45 PM	PH3 valve closed
3/16/2011	7:25:45 PM	SiCl4 pre valve closed
3/16/2011	7:25:45 PM	SiCl4 post valve closed
3/16/2011	7:25:45 PM	Bubbler valve closed
3/16/2011	7:25:45 PM	Helium valve opened
3/16/2011	7:25:45 PM	Main Vac valve opened
3/16/2011	7:25:45 PM	Bypass valve opened
3/16/2011	7:25:45 PM	Helium MFC set to  100.000000
3/16/2011	7:25:45 PM	H2 MFC set to  0.000000
3/16/2011	7:25:45 PM	BCl3 MFC set to  0.000000
3/16/2011	7:25:45 PM	PHl3 MFC set to  0.000000
3/16/2011	7:25:45 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:25:45 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:25:45 PM	Tube furnace set to 0
3/16/2011	7:26:45 PM	Helium valve closed
3/16/2011	7:26:45 PM	H2 valve closed
3/16/2011	7:26:45 PM	BCl3 valve closed
3/16/2011	7:26:45 PM	PH3 valve closed
3/16/2011	7:26:45 PM	SiCl4 pre valve closed
3/16/2011	7:26:45 PM	SiCl4 post valve closed
3/16/2011	7:26:45 PM	Bubbler valve closed
3/16/2011	7:26:45 PM	Main Vac valve opened
3/16/2011	7:26:45 PM	Bypass valve opened
3/16/2011	7:26:45 PM	Helium MFC set to  0.000000
3/16/2011	7:26:45 PM	H2 MFC set to  0.000000
3/16/2011	7:26:45 PM	BCl3 MFC set to  0.000000
3/16/2011	7:26:45 PM	PHl3 MFC set to  0.000000
3/16/2011	7:26:45 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:26:45 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:26:45 PM	Tube furnace set to 0
3/16/2011	7:27:45 PM	H2 valve closed
3/16/2011	7:27:45 PM	BCl3 valve closed
3/16/2011	7:27:45 PM	PH3 valve closed
3/16/2011	7:27:45 PM	SiCl4 pre valve closed
3/16/2011	7:27:45 PM	SiCl4 post valve closed
3/16/2011	7:27:45 PM	Bubbler valve closed
3/16/2011	7:27:45 PM	Helium valve opened
3/16/2011	7:27:45 PM	Main Vac valve opened
3/16/2011	7:27:45 PM	Bypass valve opened
3/16/2011	7:27:45 PM	Helium MFC set to  100.000000
3/16/2011	7:27:45 PM	H2 MFC set to  0.000000
3/16/2011	7:27:45 PM	BCl3 MFC set to  0.000000
3/16/2011	7:27:45 PM	PHl3 MFC set to  0.000000
3/16/2011	7:27:45 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:27:45 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:27:45 PM	Tube furnace set to 0
3/16/2011	7:28:45 PM	Helium valve closed
3/16/2011	7:28:45 PM	H2 valve closed
3/16/2011	7:28:45 PM	BCl3 valve closed
3/16/2011	7:28:45 PM	PH3 valve closed
3/16/2011	7:28:45 PM	SiCl4 pre valve closed
3/16/2011	7:28:45 PM	SiCl4 post valve closed
3/16/2011	7:28:45 PM	Bubbler valve closed
3/16/2011	7:28:45 PM	Main Vac valve opened
3/16/2011	7:28:45 PM	Bypass valve opened
3/16/2011	7:28:45 PM	Helium MFC set to  0.000000
3/16/2011	7:28:45 PM	H2 MFC set to  0.000000
3/16/2011	7:28:45 PM	BCl3 MFC set to  0.000000
3/16/2011	7:28:45 PM	PHl3 MFC set to  0.000000
3/16/2011	7:28:45 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:28:45 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:28:45 PM	Tube furnace set to 0
3/16/2011	7:29:45 PM	H2 valve closed
3/16/2011	7:29:45 PM	BCl3 valve closed
3/16/2011	7:29:45 PM	PH3 valve closed
3/16/2011	7:29:45 PM	SiCl4 pre valve closed
3/16/2011	7:29:45 PM	SiCl4 post valve closed
3/16/2011	7:29:45 PM	Bubbler valve closed
3/16/2011	7:29:45 PM	Helium valve opened
3/16/2011	7:29:45 PM	Main Vac valve opened
3/16/2011	7:29:45 PM	Bypass valve opened
3/16/2011	7:29:45 PM	Helium MFC set to  100.000000
3/16/2011	7:29:45 PM	H2 MFC set to  0.000000
3/16/2011	7:29:46 PM	BCl3 MFC set to  0.000000
3/16/2011	7:29:46 PM	PHl3 MFC set to  0.000000
3/16/2011	7:29:46 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:29:46 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:29:46 PM	Tube furnace set to 0
3/16/2011	7:30:46 PM	Helium valve closed
3/16/2011	7:30:46 PM	H2 valve closed
3/16/2011	7:30:46 PM	BCl3 valve closed
3/16/2011	7:30:46 PM	PH3 valve closed
3/16/2011	7:30:46 PM	SiCl4 pre valve closed
3/16/2011	7:30:46 PM	SiCl4 post valve closed
3/16/2011	7:30:46 PM	Bubbler valve closed
3/16/2011	7:30:46 PM	Main Vac valve opened
3/16/2011	7:30:46 PM	Bypass valve opened
3/16/2011	7:30:46 PM	Helium MFC set to  0.000000
3/16/2011	7:30:46 PM	H2 MFC set to  0.000000
3/16/2011	7:30:46 PM	BCl3 MFC set to  0.000000
3/16/2011	7:30:46 PM	PHl3 MFC set to  0.000000
3/16/2011	7:30:46 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:30:46 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:30:46 PM	Tube furnace set to 0
3/16/2011	7:31:46 PM	H2 valve closed
3/16/2011	7:31:46 PM	BCl3 valve closed
3/16/2011	7:31:46 PM	PH3 valve closed
3/16/2011	7:31:46 PM	SiCl4 pre valve closed
3/16/2011	7:31:46 PM	SiCl4 post valve closed
3/16/2011	7:31:46 PM	Bubbler valve closed
3/16/2011	7:31:46 PM	Helium valve opened
3/16/2011	7:31:46 PM	Main Vac valve opened
3/16/2011	7:31:46 PM	Bypass valve opened
3/16/2011	7:31:46 PM	Helium MFC set to  100.000000
3/16/2011	7:31:46 PM	H2 MFC set to  0.000000
3/16/2011	7:31:46 PM	BCl3 MFC set to  0.000000
3/16/2011	7:31:46 PM	PHl3 MFC set to  0.000000
3/16/2011	7:31:46 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:31:46 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:31:46 PM	Tube furnace set to 0
3/16/2011	7:32:46 PM	Helium valve closed
3/16/2011	7:32:46 PM	H2 valve closed
3/16/2011	7:32:46 PM	BCl3 valve closed
3/16/2011	7:32:46 PM	PH3 valve closed
3/16/2011	7:32:46 PM	SiCl4 pre valve closed
3/16/2011	7:32:46 PM	SiCl4 post valve closed
3/16/2011	7:32:46 PM	Bubbler valve closed
3/16/2011	7:32:46 PM	Main Vac valve opened
3/16/2011	7:32:46 PM	Bypass valve opened
3/16/2011	7:32:46 PM	Helium MFC set to  0.000000
3/16/2011	7:32:46 PM	H2 MFC set to  0.000000
3/16/2011	7:32:46 PM	BCl3 MFC set to  0.000000
3/16/2011	7:32:46 PM	PHl3 MFC set to  0.000000
3/16/2011	7:32:46 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:32:46 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:32:46 PM	Tube furnace set to 0
3/16/2011	7:33:46 PM	H2 valve closed
3/16/2011	7:33:46 PM	BCl3 valve closed
3/16/2011	7:33:46 PM	PH3 valve closed
3/16/2011	7:33:46 PM	SiCl4 pre valve closed
3/16/2011	7:33:46 PM	SiCl4 post valve closed
3/16/2011	7:33:46 PM	Bubbler valve closed
3/16/2011	7:33:46 PM	Helium valve opened
3/16/2011	7:33:46 PM	Main Vac valve opened
3/16/2011	7:33:46 PM	Bypass valve opened
3/16/2011	7:33:46 PM	Helium MFC set to  100.000000
3/16/2011	7:33:46 PM	H2 MFC set to  0.000000
3/16/2011	7:33:46 PM	BCl3 MFC set to  0.000000
3/16/2011	7:33:46 PM	PHl3 MFC set to  0.000000
3/16/2011	7:33:46 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:33:46 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:33:47 PM	Tube furnace set to 0
3/16/2011	7:34:47 PM	Helium valve closed
3/16/2011	7:34:47 PM	H2 valve closed
3/16/2011	7:34:47 PM	BCl3 valve closed
3/16/2011	7:34:47 PM	PH3 valve closed
3/16/2011	7:34:47 PM	SiCl4 pre valve closed
3/16/2011	7:34:47 PM	SiCl4 post valve closed
3/16/2011	7:34:47 PM	Bubbler valve closed
3/16/2011	7:34:47 PM	Main Vac valve opened
3/16/2011	7:34:47 PM	Bypass valve opened
3/16/2011	7:34:47 PM	Helium MFC set to  0.000000
3/16/2011	7:34:47 PM	H2 MFC set to  0.000000
3/16/2011	7:34:47 PM	BCl3 MFC set to  0.000000
3/16/2011	7:34:47 PM	PHl3 MFC set to  0.000000
3/16/2011	7:34:47 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:34:47 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:34:47 PM	Tube furnace set to 0
3/16/2011	7:35:47 PM	H2 valve closed
3/16/2011	7:35:47 PM	BCl3 valve closed
3/16/2011	7:35:47 PM	PH3 valve closed
3/16/2011	7:35:47 PM	SiCl4 pre valve closed
3/16/2011	7:35:47 PM	SiCl4 post valve closed
3/16/2011	7:35:47 PM	Bubbler valve closed
3/16/2011	7:35:47 PM	Helium valve opened
3/16/2011	7:35:47 PM	Main Vac valve opened
3/16/2011	7:35:47 PM	Bypass valve opened
3/16/2011	7:35:47 PM	Helium MFC set to  100.000000
3/16/2011	7:35:47 PM	H2 MFC set to  0.000000
3/16/2011	7:35:47 PM	BCl3 MFC set to  0.000000
3/16/2011	7:35:47 PM	PHl3 MFC set to  0.000000
3/16/2011	7:35:47 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:35:47 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:35:47 PM	Tube furnace set to 0
3/16/2011	7:36:47 PM	Helium valve closed
3/16/2011	7:36:47 PM	H2 valve closed
3/16/2011	7:36:47 PM	BCl3 valve closed
3/16/2011	7:36:47 PM	PH3 valve closed
3/16/2011	7:36:47 PM	SiCl4 pre valve closed
3/16/2011	7:36:47 PM	SiCl4 post valve closed
3/16/2011	7:36:47 PM	Bubbler valve closed
3/16/2011	7:36:47 PM	Main Vac valve opened
3/16/2011	7:36:47 PM	Bypass valve opened
3/16/2011	7:36:47 PM	Helium MFC set to  0.000000
3/16/2011	7:36:47 PM	H2 MFC set to  0.000000
3/16/2011	7:36:47 PM	BCl3 MFC set to  0.000000
3/16/2011	7:36:47 PM	PHl3 MFC set to  0.000000
3/16/2011	7:36:47 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:36:47 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:36:47 PM	Tube furnace set to 0
3/16/2011	7:37:47 PM	H2 valve closed
3/16/2011	7:37:47 PM	BCl3 valve closed
3/16/2011	7:37:47 PM	PH3 valve closed
3/16/2011	7:37:47 PM	SiCl4 pre valve closed
3/16/2011	7:37:47 PM	SiCl4 post valve closed
3/16/2011	7:37:47 PM	Bubbler valve closed
3/16/2011	7:37:47 PM	Helium valve opened
3/16/2011	7:37:47 PM	Main Vac valve opened
3/16/2011	7:37:47 PM	Bypass valve opened
3/16/2011	7:37:47 PM	Helium MFC set to  100.000000
3/16/2011	7:37:47 PM	H2 MFC set to  0.000000
3/16/2011	7:37:47 PM	BCl3 MFC set to  0.000000
3/16/2011	7:37:47 PM	PHl3 MFC set to  0.000000
3/16/2011	7:37:47 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:37:47 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:37:47 PM	Tube furnace set to 0
3/16/2011	7:38:47 PM	Helium valve closed
3/16/2011	7:38:47 PM	H2 valve closed
3/16/2011	7:38:47 PM	BCl3 valve closed
3/16/2011	7:38:47 PM	PH3 valve closed
3/16/2011	7:38:47 PM	SiCl4 pre valve closed
3/16/2011	7:38:47 PM	SiCl4 post valve closed
3/16/2011	7:38:47 PM	Bubbler valve closed
3/16/2011	7:38:47 PM	Main Vac valve opened
3/16/2011	7:38:47 PM	Bypass valve opened
3/16/2011	7:38:47 PM	Helium MFC set to  0.000000
3/16/2011	7:38:47 PM	H2 MFC set to  0.000000
3/16/2011	7:38:47 PM	BCl3 MFC set to  0.000000
3/16/2011	7:38:47 PM	PHl3 MFC set to  0.000000
3/16/2011	7:38:47 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:38:47 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:38:48 PM	Tube furnace set to 0
3/16/2011	7:39:48 PM	H2 valve closed
3/16/2011	7:39:48 PM	BCl3 valve closed
3/16/2011	7:39:48 PM	PH3 valve closed
3/16/2011	7:39:48 PM	SiCl4 pre valve closed
3/16/2011	7:39:48 PM	SiCl4 post valve closed
3/16/2011	7:39:48 PM	Bubbler valve closed
3/16/2011	7:39:48 PM	Helium valve opened
3/16/2011	7:39:48 PM	Main Vac valve opened
3/16/2011	7:39:48 PM	Bypass valve opened
3/16/2011	7:39:48 PM	Helium MFC set to  100.000000
3/16/2011	7:39:48 PM	H2 MFC set to  0.000000
3/16/2011	7:39:48 PM	BCl3 MFC set to  0.000000
3/16/2011	7:39:48 PM	PHl3 MFC set to  0.000000
3/16/2011	7:39:48 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:39:48 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:39:48 PM	Tube furnace set to 0
3/16/2011	7:40:48 PM	Helium valve closed
3/16/2011	7:40:48 PM	H2 valve closed
3/16/2011	7:40:48 PM	BCl3 valve closed
3/16/2011	7:40:48 PM	PH3 valve closed
3/16/2011	7:40:48 PM	SiCl4 pre valve closed
3/16/2011	7:40:48 PM	SiCl4 post valve closed
3/16/2011	7:40:48 PM	Bubbler valve closed
3/16/2011	7:40:48 PM	Main Vac valve opened
3/16/2011	7:40:48 PM	Bypass valve opened
3/16/2011	7:40:48 PM	Helium MFC set to  0.000000
3/16/2011	7:40:48 PM	H2 MFC set to  0.000000
3/16/2011	7:40:48 PM	BCl3 MFC set to  0.000000
3/16/2011	7:40:48 PM	PHl3 MFC set to  0.000000
3/16/2011	7:40:48 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:40:48 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:40:48 PM	Tube furnace set to 0
3/16/2011	7:41:48 PM	H2 valve closed
3/16/2011	7:41:48 PM	BCl3 valve closed
3/16/2011	7:41:48 PM	PH3 valve closed
3/16/2011	7:41:48 PM	SiCl4 pre valve closed
3/16/2011	7:41:48 PM	SiCl4 post valve closed
3/16/2011	7:41:48 PM	Bubbler valve closed
3/16/2011	7:41:48 PM	Helium valve opened
3/16/2011	7:41:48 PM	Main Vac valve opened
3/16/2011	7:41:48 PM	Bypass valve opened
3/16/2011	7:41:48 PM	Helium MFC set to  100.000000
3/16/2011	7:41:48 PM	H2 MFC set to  0.000000
3/16/2011	7:41:48 PM	BCl3 MFC set to  0.000000
3/16/2011	7:41:48 PM	PHl3 MFC set to  0.000000
3/16/2011	7:41:48 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:41:48 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:41:48 PM	Tube furnace set to 0
3/16/2011	7:42:48 PM	Helium valve closed
3/16/2011	7:42:48 PM	H2 valve closed
3/16/2011	7:42:48 PM	BCl3 valve closed
3/16/2011	7:42:48 PM	PH3 valve closed
3/16/2011	7:42:48 PM	SiCl4 pre valve closed
3/16/2011	7:42:48 PM	SiCl4 post valve closed
3/16/2011	7:42:48 PM	Bubbler valve closed
3/16/2011	7:42:48 PM	Main Vac valve opened
3/16/2011	7:42:48 PM	Bypass valve opened
3/16/2011	7:42:48 PM	Helium MFC set to  0.000000
3/16/2011	7:42:48 PM	H2 MFC set to  0.000000
3/16/2011	7:42:48 PM	BCl3 MFC set to  0.000000
3/16/2011	7:42:48 PM	PHl3 MFC set to  0.000000
3/16/2011	7:42:48 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:42:48 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:42:48 PM	Tube furnace set to 0
3/16/2011	7:43:48 PM	H2 valve closed
3/16/2011	7:43:48 PM	BCl3 valve closed
3/16/2011	7:43:48 PM	PH3 valve closed
3/16/2011	7:43:48 PM	SiCl4 pre valve closed
3/16/2011	7:43:48 PM	SiCl4 post valve closed
3/16/2011	7:43:48 PM	Bubbler valve closed
3/16/2011	7:43:48 PM	Helium valve opened
3/16/2011	7:43:48 PM	Main Vac valve opened
3/16/2011	7:43:48 PM	Bypass valve opened
3/16/2011	7:43:48 PM	Helium MFC set to  100.000000
3/16/2011	7:43:48 PM	H2 MFC set to  0.000000
3/16/2011	7:43:48 PM	BCl3 MFC set to  0.000000
3/16/2011	7:43:48 PM	PHl3 MFC set to  0.000000
3/16/2011	7:43:48 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:43:48 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:43:49 PM	Tube furnace set to 0
3/16/2011	7:44:49 PM	Helium valve closed
3/16/2011	7:44:49 PM	H2 valve closed
3/16/2011	7:44:49 PM	BCl3 valve closed
3/16/2011	7:44:49 PM	PH3 valve closed
3/16/2011	7:44:49 PM	SiCl4 pre valve closed
3/16/2011	7:44:49 PM	SiCl4 post valve closed
3/16/2011	7:44:49 PM	Bubbler valve closed
3/16/2011	7:44:49 PM	Main Vac valve opened
3/16/2011	7:44:49 PM	Bypass valve opened
3/16/2011	7:44:49 PM	Helium MFC set to  0.000000
3/16/2011	7:44:49 PM	H2 MFC set to  0.000000
3/16/2011	7:44:49 PM	BCl3 MFC set to  0.000000
3/16/2011	7:44:49 PM	PHl3 MFC set to  0.000000
3/16/2011	7:44:49 PM	SiCl4 MFC set to  0.000000
3/16/2011	7:44:49 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	7:44:49 PM	Tube furnace set to 0
3/16/2011	7:44:50 PM	Run finished at 7:44 PM
3/16/2011	7:44:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/16/2011	8:59:36 PM	Recipe started at 8:59 PM
3/16/2011	8:59:36 PM	Helium valve closed
3/16/2011	8:59:36 PM	BCl3 valve closed
3/16/2011	8:59:36 PM	PH3 valve closed
3/16/2011	8:59:36 PM	SiCl4 pre valve closed
3/16/2011	8:59:36 PM	SiCl4 post valve closed
3/16/2011	8:59:36 PM	Main Vac valve closed
3/16/2011	8:59:36 PM	Bypass valve closed
3/16/2011	8:59:36 PM	Bubbler valve closed
3/16/2011	8:59:36 PM	H2 valve opened
3/16/2011	8:59:36 PM	Helium MFC set to  0.000000
3/16/2011	8:59:36 PM	H2 MFC set to  500.000000
3/16/2011	8:59:36 PM	BCl3 MFC set to  0.000000
3/16/2011	8:59:36 PM	PHl3 MFC set to  0.000000
3/16/2011	8:59:36 PM	SiCl4 MFC set to  0.000000
3/16/2011	8:59:36 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	8:59:36 PM	Tube furnace set to 100
3/16/2011	9:00:55 PM	Helium valve closed
3/16/2011	9:00:55 PM	BCl3 valve closed
3/16/2011	9:00:55 PM	PH3 valve closed
3/16/2011	9:00:55 PM	SiCl4 pre valve closed
3/16/2011	9:00:55 PM	SiCl4 post valve closed
3/16/2011	9:00:55 PM	Main Vac valve closed
3/16/2011	9:00:55 PM	Bypass valve closed
3/16/2011	9:00:55 PM	H2 valve opened
3/16/2011	9:00:55 PM	Bubbler valve opened
3/16/2011	9:00:55 PM	Helium MFC set to  0.000000
3/16/2011	9:00:55 PM	H2 MFC set to  500.000000
3/16/2011	9:00:55 PM	BCl3 MFC set to  0.000000
3/16/2011	9:00:55 PM	PHl3 MFC set to  0.000000
3/16/2011	9:00:55 PM	SiCl4 MFC set to  0.000000
3/16/2011	9:00:55 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	9:00:55 PM	Tube furnace set to 1000
3/16/2011	9:20:55 PM	Helium valve closed
3/16/2011	9:20:55 PM	PH3 valve closed
3/16/2011	9:20:55 PM	Main Vac valve closed
3/16/2011	9:20:55 PM	Bypass valve closed
3/16/2011	9:20:55 PM	H2 valve opened
3/16/2011	9:20:55 PM	BCl3 valve opened
3/16/2011	9:20:55 PM	SiCl4 pre valve opened
3/16/2011	9:20:55 PM	SiCl4 post valve opened
3/16/2011	9:20:55 PM	Bubbler valve opened
3/16/2011	9:20:55 PM	Helium MFC set to  0.000000
3/16/2011	9:20:55 PM	H2 MFC set to  500.000000
3/16/2011	9:20:55 PM	BCl3 MFC set to  3.000000
3/16/2011	9:20:55 PM	PHl3 MFC set to  0.000000
3/16/2011	9:20:55 PM	SiCl4 MFC set to  50.000000
3/16/2011	9:20:55 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	9:20:55 PM	Tube furnace set to 1000
3/16/2011	9:32:55 PM	H2 valve closed
3/16/2011	9:32:55 PM	BCl3 valve closed
3/16/2011	9:32:55 PM	PH3 valve closed
3/16/2011	9:32:55 PM	SiCl4 pre valve closed
3/16/2011	9:32:55 PM	SiCl4 post valve closed
3/16/2011	9:32:55 PM	Main Vac valve closed
3/16/2011	9:32:55 PM	Bypass valve closed
3/16/2011	9:32:55 PM	Helium valve opened
3/16/2011	9:32:55 PM	Bubbler valve opened
3/16/2011	9:32:55 PM	Helium MFC set to  500.000000
3/16/2011	9:32:55 PM	H2 MFC set to  0.000000
3/16/2011	9:32:55 PM	BCl3 MFC set to  0.000000
3/16/2011	9:32:55 PM	PHl3 MFC set to  0.000000
3/16/2011	9:32:55 PM	SiCl4 MFC set to  0.000000
3/16/2011	9:32:55 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	9:32:56 PM	Tube furnace set to 0
3/16/2011	9:52:55 PM	Helium valve closed
3/16/2011	9:52:55 PM	H2 valve closed
3/16/2011	9:52:55 PM	BCl3 valve closed
3/16/2011	9:52:55 PM	PH3 valve closed
3/16/2011	9:52:55 PM	SiCl4 pre valve closed
3/16/2011	9:52:55 PM	SiCl4 post valve closed
3/16/2011	9:52:55 PM	Main Vac valve closed
3/16/2011	9:52:55 PM	Bypass valve closed
3/16/2011	9:52:55 PM	Bubbler valve closed
3/16/2011	9:52:55 PM	Helium MFC set to  0.000000
3/16/2011	9:52:55 PM	H2 MFC set to  0.000000
3/16/2011	9:52:55 PM	BCl3 MFC set to  0.000000
3/16/2011	9:52:55 PM	PHl3 MFC set to  0.000000
3/16/2011	9:52:56 PM	SiCl4 MFC set to  0.000000
3/16/2011	9:52:56 PM	Bypass solenoid MFC set to  0.000000
3/16/2011	9:52:56 PM	Tube furnace set to 0
3/16/2011	9:52:56 PM	Run finished at 9:52 PM
